Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Wedge Cam Operation Provides

9 Seal kit NBR MHK12-PS MHK16-PS MHK20-PS MHK25-PS CR(2) P3318113 P3318113-1 P3318113-2 P3318205 P3318205-1 P3318205-2 P3318213 P3318213-1 P3318213-2 P3318305 P3318305-1 P3318305-2 P3318313 P3318313-1 P3318313-2 P3318405 P3318405-1 P3318405-2 P3318413 P3318413-1 P3318413-2 P3318105 P3318105-1 P3318105-2 FKM(2) @0 Dust cover Si(2) Note 1) No. !6 to !

VXA21/22

Base, Body Seal Aluminum NBR, FPM, EPR Model Manifold base Port A Rc(PT) Port P Rc(PT) Port R Rc(PT) VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations ManifoldO Manifold style Manifold stations B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 4.1-73 VVXA31/32 Common (C.O.)

MHK2

F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

MHK2

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves. Standard switch grooves 12-6-17

Serial Network

4 0 N 2 B S X80 2 0 3 0 ITV 33 DeviceNet compatible Model 2000 type 3000 type 2 3 Thread type Pressure range Rc(PT) NPT NPTF G(PF) Nil N T F Cable connector type 0.005 to 0.1MPa 0.005 to 0.5MPa 0.005 to 0.9MPa 1 3 5 Without Straight type 3m Nil S Option (bracket) Port size Without bracket Flat bracket L-bracket Nil B C 1/4 3/8 2 3 Specifications ITV2050 ITV3050 ITV2030 ITV3030 ITV2010 ITV3010

Series HAW Water Cooled Aftercooler 1

C D E F G H J K L M N P Q R S T U V W Y Z 473 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

MHx-OMM0057

of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 *3) *3)1 1 () 3 - 2

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

LZ-OM004xx

B C D 44 Mounting J ig to the piston 43 Mounting to workpiece Fem ale thread type Male thread type D o No.LZ-OM00401 B (3/3) (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Rack & Pinion Type Rotary Table Size: 1, 2, 3, 7, 10, 20, 30, 50 Series MSQ 1122How to Order Size: 1, 2, 3, 7 11 Vacuum suction type Clean series A High precision type B Basic type 1 Size Nil E Side ported Front ported 2 3 7 11 MSQ B 1 A M9B Number of auto switches A With adjustment bolt Nil S n 2 pcs. 1 pc. n pcs.

Information

0.8/0.8 7.5/8.3 0.7/0.8 Rated power consumption Note 4) (50/60 Hz) (kVA) Noise level Note 10) (50/60 Hz) (dB) 58/55 Fitting (for drain outlet) 1 pc., Input/output signal connector 1 pc., Power supply connector 1 pc., Operation manual (for installation/operation) 1, Quick manual (with a clear case) 1, Alarm code list sticker 1, Ferritic core (for communication) 1 pc.

Multistage Ejector Series ZL112/212 1

Tank capacity: 1 Supply pressure: 0.4 MPa Tank capacity: 1 Supply pressure: 0.4 MPa Time to Reach Vacuum Time to Reach Vacuum 100 90 100 90 Vacuum pressure reached 89.3 kPa Vacuum pressure reached 89.3 kPa 80 kPa 80 kPa 80 80 Vacuum pressure in tank (kPa) Vacuum pressure in tank (kPa) 66.7 kPa 66.7 kPa 70 70 60 60 53.3 kPa 53.3 kPa 50 50 40 kPa 40 kPa 40 40 26.7 kPa 26.7 kPa 30 30 20 20 13.3

SI unit for DeviceNet ®

(See Fig. b) : Each bit status, 0 or 1, of the data shows the ON or OFF solenoid valve status (0: OFF, 1: ON), and the output number starting from 0 will be assigned to from the lowest bit of the memory data.

IDX-OM-U022

(1 ) () IDF-FL219 (IDFA100F,125F ) 1 IDF-FL220 (IDFA150F ) 1 ADH-E400 (V ) 1 () 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 2 (IDF150F3) A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDFA100F150F 6 9 6.6 IDX-OM-U022 7. 7 7.1 / IDF100150F 7.1 7 1 A2020 11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VER 3 L L 2 2 VEA 10 AFM AF ARP20K/30K/40K VHS VY1 1 1 12 2 4 14 Solenoid valve: Non-lube type VBA VBAT 5 1 3 AP100 2 1 2 1 2 1 L L AFM AF ARP 701 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Symbol Regulator with backflow function Regulator

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VY1 3 L L VBA VBAT 2 2 10 AFM AF ARP20K/30K/40K VHS AP100 1 1 12 2 4 14 Solenoid valve: Non-lube type 5 1 3 2 1 2 1 2 1 L L AFM AF ARP 759 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Symbol Regulator with backflow function

Digital Pressure Switch

When 1 digit = 1 kPa, the pressure is given with an increment of 1 kPa, e.g., 1, 2, 3, , Digit (min. setting unit) 99, 100. F Fine adjustment mode See "Fine adjustment of indicated value". Abbreviation of full span or full scale which means the max. fluctuation range. For example, when the pressure range is 0 to 1[MPa], the F.S. will be 0-0 = 1[MPa]. F.S.