C95Series

~, 65 45 133 30 6 50 3: ; 65 175 9 15 11 ' 45 1202 12' , ~ I so 1 222 I~ ' : .~' , E5063 63 75 ~50_ L3L 35 16.5 52 40 L67 17.5 9 15 " ESoao 80 95 . 60 I 4j 140 16.5 56 50 I 86 10 11 la " 2.5 183 1250 16 , ., , E5100 ,.100_ 1114 70 ,~5 50 L7 .~ 76 O , 9" _ ,'' _11 18 1 le5 ", 1270 20' I'"' Rotating angle ~aore slze A" 8" N+'BO+90~ (mm) 3240 25' W 160' Q 5063 40' 50' 190' SO.I00 30' SS' 175

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Pressure Relief 3 Port Valve With Locking Holes

APPLICATION 6 3. SPECIFICATIONS 6~7 4. HOW TO ORDER 7~8 5. CONSTRUCTION / PARTS LIST 9~10 6. OPTIONAL ASSEMBLY 11 7. DIMENSIONS 12~13 Pressure Relief 3 Port Valve With Locking Holes Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

ZR IN side, OUT side (/min (ANR)) Weight (g) Model ZM ZFC100-04 4 10 11.5 ZFC100-06 6 20 ZH Metric size ZFC200-06 6 30 21.5 ZU ZFC200-08 8 50 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZFC101-03 5/32" 10 11.5 ZL ZFC101-07 1/4" 20 Inch size ZFC201-07 1/4" 30 ZY

25

Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Note 6) Note 6) Note 6) Note 6) Note 6) Note 1) When using a non-relieving type with a backflow function, if the inlet pressure is increased slowly, the inlet pressure may continue to the outlet side.

Actuator Position Sensor

IO-Link mode Brown (No.1) L+ Black (No.4) C/Q Main circuit IO-Link White (No.2) master Blue (No.3) LAnalogue output (white) is disabled when the IO-Link mode is selected.

MGJ

Miniature Guide Rod Cylinder 6, 10 Series MGJ How to Order 6 10 F8N Miniature Guide Rod Cylinder MGJ Miniature Guide Rod Cylinder Number of auto switches 2 pcs. 1 pc. Nil S Bore size 6 10 6 mm 10 mm Auto switch type Nil Without auto switch (Built-in magnet) Cylinder stroke (mm) Refer to the following table q and w. Select the applicable auto switch from the table below.

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Series 12-REA Sine rodless cylinder

Caution 6. Special tools are necessary for disassembly. 6. Apply additional tightening when remounting the head cover after disassembly. When disassembling, hold the wrench flat section of one head cover with a vice, and remove the other cover using a spanner or adjustable angle wrench on its wrench flat section.

76

(For air ow capacity, refer to the Data E below.) 5 Options Refer to page 9. 6 Finalize the model number. Refer to page 2. 7 Select the optional accessories. Refer to page 10.

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

VND

Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions. External Pilot Adiabatic Space Caution Caution Piping of pilot port (P1, P2) P1 and P2 piping should be as follows according to the model. There is a space between body and cover (: approximate 1 mm) for adiabatic effect.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Compact Guide Cylinder End Lock Type SeriesMGP

M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

Miniature Regulator Series ARJ310

5 q u o Material Note Parts list !

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 6) For options: E1, E2, E3, E4. This product is for overseas use only according to the new Measurement Law. (The SI unit is provided for use in Japan.) Note 7) : For thread type, NPT only.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 6) For options: E1, E2, E3, E4. This product is for overseas use only according to the new Measurement Law. (The SI unit is provided for use in Japan.) Note 7) : For thread type, NPT only.

Vacuum Saving Valve

Pad side q u Description Component Parts Material Surface treatment No.