VFR

0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7] 0.32 [0.45]

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

PB 107 L1 = 43n + 64 150 193 236 279 322 365 408 451 494 L1 4-1/8 12, 14 port 3 R 65 119 L2 = 43n + 76 162 205 248 291 334 377 420 463 506 L2 54 R 39 21 R2 R1 17 17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5 16 (20) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16

Series MXP Precision Air Slide Table

0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16

Fieldbus system CC-Link compatible SI unit

Occupied area Bit area Word area Unit name Unit part number Input (RX) Output (RY) Input (RWr) Output (RWw) EX600-SMJ (32 output) 32 bit EX600-SMJ (24 output) 24 bit SI unit EX600-SMJ (16 output) 16 bit EX600-SMJ (8 output) 8 bit EX600-DXB 8 bit EX600-DXC 8 bit EX600-DXC1 (With open circuit detection) 8 bit Digital input unit EX600-DXD 16 bit EX600-DXE 16 bit EX600-DXF 16 bit EX600-DYB 8

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

LVQ

37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 126 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 168 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 177 60 88 10 7 20 50.8 38.5 45 17-5-77 16 Series LVQ Dimensions With flow rate adjustment, High back pressure spec. with flow rate adjustment N.C. valve Dimensions (mm) S Model LVQ20S-S07-1 LVQ30S-S11-1 LVQ40S-S13-1 LVQ50S-S19-1 LVQ60S-S25

High Purity Chemical Valve

Inch sizes (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.

EXxx-OMY0004

16 Power when zone 3 active and output 16 Zone 3 29 SOL 23 Power when zone 3 active and output 23 30 N.

C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...

Fieldbus system EtherNet/IP TM compatible SI Unit

4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data format, set the data as follows, regardless of the range setting.

Auto Switch Guide

(Including band and screw) Applicable bore size (mm) Cylinder series 20 BA2 -020 80 100 25 BA2 -025 32 BA2 -032 40 BA2 -040 50 63 Applicable bore size (mm) CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG MGC CDLG1 CDV3, CNA CDVS, CDL1, CE2 RHC, MLGC, REC Cylinder series CDJ2 CDVJ3/5 CDLJ2 CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG CDLG1 MGC RHC, MLGC, REC RSDG 6 63 10 15 50 16 32 40 20 25 BJ2-006 BA -05

Auto Switch Guide

(Including band and screw) Applicable bore size (mm) Cylinder series 20 BA2 -020 80 100 25 BA2 -025 32 BA2 -032 40 BA2 -040 50 63 Applicable bore size (mm) CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG MGC CDLG1 CDV3, CNA CDVS, CDL1, CE2 RHC, MLGC, REC Cylinder series CDJ2 CDVJ3/5 CDLJ2 CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG CDLG1 MGC RHC, MLGC, REC RSDG 6 63 10 15 50 16 32 40 20 25 BJ2-006 BA -05

Auto Switch Guide

(Including band and screw) Applicable bore size (mm) Cylinder series 20 BA2 -020 80 100 25 BA2 -025 32 BA2 -032 40 BA2 -040 50 63 Applicable bore size (mm) CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG MGC CDLG1 CDV3, CNA CDVS, CDL1, CE2 RHC, MLGC, REC Cylinder series CDJ2 CDVJ3/5 CDLJ2 CDM2, CDBM2 CDVM3/5, CDLM2 CDG1, MGG CDLG1 MGC RHC, MLGC, REC RSDG 6 63 10 15 50 16 32 40 20 25 BJ2-006 BA -05

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

CE

connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O

Digital Flow Switches, Series PF2A, Series PF2W

Remote Type Water resistant construction conforming to IP65 Series PF2A Series PF2A For Air Flow rate measurement range (l /min) For Air For Water For High Temperature Fluid (Water 90C) 0.5 to 4 2 to 16 5 to 40 0.5 to 4 2 to 16 5 to 40 10 to 100 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 Integrated Type Series PF2W Series PF2W For Water Application

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

KK/KK13

M L Model 10.4 3 31.6 4 KK3P-04L 5.3 7.2 16 3.7 18 10 12.8 4.5 32.8 6 -06L 11.4 8.0 17 10.1 20 18.4 1/8 15.2 34 8 -08L 16.8 9.7 18.5 15.0 12 23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0 20.9 9 12 22 28.5 49.9 KK6P-12L

Air cylinder

2 n=4, 8, 12, 16 90 1 switches 100 105 110 * n=3,4,5 20 Table 8 21 Auto switch Connection and Example 22 3.

Vacuum Unit Ejector / Vacuum Pump System

When the deformed check valve does not return to flat, replace the check valve with a new one. (20) -69No.