CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

240

Load Eccentricity 200 mm Graph n n Load Eccentricity 200 mm 10 10 1 Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 1 0.1 0.1 10 10 6 6 0.1 0.01 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example (Horizontal Mounting) 2.

LEF-OM002xx

10 to 300 701800 Note2) Stroke 30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

MRHQ

D20Sizes 10 and 16 updated!

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

Rotary Gripper Series MRHQ

10 H H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.3MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.5MPa 0.6MPa, 0.7MPa 20 20 0.6MPa 0.6MPa 0.6MPa 10 MHZ 10 0 10 20

OMR0031

An example is shown below. direction + direction direction + direction 0 5 10 [mm] 0 5 10 [mm] This example shows the Target Position set at 10 mm. The table of the Card Motor moves to 10 mm from the origin position. 11.5 Relative positioning The Target Position is determined based on the current position.

SL5200

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

Compact Cylinder/Guide Rod Type Series CQM

10 5 15 15 5 2 pcs. 10 10 10 15 15 5 32, 40, 50, 63, 80, 100 1 pc. 10 10 5 5 10 5 15 10 5 15 15 20 15 2 pcs. 10 15 10 5 10 10 15 15 5 15 20 20 15 D-P4DWL type is compatible with bore sizes 40 to 100.

EXxx-OMQ0015CN

mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 4095 5.25 21 4095 10.5 5.25 21 3868 5 20 3901 10 5 20 2048 3 12 2048 5.25 2.625 10.5 228 1 4 0 0 0 0 0 0.75 3 : 010 V 10 VPLC 3901 -48No.EX-OMQ0015CN (2) & 2 : 010 V,05 V,020 mA : 15 V,420 mA AD AD PLC PLC (AD ) (0b) (AD ) (ab) [V] [mA] [V] [mA] 10 10 15 420 010 05 020 2047 5.25 21 2047

Rotary Gripper Series MRHQ

10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping

HRX-OM-Y098

.Communication setting screen 36.Contact output 46 Setting screen 10.

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

Rotary Table

Replacement parts (With external shock absorber type) Description Size 10 20 30 50 P891010-10 P891020-10 P891030-10 P891040-10 Seal kit No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty.

Fieldbus system PROFINET compatible SI Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V Selects the analogue input range. -10..10 V Channel 2 Analogue input range Sets the analogue input device range. 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

IZx-OMP0064

Recommended piping port size Emitter cartridge Bar length mm One-touch Applicable tube type fitting symbol O.D. mm Single end piping Double ends piping 06 6 340 to 640 340 to 1300 08 8 340 to 1300 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 1300 340 to 2500 08 8 340 to 2500 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 2500 340 to 2500 08 8 340 to 2500 340 to 2500 10 10

HRX-OM-W060

P.5-10 It indicates the set temperature. (10) Circulating fluid set temperature P.5-10 CH2 Press the numeric section to change the set temperature. (11) Circulating fluid discharge pressure It indicates the discharge pressure.