PSE530/200

When setting the pressure, allow 7 digits or more.

IP80-OM00019

(1) (2) (3) (4) (5) (6) OUT1 (1)OUT1OUT2 (2)+(3) (4)/ () (5)IP8000(2) (6)IP8100(3) 15 7-1 5 O K O O K K (1) 0% (4mAD (1) 0% (4mAD C) C) (2) 100%(20 (2) 100%(2 mADC) 0mADC) (3) 0%(1) (3) 0%(1) (4) (4) 16 7-2 / () mADC 17 18 18OUT1OUT2A 1718 ( 1/16-1 ) 11-1(/) 7-3 A 1M1/8OUT117 1/8 1/81/4 2A(17) SUPOUT1 A 17 8.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Refrigerated Air Dryer

(C) 32 Ambient temperature (C) 10 Outlet air pressure dew point (C) Compressed air Working fluid 5 to 80 Inlet air pressure (C) 0.15 to 1.0 Inlet air temperature (MPa) 2 to 40 (Relative humidity of 85% or less) Ambient temperature (humidity) (C) Note 3) Power supply voltage (frequency) Single phase: 100 VAC (50 Hz), 100 to 110 VAC (60 Hz) Single phase: 200 VAC (50 Hz), 200 to 220 VAC (60

CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

Miniature Tubing & Miniature Fittings Series TU/M

(mm) Thread Weight g H A B C E F D G I J Model M3 x 0.5 M5 x 0.8 M-3ALU-2 M-5ALHU-2 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 1.6 3.5 0.9 2.5 3 4 4 2 x 1 .2 Parts list Width across flats H Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

Miniature Tubing & Miniature Fittings

(mm) Thread Weight g H A B C E F D G I J Model M3 x 0.5 M5 x 0.8 M-3ALU-2 M-5ALHU-2 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 1.6 3.5 0.9 2.5 3 4 4 2 x 1 .2 Parts list Width across flats H Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

1.63

C dimension (Body length): 84 mm Example MGPW MGPW MGQ Theoretical Output MGG OUT IN Made to Order: Individual Specifications (For details, refer to page 517.)

Title not found

Compression nut design resists side loading Nut Seal lock F Seal lock E B Tubing support C D A Tubing Taper surface Tube support resists crimping and deformation of tubing.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Minimal flow rate variations between knob rotations Contact face stopper Fully closed Mounting Variations DIN rail mounting bracket Direct mounting Holder mounting DIN rail mounting If the mounting surface does not interfere with the bonnet: If the mounting surface interferes with the bonnet: Page 7 Page 7 Adapter needed Page 10 Bonnet Bonnet Bonnet Page 7 Holder for speed controller Mounting

IDUS/IDFS

(C) Outlet air press. dew point (C) Ambient temp.

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

LV50-OMQ0002

C : Contents revised in several places. D : Contents are added. E : Contents revised in several places. F : Contents revised in several places.

CE

CE1 Series/ 1. / 1 1.5 *3) *3)1 1 () 1. 2. 3. a. b. c. 4. a. b. c. 6. 1. 7. a.060 b.2585%RH c. d. e. 8. ,, f. g.( 9. ) h. i. j. k. l. 2. 1. 2. 1. 3 2. 1. 3. 4. 1. 12:0.071.0MPa 2063:0.051.0MPa :060 5. 2. 1. 5m 1. 2. 2. 3.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

C D E F Dimensions Part no.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20