Multistage Ejector

ZL-OM00801 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2010 SMC Corporation All Rights Reserved 31 -

VP3145/3165/3185

VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned

JXCx-OMU0024

JXC-OMU0024 First edition: July 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved

SFOD-OMT0012

Otherwise, this may cause injury and/or an accident. 14 No.SFOD-OMT0012-A (1-5) STOP button When the STOP button at the top of the main window is selected while the actuator is operating, all of the connected actuators will stop by reducing the speed. However, the operation is not stopped when the Stop button is selected in the cases shown in the following Caution.

LA-OMT0056

by the user. . 7 (5) Software installation . 7 2. 2 Controller settings . 8 (1) Start the setup software . 8 (2) Basic Parameter Setup . 9 (3) Step data setting . 9 3Start up procedureTest operation using a computer . 11 3. 1 Test operation using a computer (Step data operation) . 11 3. 2 Test operation using a computer (Continuous operation) 13 4Start up procedureOperation by PLC . 15 41

EXxx-OMA1018_Eng

SPAIN (34) 945 184 100 Zuazobidea 14, 01015 Vitoria, Spain Provide grounding to assure noise resistance of the product. Individual grounding should be provided close to the product with a short cable.

Peltier-type Chiller Thermo-con/ Compact Type

This may shorten the pump life. 14. If tap water is used, it should satisfy the quality standards shown below.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54

4-channel Flow Monitor ( compatible)

No.PF-OMA1011-A PRODUCT NAME 4-channel Flow Monitor ( compatible) MODEL / Series / Product Number PFG20# Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 16 Internal circuit and wiring example 18 Outline of Settings 21 Initial Setting 22 F 0 Connection product

JXCx-OMT0028CN

0255 15 0255 4 16 0255 17 0255 ID1 18 (ID=1) 19 ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit

PC Wiring System

Dimensions 2 x 5 machined for bar ring Mounting hole 4 x M3 x 0.5 5 1010 55 55 1.2 Alphabetical Index Length Measuring/ Counter 6 (3.7) 67.4 59 55 65 CH IN OUT (3) 33.5 139 8 40 158 41.2 (2) 55 55 2 x 8 6 x 4 16 14 16 16 14 16 14 10 25 25 597 Series PCW 16 Point Output Reduced Common Unit Specifications Model Output PCW-993195 Weight 80 g Refer to page 43 in CAT.E02-20 about the circuit

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

33

14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

Title not found

14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?

OMR0032

. 14 (7) Test operation . 14 3.

Air Cylinder CP Series Cylinder Positioner Assembly

14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?

COQ2BP

D R J (mm) so M8x1 .2S 14 ~ 63 M1Ox1.5 18 80 M12x1.7S 22 NoIe, DIller dlmellSlOIls are same as llYcugh hole type. acnSlu (mm) A 8 C D E F H ..

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

LEC-OM036xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LECG1).14 (2) DIN rail mount type (LECG1D).14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4. Initial Setting.16 4. 1. Switch (NODE Address, B RATE) .16 4. 2. Setting the switch to change the communication (CN2SW).17 4. 3.