HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

AC Servo Motor Driver (Pulse input type)

5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

IDX-OM-O004C

) AC200,220V(60Hz) 3) (50/60Hz) W 420/480 (50/60Hz) A 4.3/4.6 3.4/3.1 4 ) A 10 R134a(HFC) () Rc1 kg 46 1 2 () kW 15 1(ANR)[2065%] 2[32] 3() 430mA 6 1 6. 6.2 IDF15E1 mm 603 41 54 300 16 C R 1 C R 1 87 578 [AC200V] [AC200V] 396 0.8m (10, (:10, :0.8m) 43 15 270 13 4x 380 101 258 314 [AC100V] (:1.9m [AC100V] [AC200V] (17) [AC200V] ( 17) 1.9m 6.3 IDF15E1-10 PC CM ILS FM PTC

JCRB-OM00003

[J] 0.00015 0.001 0.003 0.02 0.04 Radial 15 15 25 30 60 Shaft load N Thrust 10 10 20 25 40 Port size M5 0.8 (90, 180 ) M3 0.5 (270 ) M5 0.8 B Note1) Size 10 requires at least 0.35 MPa of operating pressure to reach the minimum rotation time (0.03 s/90).

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

Platform Cylinder Series CXT

15 20 5 CXT 32 40 1 10 10 5 10 15 5 2 10 15 10 10 15 5 (mm) D-F7W D-J79W D-F7BAL D-F7NTL D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted CXT 32 40 1 5 5 10 15 15 20 2 5 10 15 15 20 20 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-M9W D-M9AL

Vacuum Manifold for fieldbus system

For 12 stations manifold (223mm) 12 For 12 stations manifold 15 For 16 stations manifold (285.5mm) 16 For 16 stations manifold (5) One-touch fitting elbow assembly (9) Round head combination screw (10 pcs. per set) SZ3000 74 1A L8 (8 Elbow) ZKJ TB2 A (M4 x 5) KQ2L09 14 X224 (5/16" Elbow) (10) Round head combination screw (10 pcs. per set) ZKJ TB3 A (M3 x 30) (6) Protection plate (11) Round

LEYx-OMZ0015

) 1,100 (Maximum power) Type Note 11) Non-magnetizing lock specifications Lock unit Holding force [N] 5,700 3,400 1,200 Power consumption [W] at 20 10 Rated voltage [V] DC24 0-10% Note 1) For "double clevis type": Stroke limited to 400 or less.

Step Motor Controller (Servo / 24 VDC)

Product Outline . 6 2.1 Product features . 6 2.2 Product configuration . 7 2.3 How to Order . 8 2.4 Option . 9 (1) Actuator cable (5m or less) . 9 (2) Actuator cable (8-20m) . 9 (3) Actuator cable for with lock and sensor (5m or less) . 10 (4) Actuator cable for with lock and sensor (8-20m) . 10 (5) I/O Cable . 11 (6) Controller setting kit . 11 (7) Teaching box . 12 2.5 Startup Procedures

Suction cups with flange

4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C

IDX-OM-W026

9 1 IDX-OM-W026 9 K AD48-8-A-X2112 1 C42FP-260S 1 111692 1 1 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 SMC WEB IDF Series 9-2 9 2 IDX-OM-W026 10 L 10 L 10-1 ( ) 10-2 1.6MPaADH4000-04 IDF22E-**-L IDF37E-**-L IDF55E-**-L IDF75E-**-L 0.151.6 ) N.O. () ) 50L/min(ANR) (ADH4000-04) ( 10) IDF Series 10-1 10 1 IDX-OM-W026 10 L 10-3 IDF Series 10-3 10 2 IDX-OM-W026 11 M

IDX-OM-W031

Option Specification R 10 1 Safety instructions . 10 1 10 2 Specifications of GFCI . 10 1 10 3 How to connect the power supply . 10 2 10 4 Cautions for handling the GFCI . 10 2 10 5 Electrical Circuit . 10 2 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 1 11 4 How to connect the power supply and signal cable .

No more element replacement!

How to Order 0 N FNR10 10 Size Port size Symbol 0 1 1.1 l Symbol Capacity Applicable model Port size 10 Rc1 FN11l1 FN11l2 1.8 l Seal material Symbol N V NBR Material FKM Specifications FNR100V-10 FNR101N-10 FNR101V-10 Model FNR100N-10 1.1 l Tank capacity 1.8 l Port size Rc1 Bowl & Cover Stainless steel 304 Material O-ring FKM FKM NBR NBR Weight 1.5 kg 1.9 kg FN11l1l (Element l 250) FN11l2l

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

CKZ2N

3 20 0.03 30 0.025 30 0.025 10 H 9 through 30 0.025 30 0.025 I 9 through M6 x 1.0 H I 15 0.03 15 0.03 30 3 25 0.05 R45 50 0.05 6.5 6.5 18 10 10 18 R25 19 R6 R6 R25 19 19 19 NAAMS code A Weight kg (lbs) NAAMS code A Weight kg (lbs) B C D E F G H I B C D E F G H I Part no.

PEEK

(Symbol 1) IN (Symbol 2) OUT 6 10 2 Wetted part material 20R4 N.O.

IDX-OM-W032

(1 ) 2. 3. 0 IDFA Series 9-3 (ADH4000-04) 9 2 IDX-OM-W032 10 R 10 R 10-1 10-2 IDFA22E/37E/55E-23-R 10A 30mA IDFA75E-23-R 20A 30mA 10-3 (IDFA55E,75E) (IDFA55E,75E) M5 9.5mm 2 1.25mm L ,N N L () () IDFA Series 10-3 10-1 IDX-OM-W032 10 R 10-4 () () ONOFF 10-5 R 6-4 6-3 T 11-6 11-3 IDFA Series 10-4 10-2 IDX-OM-W032 11 T 11 T T 11-211-3 11-1 1. 2. 3.

NAAMS Standards Compliant

ACA213M 150.0 1.0 50 mm offset: Machined 25 mm offset: Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E 200.03 F G F 10 200.03 10 G 300.025 300.025 11 through H 300.025 300.025 I 11 through H 250.05 J 250.05 I M6 x 1.0 45 R45 500.05 6.5 18 M6 x 1.0 10 750.05 3 R25 10 R6 1 1 6.5 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg

High performance type Step Motor Controller (Servo/24 VDC)

Risk of electric shock, wire break, contact failure and loss of control for the product can happen if "Standard cables" are used in case of inflecting the cables repeatedly. (10) Confirm proper wiring of the product.