pressure Ambient & fluid temperature Piston speed Cushion Air 250 psi (1.75 MPa) 8 psi (0.06 MPa) 40 to 140F (5 to 60C) 2 to 20 inch/sec (50 to 500 mm/sec) Air cushion standard CJ1 Basic style, Foot style, Flange style, Center trunnion style, Side tapped style Mounting CJP Standard Stroke CJ2 Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16,
2 (n 4) 2 D-M9/M9W 20 + 40 85 + 40 95 + 40 100 + 40 105 + 40 115 + 40 "n" pcs.
10 16 20 25 10 20 32 40 10 20 32 40 1.35 (6) 1.80 (8) 4 6 1.35 (6) 1.80 (8) 4 6 1.57 (7) 16 (32) 24 (48) 32 (64) 40 (80) 1.24 (5.5) 0.79 (3.5) 4 6 8 3.15 (14) 3.15 (14) 6.29 (28) 4.95 (22) 20.2 (90) 3.82 (17) 10 14 22 30 10 14 27.0 (120) 40.5 (180) 8.99 (40) 6.29 (28) 6.29 (28) 8.99 (40) 29.2 (130) 12 29.2 (130) 47.2 (210) Note) ( ): Long stroke Features 8 Controller Controller Step
[mm] Bore size A B C D F FB FC FT FX FY FZ GA GB H MM NA NB NC NN S SA T Z ZA 6 15 12 14 3 8 13 4.5 1.6 24 14 32 14.5 5 28 M3 x 0.5 16 9.5 7 M6 x 1.0 51.5 49 3 79.5 77 10 15 12 14 4 8 13 4.5 1.6 24 14 32 8 5 28 M4 x 0.7 12.5 9.5 M8 x 1.0 46 74 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 8 5 28 M5 x 0.8 12.5 9.5 M10 x 1.0 47 75 56 Air Cylinder: Standard Type Double Acting, Single Rod CJ2
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 Rc 1/8 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9
F Yh9 Z Model 0.1 0.2 MKB32 1 8 0 0.15 0.15 31.5 9 depth 7 M10 x 1.5 93.5 71.5 45 5.5 12 37 7.5 60 14 16 34 4.5 Rc / 54 3 6.5 14 0.15 20 0.15 7 30 0.062 0 0.1 0.2 MKB40 1 8 65 29.5 35 9 depth 7 M10 x 1.5 94.5 52 5.5 12 8 69 14 16 40 5 Rc / 61 3 6.5 14 24 7 30 0.062 0.1 0.2 0 MKB50 1 4 0.15 0.15 11 depth 8 76.5 34 41 M12 x 1.75 112 64 6.6 15 10.5 86 19 20 50 7 Rc / 73 3.5 7.5 0.15 30 0.15
l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BF BN BP BQ C CL D E EA F FA FD FT FX FY FZ G GA 125 140 160 50 47 145 145 205 1/2 3/8 115 120 36 90 63 35 14 19 14 190 100 230 16 155 to 1000 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 16 180 to 1000 56 53 182 180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 to 1200 (mm) Bore size
22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.
22 30 4 4 6 10 14 22 30 4 4 6 10 14 22 30 6 10 16 20 25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.
1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with Lock
M1 1/4 3 4 3 8 6 6 4 10 8 12 10 19 12 4 LQ3U11-R1 LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 10 9 10 9 46.5 44.5 11 14 11 14 10 M (E2,E2) (E1,E1) L,L 6 17 16 10 9 51 48.5 16 20 11 14 14 H 22.5 19.5 79 73 21 16 16 11 25 20 20 14 10 22.5 19.5 21 25 18 17 16 66.5 62 KK 17 16 66.5 62 (E1,E1,E2,E2): Reference dimension
22 30 Opening/closing stroke 4 6 8 12 Opening/closing stroke 16 (32) 24 (48) 32 (64) 40 (80) Size Size Size Size 10 20 32 40 10 20 32 40 10 16 20 25 10 16 20 25 32 40 4 6 10 14 CAT.NAS100-77 Controller Step data input type for servo motor Programless type Step data input type for step motor Series LECP1 Series LECP6 Series LECA6 Control motor Control motor Control motor Step motor (Servo
Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper
30 0.4MPa 0.4MPa 30 0.3MPa 20 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 0.3MPa 40 20 20 0.2MPa 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 14 14 14 14 14 14
mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .
Auto switch: Heater: Indicator: 14 High Vacuum Angle Valve Series XLF, XLFV Dimensions (mm) 1in=25.4mm (b) XLF/Air operated type E C E Fn (KF flange) Fd (K flange) (a) C E (c) Heater (optional) G A B H A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 103 113 158 170 196 235 A 40 50 65 70 88 90 E Note 1) Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63
M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.