Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 Symbol C3 C4 C6 M5 CM Ports 1, 3, 5 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting M5 threads Mixed size/with port plug Top ported elbow 3.2 One-touch fitting Top ported elbow 4 One-touch fitting Top ported elbow 6 One-touch fitting M5 threads Bottom ported elbow 3.2 One-touch fitting Bottom ported elbow 4 One-touch fitting Bottom ported

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

IDX-OM-Z004

[25] 80 30 40 (mg/L) 200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

M Series

Applicable thread Material Applicable model M-3G M3 PVC M-3-3, 4, 6 M-3G2 Stainless steel S304, NBR M-3-2 M-5G1 PVC Gasket M-5G2 Stainless steel S304, NBR M series M5 M-5G3 Stainless steel 316, special FKM M-5GH Nylon 66, GF30% M-5AL-6, M-5ALH-6 M-5HL-4, 6, M-5HLH-4, 6 M-5-4-P01 Brass (Electroless nickel plating) M-01H-4, M-5H-4 M-5HL-4, M-5HLH-4 Cap nut M-5-6-P01 Brass (Electroless nickel

VQ5000

0: 500mm L 1: 1500mm L 2: 3000mm U D U D U D 83.5 106 59.2 46.8 55.5 M5 ground screw Station No. 9 9 2n-1/2 (ports A, B) Electrical entry on U side (LU) 34.5 U side n 12 X ... ... ... ... ... ... ...

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0: 500mm L 1: 1500mm L 2: 3000mm U D U D U D 83.5 106 59.2 46.8 55.5 M5 ground screw Station No. 9 9 2n-1/2 (ports A, B) Electrical entry on U side (LU) 34.5 U side n 12 X ... ... ... ... ... ... ...

KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

Digital Gap Checker

ISA3-F ISA3-G ISA3-H Piping length: 1 m Piping length: 1 m Piping length: 1 m Piping length: 3 m Piping length: 3 m Piping length: 3 m Piping length: 5 m Piping length: 5 m Piping length: 5 m -17No.PS-OMR0002-K 2 About this product Response time Response time is the elapsed time between the pressure supply and the turning ON of the switch output.

Digital Gap Checker

ISA3-F ISA3-G ISA3-H Piping length: 1 m Piping length: 1 m Piping length: 1 m Piping length: 3 m Piping length: 3 m Piping length: 3 m Piping length: 5 m Piping length: 5 m Piping length: 5 m -18No.PS-OMT0002-E 2 About this product Response time Response time is the elapsed time between the pressure supply and the turning ON of the switch output.

EXxx-OMU0020EN

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit: torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 3-1 Required screws Caution All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). -13No.EX##-OMU0020-A 3.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.

Air Cylinder Series CA2

H H + Stroke B C ZZ + 2 Stroke CJ2 CM2 e e e d d CG1 f 10.2 10.2 l l + Stroke f l f 10.2 h + l h + l + Stroke S + Stroke h + l MB ZZ + l + 2 Stroke ZZ + 2l + 2 Stroke (mm) MB1 Stroke range (mm) A Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N Without rod boot With rod boot CA2 Up to 500 20 to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 Up to 600 20

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

ZSE3/ISE3

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type. Please refer to page 16-4-5 for figure.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type.

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

VZS

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

Dedicated Controller

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

HRS100/150

Cable size Crimped terminal on the rated current thermo-chiller side HRS100-Al-20-l HRS100-Wl-20-l 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 30 A M5 HRS150-Al-20-l HRS150-Wl-20-l 40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-Al-40-l HRS100-Wl-40-l 3-phase 380 to

Digital Gap Checker ( compatible)

Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1 m, 3 m, 5 m Piping length: 1 m, 3 m, 5 m : In the default condition, the value can be displayed as 0. : In the default condition, when the distance is below 9, 0 will be displayed.