Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

R.

Table of Contents

How to Order KKH 4 S 02 M S Body size With seal (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket S Socket/Plug designation Piping port size variations Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.

Vacuum System Peripherals:

Light/Surge voltage suppressor 5 24 VDC 12 VDC Nil Without light/surge voltage suppressor 6 6 VDC V 5 VDC S 3 VDC R S With surge voltage suppressor With light/surge voltage suppressor Z AC specifications (50/60 HZ) With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) ZX Pilot type R 1 100 VAC 200 VAC 110 VAC (115 V) 220 VAC (230 V) 4 Nil R Internal

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Fixed 4% F .S.

0.4

(For F/P/S kits) VVQ1000-2A-1VQC 1/2 Option Option Electrical entry Nil R S Common EXH External pilot Direct EXH outlet with built-in silencer FU25 F P L S Nil R Note 1) S Note 1) Common EXH External pilot Direct EXH outlet with built-in silencer For F kit top entry 25 pins For F kit For P kit For L kit For S kit VQC 4/5 Note) The !4s fitting assembly is included.

0.4

Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

Aluminum High Vacuum Angle Valve

steel 304) Body y (Material: A6063) w Valve seal (Maintenance part) r S Valve seat assembly (Maintenance parts) S Valve i (Material: Stainless steel 304) (Material: Stainless steel 304 + Sealant) Plate Valve side exhaust Port 3(R) (Exhaust port) Refer to the back of page 465 for Maintenance Parts.

KJ

How to Order KKH 4 S 02 M S Body size With seal (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket S Socket/Plug designation Piping port size variations Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

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.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6