XLA- ∗ -F7NJ ∗ - ∗ Series

Insert the cover. 14 XL*-OML0013-B Revision history Safety Instructions PQ Limited warranty and Disclaimer SR 1st Printing :MP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All

XLDV Series

All Rights Reserved 14 XL-OMM0005-A

XMD/XYD Series

Mount the needle seat or S valve seal assembly. 14 XL-OMP0003-A Step 6 Step 7 Tightening torque of bolt C Nm Bolt C O ring Model Tightening torque S valve seal Ass'y or Needle seat X*D-25 0.360.1 Other than X*D-25 0.630.1 Mounting surface of O ring Body Pilot port S Apply 0.3MPa of air pressure to the pilot port S.

FGD-C

(L250) (7)(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

IP80-OM00019

A (1)(IEC79)ExdBT5 A ExdBT5 A) 164 ) B) () (1.5) 4 P368010-32 7.010.0 P368010-33 10.112.0 16 14 7.

PSxx-OMG0005CN

1.5 ZS-31-X189 20 9 NPT1/8 NPT1/8 14 1.5 ZS-31-X175 29 13 R1/4 R1/4 17 1.6 ZS-31-X186 29 13 NPT1/4 NPT1/4 17 1.6 -14No.PS-OMG0005CN-E Revision history A B C D E [2018 7 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

CG1x-OM0006N

ON 23 4. 10. 24 5. 1 CG5SR CG5SV 2 15 3 16 NBR FKM 4 17 5 18 6 19 7 20 PET 8 21 9 22 10 11 12 13 14 1CG1 2 11. 25 Revision history 1: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

RS2H-OM0045P

(M4),90 , -9 M4 1.5Nm -10 14 - 6-3. 5080 O 6-3-1. 4 50 : 12.5Nm 63 : 24.5Nm 80 : 42.0Nm -11 6-3-2. 1) -12 -12 2) 15 - 6-3-3. GR-S-010(10g),GR-S-020(20g) 1) 2) 3)O 4) -13 -13 6-3-4. 1)() -14 2)() -14 16 - 6-4. 6-4-1. B , 1 6-4-2. 7. 7-1.

CG1-SMV13_en

Rc 1/8 7 ~ 9 Rc 1/4 12 ~ 14 Fluid Compressed Dry Air 7 Limitations of Use Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

Rotary Actuator

Readjust the mounting position until the green LED lights up. 14 - Rotary Actuator How to Use the Air-hydro Type Caution on Design Warning Do not use a rotary actuator of the air-hydro type near flames, or in equipment or machinery that exceeds an ambient temperatures of 60.

MHx-OMZ0005

No.MH*-OMZ0005 / / JMHZ2-16D-X7400B-(HC10/HC10DT)-(N/P) . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 JMHZ2-16D-X7400B-HC10 . 6 JMHZ2-16D-X7400B-HC10DT . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. . 10 JMHZ2-16D-X7400B-HC10-(*) . 10 JMHZ2-16D-X7400B-HC10DT-(*) . 11 3-6. . 12 3-7. . 13 JMHZ2-16D-X7400B-HC10-(*) . 13 JMHZ2-16D-X7400B-HC10DT-(*) . 13 4 . 14 4-1. . 14 4-2. 3 . 15 4-3. . 16 5. . 17 5-1

Setting software for e-Actuator (e-Actuator setup tool)

(Within 14 alphanumeric characters) button: Go to the Easy setup screen. button: Go to the Alarm/Monitor screen. When an alarm is detected, the button turns pink and flashes. 4.2 Communication failure When the communication connection cannot be established, the following screen will be displayed.

Standby Regulator

Operation and Adjustment 13-14 7. Trouble Shooting 15 8. How to Replace the Components 16-19 8-1. Diaphragm Assembly Replacement 16 8-2. Valve Guide Assembly and Valve Assembly Replacement 17 8-3. Square Embedded Type Pressure Gauge Replacement 18 8-4. Blanking Plate Assembly Replacement 19 9. Disassembly Drawing 20-21 10.

Ｖ cylinder

Tightening torque Bore size Socket Tightening torque[Nm] 40,50 13 (M8) 7.4 63 17 (M10) 20 80,100 19 (M12) 29 2 4 Tie rod tightening order. 14 3-2-2. Removal of seals 1) Rod seal Insert a precision screwdriver from the front of the cover to pull out the seal as shown in Fig. 4.

VFR3000 Series

Note 3) Station numbers are started from D side although connector is mounted on D or U Side. 11 VFR3000-OMH0003-B TROUBLE SHOOTING (14) Excessive supply oil amount (11) Intrusion of foreign matter Wrong Pressure supplied X port.

Precision Regulator

Recommended tightening torque (Nm) Thread size 1/4 Torque 12 to 14 -9- (2) Do not apply torsion or bending moment other than the weight of the product itself.

Precision Regulator

Leakage due to deterioration of rubber parts Consult SMC. 9 -13- -14- Revision history A Thread type (NPT,G) addition B Format change and content review C Sectional view filter deletion of P.5 D Name plate layout change E Content review F P.5 Sectional view change 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note

SI unit (CC-Link compatible)

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.EX-OMP0005-I

KQ-OMS0022

Chemical Compatibility 13 to 14 -1- Stainless steel 316 One-touch Fittings Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Precision Regulator

Dimensions 13 to 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.