Information

LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ S/S NG 36 4 LA 18 PULSE

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series RoHS Specifications Compact, solid, and safe design The case and cover have undergone testing in which they were subjected 100,000 times to impacts equivalent 1.5 times the rated pressure (confirming to MIL standard).

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Model (Hexagon width across flats) ASR ASQ (Hexagon width across flats) AS23 1FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 30.9 AS23 1FE-01-06SK 13.5 22.9 R 1/8 10.9 12 12 14 44.9 26.9 49.9 48 6 11.6 27 36.3 14.2 53 AS23 1FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 40.8 AS23 1FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 39.6 AS23 1FE-02-06SK 17 25.2 18.4 34 6 12.8 37 42.1 R 1/4 14 14 41.2

Low Profile Guide Type

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

Voltage Monitor for PFMV5

(page 41) Perform the standard value offset under no flow conditions.

Digital Flow Monitor

Normal output Reversed output Hysteresis mode Window comparator mode Accumulated output mode (Increment) Accumulated output mode (Decrement) Accumulated pulse output mode Error output mode OFF mode : Applicable errors are Er0, 1, 2, 4, 6 to 8, 14, and 40.

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

High Vacuum L Type Valve

Period and Scope of Warranty 14 7. Parts Replacement Procedure 15 1 XL-OMV0007 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMV0017 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Low-Speed Rotary Actuator

If the products kinetic energy exceeds the allowable value, it could damage the product, and cause a hazard to humans and damage the machinery or equipment. 14. Do not stop or hold the product at midpoint by keeping air pressure in the product. (Air balancers etc.)

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

MIST SEPARATOR

. : 14 HEX. : 14 Option Semi-standard Semi-standard Semi-standard Part no. Port thread Part no. Port thread Rc Rc C2SF-2J-A G G C2SFF-2J-A NPT C2SF-2(Z)-A NPT C2SFN-2J(Z)-A C2SF-2-A B External appearance drawing and part no. B 1/8 HEX. : 14 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard C Part no. Part no.

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

Internal construction and component CY1SBilateral piping type For 6 For 6 For 15 With bumper bolt Fig.14-1Bilateral piping type CY1SGCentralized piping type For 6 For 6 For 15 For 6 With bumper bolt With shock absorber Fig.14-2Centralized piping type 27/28 Table15Component Parts Note 1) * denotes parts that are included in the seal kit.

Mini Rotary Actuator

Note 19 - CRJU05~1 11 8 6 12 4 10 3 10 18 11 14 7 9 1 13 15 17 16 2 17 15 14 18 18 Hexagon socket head set screw 2 17 Wear ring 2 16 Magnet 2 15 Piston seal 2 14 O-ring 2 13 Hexagon nut 2 12 Round head no. 0 Philips screw 3 11 Hexagon socket head cap screw 4 10 Bearing 2 9 Hexagon socket head set screw 2 8 Stopper retainer 1 7 Holder 1 6 Stopper 1 5 Cover 2 4 Bearing retainer 1 3 Shaft

Low Profile Slide Table Series MXF

14 1 4 4 MXF12 16 17.1 33.1 17.1 7.1 7.1 23.1 MXW MXF16 21.2 29.8 19.8 50.8 9.8 19.8 40.8 MXF20 23.4 MXJ 26.7 24.7 74.7 50.2 14.7 16.7 40.2 64.7 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV MXP (mm) B B E MXY Stroke Stroke Model A 20 20 10 30 50 75 100 10 30 50 75 100 MTS MXF8 13.5 9 1 14 14 6 6 MXF12 16 17.1 17.1 33.1 9.1 9.1 25.1 MXF16 21.2 50.8

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 6 Series CQ2Y Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQ2S.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

Note Main parts 14, 15, 16, 17 MHCA6-PS Seal kit 7 Angular Air Gripper Series MHC2-6/MHCA2-6 Dimensions MHC2-6 4-M2 x 0.4 through (Attachment mounting threads) Attachment mounting limiting range 16 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through 5 2.5 4.8 2 2 When closed 10 When open 30 4 2.5 14 20 12 4 6 10 0.05 Auto switch mounting groove dimensions 36 +0.022 0 7H8 depth 1.5 (48)

High Vacuum L Type Valve

Period and Scope of Warranty 14 7. Parts Replacement Procedure 15 1 XL-OMV0003 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.