Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

For open collector method, it is 2 m or less. 103 Series LECSA Series LECSB Options Motor cable, Lock cable, Encoder cable LE-CSM-: Motor cable LE CS M S 5 A (13.7) Direction of connector Motor type (30) L A B S Axis side AC servo motor Counter axis side LE-CSB-: Lock cable Cable length (L) [m] Cable contents 2 5 M B E 2 5 Motor cable (11.8) Lock cable A 10 Encoder cable L (29.6) Cable type

MLGP

5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

Modular Type Filter Regulator Series AW

30.5 38.5 K 5 3.5 1.5 N 34 40 54 Q 5.4 6.5 8.5 S 15.4 8 10.5 M 30 41 50 P 44 46 54 Y 14 19 21 Z 6 7 7 V 30 31 35.5 W 28.5 38.5 42.5 B 190 242 278 U 2.3 2.3 2.3 T 55 53 70 AWM20 AWM30 AWM40 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Optional specification With drain guide B With barb fitting B Metal bowl B 173 214 252 Metal bowl with level gauge Model B AWM20 AWM30 AWM40 208 246 209 247 234 272 70

Electric Rotary Table

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

/

19.5 Approx. 300 30 19.5 30 48.5 Approx. 280 G1/2 Width across flats 27 Width across flats 27 A A T T IN OUT IN OUT B B K L K L M 40 M 40 2 x P 1 (IN), 2 (OUT) port (50) (50) 2 x P 1 (IN), 2 (OUT) port DIN terminal: D Conduit terminal: T 19.5 53.5 65.5 19.5 34 (69.5) (100.5) 30 32 T Width across flats 27 Width across flats 27 31.5 (44) 25 Applications A A T G1/2 OUT IN OUT IN B B G1/2 K

Escapements Series MIW/MIS

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

Large Size Vacuum Module: Series ZR

B Bracket B Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators L1 Manual override L2 10 (A, B port) 1/4 P = 20.5 (Pitch) 23.5 16.5 + 11.5 + (For mounting) 4 x 4.5 53.6 40.6 100.6 (P, EA, EB port) 1/4 97.3 30 9.4 20 B B B B 38.5 51.5 38.5 EB EA P EA EB P 30 21 21 21 19 60 A A A A + + + + Applicable tubing O.D.: 8, 5/16" (A, B port) One-touch fitting Air Preparation Equipment Pressure Control Equipment Flow

7

size I F J (D) K L (mm) Electrical entry Port size P A B C E F I J K L Model Grommet Grommet (with surge D M voltage suppressor) DIN terminal T U T T U U V 61 (67) 27 47.5 (53.5) 30 53 (59) 64.5 52.5 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 Model Mounting bracket dimensions Port size P a b d e f 3/8, 1/2 47.5 71.5 57 34 39 VXD2 4 B ( ): Denotes the Normally Open (

SMC

30 76 46 73 58 FF 22.5 5H9 depth 5 +0.030 0 F 25 5H9 depth 5 +0.030 0 N 1 x F 2 51 2-M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 depth 5 +0.030 0 30 1.5 NN-M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200

VFS

) Plug-in Non plug-in C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VF 3 4 2 position VFS6110 29 0.10 6.8 38 0.10 9.0 Single 180 160 or less 2.5 VFS6100 1 VFR 3 4 180 60 or less 2.75 9.0 VFS6210 29 0.10 6.8 38 0.10 Double VFS6200 1 VP4 Note 1) Based on JIS B 8375-1981 (once per 30 days) for the min. operating frequency.

AIR COMBINATION

Q2 R S U V M50.8 AC10B-A 1/16 56 59.9 11 28 25 12.5 25 20 27 4.5 6.8 3 24.5 AC20B-B 1/8 83.2 87.6 26.5 41.6 25 28.5 2 30 24 33 5.5 12 3.5 29 Note) 1/81/4 1/43/8 1/43/8 AC25B-B 1/8 110.2 115.1 28 30 55.1 35 27.5 0 41 35 7 14 4 41 AC30B-B 1/8 110.2 115.1 30.7 30 55.1 35 29.4 3.5 41 35 7 14 4 41 AC40B-B 1/8 145.2 147.1 35.8 38.4 72.6 40 33.8 3.5 50 40 9 18 5 48 1/43/81/2 AC40B-06-B 1/8

Electric Actuators

Dimensions [mm] Model L1 L2 A B C D E F G J 138 LEPY10m-25m 29 39 30 29 20 150 20 22 LEPY10m-50m 24 50 60 175 61.8 24 43 34 50 163 LEPY10m-75m 89 72 40 79 30 79 198 210 30 LEPY10Lm-25m 29 20 29 39 20 22 30 124 136 LEPY10Lm-50m 60 34 50 24 50 149 161 47.8 24 43 LEPY10Lm-75m 30 79 89 30 72 40 79 184 196 9 Electric Actuator/Miniature Slide Table Type Step Motor (Servo/24 VDC) Series LEPS Model

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW VP4 9 B B B B B S0700 23 SMC SMC SMC SMC 42 VQ 63.5 VQ4 1 2 3 4 5 6 7 n Stations D side U side 1(P), 5(R3), 3(R1) 6 x Rc 1/2 VQ5 Manual override VQC SMC VQZ 150.5 141.00 SQ 115.5 A A A A A A A 91.5 74.00 VFS 58 18 14 B B B B B B B VFR 3 3 3 4(A), 2(B) port 2n x Rc 3/8, 1/2 30 43 62.5 VQ7 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100B04A) for the unused

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A D A A C A 8 Magnesium hydroxide A B A A B A 9 Acetylene A A A A A A 10 Formic

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 2) Min. operating frequency is once in 30 days. Note 3) Based on dynamic performance test, JIS B 8375-1981.