lPSMt

" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

Exhaust Cleaner Series AMC

Thread type Nil R, Rc N NPT F G 1 4 Port size 10 02 Female Female Male Female Female Male Male Male Male 1 2 14 20 1 1 VEX 03 3 8 1 AN 04 1 2 06 3 4 AMC Specifications Ambient and fluid temperature Fluid Compressed air 5 to 60C JIS Symbol 0.1 MPa or less Element inlet pressure Noise reduction Oil mist removal 35 dB or more 99.9% or more How to Order Oil Bowl Assembly Drain cock (Standard

Thermo-chiller

(0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Note 10) The anchor bolt xing brackets (including 4 M10 bolts) are used for xing to wooden skids when packaging the thermo-chiller. No anchor bolt is included. 138 A

Thermo-chiller

(In such a case, use a bypass piping set (sold separately).) 8 Purchase an earth leakage breaker with current sensitivity of 30 mA separately. 9 Front: 1 m, height: 1 m, stable with no load, Other conditions See 3. 10 Weight in the dry state without circulating uids 9

Clean Air Filter SFD Series

(Nil) ID Case material Material Resin Aluminum Stainless steel Symbol 0 1 2 Port size Connection size Note IDG Symbol C04 C06 C08 C10 C12 02 N02 F02 4 6 8 10 12 IDK SFD100 only Clean One-touch fittings (KP series) Symbol 1 and 2 are made to order. For details, refer to page 325.

Exhaust Cleaner for Clean Rooms AMP Series

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.8 to 5 V ?2.5% F.S.?

IDX-OM-P023E

The fluctuation of the power supply voltage should be kept within +/-10% of the rated voltage. Refer to 5.2 Reset of protective equipment and reset the protective circuit. The fluctuation of the power supply voltage is too large. When the cooling water is not flowing, the compressor for refrigeration has stopped with the lamp lit up. Water-cooled condenser is dirty.

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Series GS40 Digital Pressure Sensor 1

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

SJ1000/2000/3000 Series

[Load: 10 N or less] Turning without pushing can cause damage to the manual override and trouble such as air leakage, etc. Manual Override Switch Operation For manual override operation, move the manual override switch to a position where letters A and B can be seen.

Precision Regulator

Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8. Dimensions 13 to 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Bacteria Removal Filter

Fastening torque recommended: 10+/-2Nm 5-6. Start of operation Before actual operation, confirm there is no leakage. If there is leakage, remove the element after stopping the operation. Clean the seating surfaces, check and replace the O-ring and tighten the cover. -10- Doc. No. SF-OMZ0013-B 6. Dimensions -11- Doc. No. SF-OMZ0013-B Revision history Rev.

AMP

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VHS20/30/40/50

I 10 I G H F E X H .

02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings:?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140