LEC-T1_C

(3-3) LECPLECA .59 (3-3-1) LECPLECA . 61 (3-3-2) LECPLECA . 62 (3-3-3) LECPLECA . 64 2 - (4) .68 (4-1) .68 (4-2) .68 (4-3) .69 (4-3-1) . 69 (5) .70 (5-1) .70 (5-2) .70 (5-3) .70 (5-3-1) . 70 (5-3-2) . 72 (5-3-3) . 73 (5-3-4) . 76 (6) .79 (6-1) .79 (6-2) .79 (6-3) .79 (6-3-1) . 79 (6-3-2) . 80 (6-3-3) . 82 (6-3-4) . 83 (6-3-5) . 83 (7) .84 (7-1) .84 (7-2) .84 (7-3) .85 (7-3-1) . 85 (7-3-

0.01

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 ZSE30 ISE30 ZSE40 ISE40 5.5 35 35 ZSE10 ISE10 Pressure Gauge for Air Catch Sensor ISE70 Square embedded pressure gauge Round pressure gauge

LECP6_C

COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 14.2 2 1 (8) 14 18 B1 A1 17.7 5 6 2 1 A6 B6 15 16 11 30.7 112 [820m] A B-1 2 A A-1 1 L B B-2 6 8 8m B A-2 5 COM-A/COM B-3 3 A 10m COM-B/ A-3 4 B 15m Shield C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5

IDX-OM-W014

. i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 .

Add to Quote Add To Cart Add to Cart SMC AXT100-DR-25 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $6.52 Add to Quote Add To Cart Add to Cart

Add to Quote Add To Cart Add to Cart SMC AXT100-DR-25 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $6.52 Add to Quote Add To Cart Add to Cart

Add to Quote Add To Cart Add to Cart SMC AXT100-DR-25 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $6.52 Add to Quote Add To Cart Add to Cart

PFA/PFW

Construction For air Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR SUS PBT PBT Flow direction 5 Series PFA Digital Flow Switch for Air For Air Dimensions (mm)/ Integrated Display Type 1in=25.4mm Scale: 70% PFA7 0-m 1 5 -27 (N) -67 (N) 67 98 58 6 82 17 1.6 60 FLOW SWITCH UP 34 54 44 SET OUT1 OUT2 DOWN FOR AIR 24 2-Piping port size 4-4.5 40 50 (41.5

IDX-OM-W020

5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 IDFB Series 5-1 5 1 IDX-OM-W020 5 () 60cm 1 2 INOUT INOUT () IDFB Series 5-1 5 2 IDX-OM-W020 6 6 6-1 IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E 10 SCFM 15 SCFM 25 SCFM 41 SCFM 59 SCFM 71 SCFM (ANR) (1) 37 F (2.8C) (17 m 3/h) (25 m 3/h) (43 m 3/h) (70 m 3/h) (100 m 3/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

ZQ

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com b b view 4 6 2 a 5 a 5 5 Component Parts No.

IDX-OM-U010

. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Inch size 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic Caution conductance Controlled flow 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 dm3/(sbar) Be sure to read this before handling the products.

Electric Actuators

High rigidity direct acting guide 100 0.03 Ball screw 50 5 100 Features 3 Simplified Selection Flow Chart Series LX Page Standard stroke (mm) and Maximum speed (mm/s) 25 50 75 100 125 150 175 200 Model Standard CE marking Low particulate generation Deflection Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase 216 282 to 200 to 30 5 phase 210 304 294 5 phase 212 to 80 to 100 5 phase 214

VFA3000

) 5 x , 14 38 (Piping port) 3 position closed center/exhaust center/pressure center: VFA3 40-X1 3 4 5 02 03 2 x 4.3 2 x 18 (Mounting hole) (Pilot port) Breathing port 5 x , 38 14 (Piping port) 1766 5 Port Air Operated Valve Series VFA5000 How to Order Port size 02 03 1 4 3 8 Body ported VFA5 1 20 03 Base mounted VFA5 1 44 03 1(P) port location Nil X1 2 position 3 position Function 2 position

VDW Series

Note 5) Consult SMC regarding drip-proof specifications (equivalent to IP54) .

04-miw-e

5, !6 @4 192

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

rotations Grade 1 Note 1) 1.5MPa 1MPa 0.1MPa 5 to 60C (with no freezing) 10 rotations (8 rotations Note 2)) Note 1) Refer to particulate generation grade classifications.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

CUJ

CUJB10-4 -6 -8 -10 -15 -20 M2.5 x 21L M2.5 x 23L M2.5 x 25L M2.5 x 27L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 38L M3 x 22L M3 x 24L M3 x 26L M3 x 28L M3 x 33L M3 x 38L 4 4 14 M2.5 x 14L 5 5 18 M3 x 18L 5 5 18 M3 x 18L 5 5 18 M3 x 18L For axial mounting With Auto Switch For side mounting A B 27 29 31 33 38 27 29 31 33 38 43 27 29 31 33