H/DL/L/LL

DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 Connection thread 26.5 14 DL10-03 17 22 57 DL10-04 27 28.5 100 DL12-02 25 76 17 43 12 19 28.5 DL12-03 17 26 85 DL12-04 27 17 Union Tee: DT H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

KJ

(mm) a b Effective area (mm2) Weight (g) D L M2 Model 3.2 4 KJH02-23 KJH02-04 8.4 9.3 26.6 26.6 8.8 8.8 12.7 12.7 0.9 0.9 2.4 3.2 2 M1 M2 D D L Applicable tubing a Applicable tubing b Male elbow: KJL T H A Applicable tubing O.D.

ISG

20 26 23 20 26 30 29 10 30 29 10 ISA2 77 77 99 99 IS 126 126 R 3/8 R 3/8 ZSM PF2 IF Dripproof type ISG210 to 291-030 (Without hysteresis scale plate) ISG210 to 231-031 (With hysteresis scale plate) Data Hysteresis adjusting bolt Hysteresis adjusting bolt Setting pressure adjusting bolt Setting pressure adjusting bolt 75 18 8.5 110 56 175 110 56 175 93 8.5 30 2.3 2.3 30 3-6.3 3-6.3 23 20

AS-FG

AS1201FG-M5-23-X12 AQ Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASV Ex.) AS1201FG-M5-23-X214 AK Note) Throttle valve is only compatible with the part no. of the meter-out type.

AS-FM

AS1201FM-M5-23-X12 Ex.) AS1201FM-M5-23-X21 VCHC Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. ASR ASQ Throttle Valve (Without Check Valve) X214 Ex.) AS1201FM-M5-23-X214 Note) Throttle valve is only compatible with the part no. of the meter-out type.

AS-FG

AS1201FG-M5-23-X12 ASP Ex.) AS1201FG-M5-23-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 ASN Ex.) AS1201FG-M5-23-X214 AQ Note) Throttle valve is only compatible with the part no. of the meter-out type.

High Vacuum Slit Valve

In these figures, the slit valve closes an opening (slit) 23 which transfers workload and a gate (seal material ) does not clamp (seal) a seating face . In Figure 2A, the slit valve opens and makes the slit 23 able to transfer workload.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42 Flow Control Equipment Precautions Be sure to read before handling.

Modular Type Air Filters Series AF

fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Bracket mount With auto drain P A B C D E G J M N Q R S T U V B AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 M5 x 0.8 25 67 7 12.5 25 12.5 85 AC 1/8, 1/4 40 97 10 20 40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

3 Port Solenoid Valve

Flow Characteristics Port size 12 Flow characteristics Manifold 23 Port 1, 2, 3 C[dm3/(s bar)] C[dm3/(s bar)] b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 Cv 0.007 0.016 0.012 0.020 Cv 0.012 0.020 0.007 0.016 V114 V114A V124 V124A 0.032 0.070 0.050 0.085 0.050 0.085 0.032 0.070 Type VV100-S41 M5 x 0.8 Note) Values when mounted on the manifold base (5 stations).

AC Servo Motor Driver (CC-Link Type)

5.3.2 Change of parameter block . 23 5.3.3 Parameter Configuration Method (Ex.

AC Servo Motor Driver (CC-Link Type)

5.3.2 Change of parameter block . 23 5.3.3 Parameter Configuration Method (Ex.

AC Servo Motor Driver (SSCNET /H Type)

Please change the parameter in the initial setting. * For LECSS2-T, please set the electronic gear with PC, PLC etc. in your application. -23- Recommended Parameter Values [LEJ] LEJS40T6 LEJS63T7 LEJB40T6 LEJB63T7 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para. Initial value Recommended value No.

OMS0020

Software Specifications . 11 5.1 Serial Communication Specification . 11 5.2 Frame Format . 12 5.3 Command List . 14 5.4 Command Details . 15 (1) Step Data Setting Command "EE" Details . 15 (2) Step Data Save Command "EU" Details . 22 (3) Step Data Reflection Command "AB" Details . 22 (4) Monitor Command "MO" Details . 23 (6) Details on Operation Command "OE"Details . 26 (7) Alarm History

OMR0031

CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6. CN4: Counter Plug . 24 2 - 6.1 Counter plug specifications . 24 6.2 Counter plug wiring . 24 7.

OMR0032

CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6. CN4: Counter Plug . 24 2 - 6.1 Counter plug specifications . 24 6.2 Counter plug wiring . 24 7.

ZQ-OM01301

Note 5) When VA or VB is specified for (1), the check valve is already built in. 2 4 (Straight) 3 6 (Straight) 4 3.2 (Elbow) 5 4 (Elbow) 23 - Doc. No.

Air preparation filter

40 AFF,AM,AMD 80D 1 1/2 404 392 394.5 38 170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.