C76

Auto Switch Mounting Height (mm) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C Bore Hs Hs Hs 32 28.5 31 31.5 40 32.5 35 35.5 Aim at this number. 6-10-42 43 Auto Switch Series C76 Applicable Auto Switch Auto switch model Lead wire length (mm) Load voltage Indicator light Wiring (Output) Electrical entry Applicable load Type Special function Rail mounting 0.5 () 3 (L) 5 (Z) None

CE

81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H/A80H D-A73C/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W

CJP

CJ2 CM2 Symbol A A' B C D E GA GB H J K MM NN Q T CD CH CK CT CU CX CY CZ Bore size (mm) 6 10 15 CG1 6 M10 x 1.0 18.5 7 9 14 16.5 3 10.5 11 17 6 8 M3 x 0.5 20.4 3 16 4 12 1.6 18 3.4 26 MB 6 M12 x 1.0 20.5 10 12 15 20 5 13 17 20 7 8 M4 x 0.7 23.9 5 20 6.5 13.5 1.6 24 4.5 33 6 M14 x 1.0 28 12 14 20 24.5 6 15.5 18.5 24 9 8 M5 x 0.8 31.7 6 25 8 17 2.9 29 5.5 42 MB1 Symbol S Z ZZ R Bore size (

Information

47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

Possible to transfer a workpiece at low-speed.

Inertial load: Ta Ta = I 2 = [rad/s2] t2 Necessary torque: T T = Ta x 10 2 x = 0.003896 x x 10 = 0.015 [Nm] 42 (t is calculated with 2s per 90.) Even for resistance load, when the load is rotated, necessary torque calculated from inertial load shall be added.

Slider Type/Ball Bushing Bearing

cup Carbon steel 8 36 Shaft Stainless steel Wear ring A Special resin 9 37 Zinc chromated Piston side yoke Rolled steel Wear ring Special resin 10 38 Zinc chromated External slider side yoke Rolled steel Wear ring B Special resin 11 39 Magnet A Cylinder tube gasket NBR 12 40 Magnet B Guide shaft gasket NBR 13 41 Zinc chromated 25 to 40 Piston nut Carbon steel Piston seal NBR 14 42

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

Coolant Valve

621 A VNC Series Threaded Type/Port size: 10A, 15A, 20A, 25A K L Pg9 N P Applicable cable O.D. 6 to 8 F (Air operated) J (External pilot solenoid) Pilot port 12(P1) 2 x (Back side 10(P2)) 4 x M 8 1 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) P1 D S Q E Bracket 15 H A R B C Main port 1(A) [Back side 2(B)] Port size: refer to table below A 63 63 80 90 B 42

3

Please contact SMC to check if the valve can be used in the application by providing the relevant fluid circuit. 223 VXS Series For Steam Dimensions/Body Material: C37, Stainless Steel Grommet Conduit terminal 34 D Q2 S2 F F Q 300 D 40 (42) 32 25 a h e Built-in full-wave rectifier type T R E (With surge voltage suppressor) C R E d g J C G1/2 f j J 2 x M depth 5 H B1 B 2 x M depth 5 H B1

Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

CE

81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H/A80H D-A73C/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

C76

Auto Switch Mounting Height (mm) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C Bore Hs Hs Hs 32 31.5 31 28.5 40 35.5 35 32.5 Aim at this number. 6-10-42 43 Auto Switch Series C76 Applicable Auto Switch Auto switch model Lead wire length (mm) Load voltage Indicator light Wiring (Output) Electrical entry Applicable load Type Special function Rail mounting 0.5 () 3 (L) 5 (Z) None

CJP

6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52 83 67 68 57 47 42

CXT

Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight

MGC

22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30

Passage: 71 (Side Ported Individual EXH), Stations: 4 Stations (Type 70 and 71)