Air Slide Table Series MXJ

Operating port 2 x M3 x 0.5 (Not plugged in the case of the clean series) J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 D4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A -X Model G GA H I J K M Z ZZ MXJ8-5 MXJ8-10 MXJ8-15 MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 Individual -X 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 19 28 20 8 25 39.5 54.5 48 55 181 Series MXJ Dimensions

Electric Actuators

Refer to the dimensions on page 27 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 110.5 135.5 160.5 185.5 210.5 235.5 260.5 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348

F

Pressure 0.1MPa / 14.5PSI Minimum Operating Pressure 5 ~ 60C / 40~140F Ambient and Fluid Temperature 8 Turns Number of Needle Rotations H O W T O O R D E R (N)AS1000-4000 D I M E N S I O N S (N)AS1200, 2200, 3200, 4200 NAS 200 O P T I O N N North America A R E A C O D E Nil T Tamper-Resistant D Tamper-Resistant Flat Head Screw Driver Adjustment Type B O D Y S I Z E 1 M3, M5 2 18, 14 3 38

PA3000/5000/PAX1000

Switching valve parts kit Pilot valve kit Switching valve assembly kit KT-PA5-38 KT-PA5-38 KT-PAX1-39 Pilot valve kit Pulsation attenuator control valve kit Pilot valve kit PA5000/Air operated type PA3000/Air operated type PB1000 KT-PA3-31 KT-PA5-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PB1-2 Diaphragm kit KT-PA3-36 KT-PA5-36 Check valve kit Check valve kit KT-PB1-1 Check valve kit

Prevents Micro-Bubbles

Minimum position Seal Standard size Insert bushing End face Tubing Body Reducer type 17-5-38 36 Series LV High Purity Chemical Valve Fitting Assembly Procedure Assemble fittings following the procedure shown below.

VXD21/22/23

Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Model Air Water Thread Oil AC DC AC DC AC DC 0.7 0.7 1.0 0.7 1.0 1.0 Max. system pressure (MPa) 1 4 1.9 2.4 4.5 2.4 5.5 9.5 VXD2130-02 VXD2130-03 VXD2140-03 VXD2130-04 VXD2140-04 VXD2150-06 10 10 15 10 15 20 0.02 0.02 0.02 0.02 0.02 0.02 2.0 2.4 5.0 2.4 5.5 9.5 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18 9.2 20 38

VXZ

/Valve Specifications LQ Model AC DC AC DC AC Water Air Max. operating pressure differential (MPa) Oil DC Max. system pressure (MPa) Av x 10 m Cv converted C[dm /(sbar)] b Cv Water, Oil, Steam Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Port size Weight (g) Air LVN 2 -6 3 1 4 3 8 1 2 3 4 600 600 850 1370 2.4 2.8 6.0 9.5 0.44 0.42 0.34 0.20 8.5 11 23 38

VM

Push Button (Flush)/VZM450-01-33 Panel mounted hole JIS Symbol 21N F.O.F. 0.5MPa supply 4.8mm P.T. 1.7mm O.T. 6.5mm T.T. 3.5-38 VZM400 Series VZM400 Twist Selector (2 position)/VZM450-01-34R, B, G, Y Panel mounted hole JIS Symbol 23N F.O.F. 0.5MPa supply 90 T.T.

Title not found

0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l\

Rotary Table/

Load 38 Series MSQ Auto Switch Precautions 2 Be sure to read before handling. Wiring Mounting and Adjustment Warning Warning 5.Do not allow short circuit of loads. If the power is turned ON with a load in a short circuit condition, the switch will be instantly damaged because of excess current flow into the switch.

Thermo-chiller

2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, PU, EPDM, PVC, NBR, PE, NR, PBT, PP , POM, Carbon, Ceramic Temperature range 41 to 104F (5 to 40C) Pressure range 44 to 73 psi (0.3 to 0.5 MPa) Required ow 50/60 Hz 8.7/9.0 gal/min (33/34 L/min) 10/10.5 gal/min (38

Stainless Steel 316

(mm) Effective area Note 2) (mm2) Note 1) L M Weight (g) Model D 2 x applicable tubing 4 6 8 10 12 KQGH04-00 KQGH06-00 KQGH08-00 KQGH10-00 KQGH12-00 11 37 18 16 5.6 D D 13 38 18.5 22 13.1 M M 15 42.8 20.9 31 26.1 L 19 47 23 54 41.5 21 50.6 24.8 66 58.3 Note 1) D is maximum diameter.

HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

KR

layer KRK06-02S KRK06-01S 1 8 12 10 33 13 21 35 25 26 36 33 MS 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 10 18 36.5 35 1 4 19 3.4 14 17 12 14 17 6 12.8 6.9 KRK06-03S 37 19.7 3 8 1 8 Applicable tubing T KRK08-01S KRK08-02S KRK08-03S KRK10-01S KRK10-02S KRK10-03S 1 4 3 8 1 8 1 4 3 8 39 41 42 43.5 45 15.2 12 20.5 8 20.5 VMG 24 17 30.9 23.2 23 18.5 17 10 24 1 2 KRK10-04S 47.5 63 28 38

Speed Controller: Standard Type Series AS In-line Type

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ O-ring NBR u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 O-ring NBR ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

KA

(mm) A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Soft Start-up Valve

Tightening Torque when Piping Connection thread Proper tightening torque [Nm] Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 4. Piping to products When piping to products, avoid making an error of supply port etc., by referring to the operation manuals. 5.

Vacuum Pad

with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50 P. 36 HW Front matter 7 Series Variations Type Symbol Variations Pad Diameter Page Heavy-duty Ball Joint Pad P. 37 For adsorption of work pieces with inclined or curved surface With adapter: Vacuum inlet direction Vertical P. 38

Vacuum Pad

with rib) For heavy or large work pieces P. 33 H Heavy-duty (Thin flat with rib) P. 33 HT 150, 250 32, 150 Heavy-duty (Bellows) P. 35 HB Heavy-duty (Oval) 30 x 50 P. 36 HW Front matter 7 Series Variations Type Symbol Variations Pad Diameter Page Heavy-duty Ball Joint Pad P. 37 For adsorption of work pieces with inclined or curved surface With adapter: Vacuum inlet direction Vertical P. 38

Smooth Cylinder

M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38