Digital Flow Switches Series PF2A

() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x 0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56

Heavy Duty Stopper Cylinder Series RSH/RS1H

8-O recessed area L CZ CT CT Y V U Conveyor lower limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across corners I) (mm) Width across corners I 85 103 132 H 128 144.5 171.5 FX 73 90 110 FZ 93 114 138 GA 16 24 24 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5--2 PF2D540-19 Wiring 78 86 186 Brown (1) DC(+) 56

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03 KFT10U-04 KFT10N-02 KFT10N-03 KFT10N-04 KFT12U-02 KFT12U-03 KFT12U-04 KFT12N-02 KFT12N-03 KFT12N-04 29 34 32 37 53 49 50 56 46 49 54 46 63 90 57 62 88 79 81 94 75 78 93

Electric Actuators

300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106 LJ1H202NC 14 56

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

Electric Actuator with Integrated Guide Series LTF

Deflection 100 200 300 400 500 600 700 800 900 1000 36 LTF6EPH 4 to 500 to 390 40 LTF6ENH 8 to 500 to 390 44 LTF8FPL 12 to 1000 to 890 to 710 to 580 to 480 48 LTF8FNL 16 to 890 to 710 to 580 to 480 to 1000 71 34 LTF6EPF 2 to 300 to 230 38 LTF6ENF 6 to 300 to 230 42 LTF8FPH 10 to 500 to 440 to 350 to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56

5 Port Solenoid Valve Series SQ1000/2000

216.5 234 262.5 273 15 228 245.5 275 285.5 16 239.5 257 287.5 298 L1 L2 L3 L4 21 5 Port Solenoid Valve Series SQ1000/2000 SQ2000/Flat Cable Kit Stations SS5Q23JD0 L2 L3 L4 5.25 Indicator light M5: External pilot port 58 25 L1 28.8 Release for switching connector direction 1 47.8 P = 17.5 18 (mounting hole dimension) Manual override 131.5 (single, double, dual 3 port valve) 5.5 5.5 35 47.5 56

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

VH Series, 4 Way Hand Valve

Body Mount/Dinensions Series VH (mm) / Body mount type Dimensions Scale: 35% VH600-N06/N10 2 (A) 4 (B) 1 (P) 132 152 411 132 300 223 150 151 48 25 4-3/4,1NPT 3 (R) 40 7 Series VH Panel mount/Dimensions (mm) / Panel mount type Dimensions VH21 -N02 VH31 -N02/N03 Scale: 40% 4 (B) 2 (A) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 74 62 62 49 2 (A) 49 45.5 46.6 62 134 97 125 94 1.5 45 1.5 106 88.5 92 73 56

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

type only) 24.5 (mounting holes) 67.5 59 P R P R mPm 4Rc(PT) 1/8 (ports P, R) 8 23 39 2.3 Pg.7 1 20.5 P = 19 13.5 5 1.5 20.5 25 30 53.5 Approx. 300 (lead wire length) L2 L1 31 10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension table n: Stations n L L1 L2 L3 1 37 27 13 2 56

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.

MP 601E Dry Pump 56 Torr, 70 L/min, CE, 115 V, 50/60 Hz 1Ph

PTFE PUMP 230V 50/60HZ, 56 Torr 185 Lpm

Manifold Mounting: A (Direct Mount), Regulator Block Stations: 5 Stations, IN/OUT Piping Position: 56 [IN/ø5/32 (Straight) - OUT/ø5/32 (Straight)], Accessory: A (w/Pressure Gauge), Options: None, Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)

Programless Controller Series LECP1

VAC (50/60 Hz) 200 to 230 VAC (50/60 Hz) Regeneration USB cable option Three phase 200 to 230 VAC (50/60 Hz) USB cable Analog monitor output RS-422 communication Electric actuator Supplied by customer Regeneration PLC option Power supply for I/O signal 24VDC Supplied by customer PLC Power supply for I/O signal 24VDC MR Configurator Setup software Electric actuator Battery (included) PC 56

KF

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03 KFT10U-04 KFT10N-02 KFT10N-03 KFT10N-04 KFT12U-02 KFT12U-03 KFT12U-04 KFT12N-02 KFT12N-03 KFT12N-04 29 34 32 37 53 49 50 56 46 49 54 46 63 90 57 62 88 79 81 94 75 78 93

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, VALVE/SOL, 4/5 PORT SOLENOID VALVE, 56 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, VALVE/SOL, 4/5 PORT SOLENOID VALVE, 56 lb

Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, VALVE/SOL, 4/5 PORT SOLENOID VALVE, 56 lb