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2 Connection with external feedback lever Tightening spring (1)Attach to the position that the valve stem and lever form the right angle when the input signal is Right angle Input current 0%(or 100%)position 50%(distribute evenly with 50% input signal set as Input current 50% position the reference).

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5

Relationship between the kinematic viscosity 50 0 1 2 3 4 5 10 20 30 40 50 100 Viscosity (mPas) Transfer is possible up to about 100 mPas.

IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 20 Double clevis Note 1) Note 3) Bore size (mm) Foot Flange CQS-D020 CQS-D025 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 20 25 32 40 50 63 80 100 CQS-F020 CQS-F025 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQS-L020 CQS-L025 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 25 32 40 50 Note 1) When ordering foot brackets, order

IS 0 1 MPa PSE560 100 kPa (0.1 MPa) 1 MPa ZSM For positive pressure 0 500 kPa PF2 PSE564 50 kPa 500 kPa IF Rated pressure range of sensor Regulating pressure range of controller Data 16-3-31

1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value 3 2 1 0 Setting Bit 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 3 Doc.No.DIT-69900-OM005-E Parameter index 0x43 Parameter

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Heavy Duty Stopper Cylinder 50, 63, 80 RS2H Series RoHS How to Order D 30 RS2H 50 L M9BW Bore size 50 63 80 50 mm Port thread type Number of auto switches (auto switch number mounted) 63 mm Rc Nil TN TF 80 mm NPT 2 pcs. Nil S G 1 pc. Piping direction Made to Order Specifications For details, refer to page 595.

(reference 25 oC) Switch output NPN or PNP open collector output: 2 outputs Max. load current 80 mA Max. load voltage 30 VDC (at NPN output) Residual voltage 1 V or less (at load current 80 mA) Output protection Short-circuit protection Output mode Hysteresis mode, window comparator mode Response time 2 ms (10 ms, 50 ms, 0.5 s, 1 s can be selected) Hysteresis Variable Voltage output 1 to

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8

equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 14-18-10 11 Series IDUS/IDFS Specific

Table.1 (mm) Snap ring size Plate set bolt tightening torque Bore size (Nm) 12 RTW13 1.4 16 RTW18 3.3 20 RTW22 5.1 25 RTW26 8.6 32 RTW34 21.6 40 RTW42 21.6 50 RTW52 43.1 63 RTW65 43.1 80 RTW82 121.5 100 RTW102 196 16-2.How to remove seals 1) Rod seal ToolsPrecision screw driver etc. Insert the fine driver to the collar front to pull out the seal like Fig.1. 1. 2.

Consumable parts 3-3-1. Replacement parts Table 9. Seal kit no. 40 50 63 80 100 Seal kit no.

VAC or more (in 50/60 Hz) for 1 minute between terminals and housing Insulation resistance 2 M or more at 500 VDC, between terminals and housing Supply port Rc1/8 Piping spec.

Lead wire length Nil 0.6 m 30 3 m Example) ZSE1-00-15CN-X129 ZS-20-5A-50 1 pc. 1 pc. 50 5 m 1086 Ejector Valve Unit Series ZYY/ZYX Internal Circuit and Wiring Example How to Set the Pressure How to Use the Connector 1. Attaching and detaching connectors ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied