B L Y Model C D E K A B K L Y Model C F G G D E E ZPY20B ZPY25B ZPY06B ZPY08B 20 25 22 27 23.5 24 33.5 34 51.5 52 79.5 80 85 69.5 70 12.4 15.6 25 28 18.9 37 6 8 7 9 3.3 4.7 9.1 10.1 2.5 20 45 25 50.5 4 10.5 ZQ 25 15 32 34 29 39 57 ZPY32B 75 14 Applicable Tubing Applicable Tubing ZF P Q R Applicable tubing Q R Applicable tubing P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube
Page 319 Features 14 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12
, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15
E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8
F A B C W W CX RR L S + Stroke ZZ + Stroke H CB Stroke range Bore size (mm) B CD F A D CB G C E GA J NB S CX GB L NA P PJ RR MM MA K H 40 52 14 64 8 25 to 800 M6 x 1 M16 x 1.5 46 29 12 22 22 19 40 34 33 107 20 16 19 3/8 58 17 19 47 50 25 to 800 65 64 M8 x 1 M20 x 1.5 46.5 28.5 14 15 28 28 24 50 42 34 108 20 16 19 3/8 58 17 25 11 59 +0.043 0 63 25 to 800 77 93 M8 x 1 M27 x 2 46 33 20 19 36
Up to 300 20 26 10 12 8 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 25 26 12 20 10 69 90 45 17 19.5 22 7 9 4 64.5 9 8 83.5 13 Up to 300 32 32 14 20 10 76 100.5 52 22 21 24 8 11 4 70 8 11 90.5 16 Up to 300 40 H GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 M20 x 1.5 M8 x 1.25 189 180 11.5 127 9 38 20 19.5 22 12 5 24 15 28 5 4 41 20 M26 x 1.5 M10
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
output / Wiring top entry Digital type Note 4) ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Copper-free, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S
40 120.5 46.5 104.5 65 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 18 32 9 Up to 600 90 1/4 20 45 134.5 56.5 119.5 75 17.5 23 68 35 27 14 20 14 12 80 19 13 22 37 11.5 Up to 750 30 102 1/4 45 169 72 150 95 22 33 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 25 37.5 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z 32 M10
75 1/4 40 120.5 65 46.5 104.5 12.5 19 58.5 35 27 14 20 14 15 2063 16.5 11 32 18 9 Up to 600 90 1/4 20 45 134.5 75 56.5 119.5 17.5 23 68 35 27 14 20 14 12 80 19 13 37 22 11.5 Up to 750 102 1/4 30 45 169 95 72 150 33 22 81 40 32 22 25 20 18 Data 100 19 16 26 37 17 Up to 750 30 116 1/4 55 189 114 89 170 37.5 25 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z
M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!
WB 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 32 20 to 55 74 16 60 to 185 107 190 to 300 144 Z WA WC + Stroke [mm] LEYG M, LEYG L Common Size Stroke range (mm) B C DA EB EH EV FA FB FC G GA H J K NA NC 15 to 35 136.5 50 20 85 103 52.3 11 14.5 12.5 5.4 40.3 53.3 30.8 29 M5 x 0.8 6.5 40 to 100 67.5 105 to 120 161.5 125 to 200 84.5 205 to 300 102 25 20 to 35 156 55 25 101 123 63.8
40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6
K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5
ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA
16 47 13 100 299 100 35 123 322 1/5 stroke 125 1/2 77 137 12 20 16 55 15 100 305 100 35 123 328 160 3/4 94 155 12 24 20 60 20 108 343 120 38 131 366 93 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Front flange type: CHAF 2-Rc P V T Cushion adjustment screw Air release 4-FD 4-J GA GB Width across flats G MM R (max.) d W W D FY B E MA a FT C A K F NA NB
) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13 13 l + Stroke 9 l 9 A K f N N f K A ZZ + 2 Stroke S + Stroke h + Stroke h Without Air Cushion S ZZ Stroke range Width across flats Bore (mm) Eff. thread length C B A D Ee11 F G H MA MB J K MM N P V W S ZZ 32 40 50 63 80 100 125 46 52 65 75 95 114 136 32.5 38 46.5 56.5 72 89 110 12 16 20 20 25 30 32 30 35 40 45 45 55
+0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS
For details, refer to pages 3-7-19 and 3-7-20.
Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k.