Modular Type Lubricator Series AL

50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

One-touch Fittings

28.4 6 14 1/4 KQ2Y10-02GS 17 15.9 15.6 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03GS 17 15.9 15.6 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04GS 22 15.9 15.6 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 Connection thread (With sealant) 10 Release button dimensions 12 1/4 KQ2Y12-02GS 17 18.5 18.2 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03GS 17 18.5

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

VVX31/32/33

40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

EX600-WEN_WSV.eng

Poloneza 89, 02-826 Warszawa, Poland Red LED is ON. Non-restorable error is detected. (e.g. Hardware failure) (1) Set the number of occupied I/O points for the module and each parameter of the "remote". PORTUGAL (351) 21 472 45 00 OFF No remote connected. Refer to the LED Display.

EXxx-OMV0028.eng

ROMANIA (40) 213205111 Red LED flashes. Remote connection system status Specification Str Frunzei 29, Sector 2, Bucharest, Romania W-MS SLOVAKIA (421) 41 321321 1 Remote (EX600-WSV#) can be used regardless of the communication specification of the base. (3) Set the "base" system.

EXW1-NT1_eng

Poloneza 89, 02-826 Warszawa, Poland PORTUGAL (351) 21 472 45 00 Alameda dos Moinhos, 9G, 2720-381 Alfragide Portugal ROMANIA (40) 213205111 Str Frunzei 29, Sector 2, Bucharest, Romania SLOVAKIA (421) 41 321321 1 Fantransk 1223, 01301 Teplika nad Vhom, Slovakia SLOVENIA (386) 7388 5412 Mirnska cesta 7, SLO-8210 Trebnje, Slovenia SPAIN (34) 945 184 100 Zuazobidea 14, 01015 Vitoria, Spain SWEDEN

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

VER2000/4000

(C) Coef. for compensation 20 10 0 10 30 40 50 60 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 Bore size (mm) Current A VER4000 How to Use DIN Terminal Wiring procedure 1.

NAR Series

Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A F A 2 C A F A 2 C A F A 2 C A ) f g k ( s b l t h g i e W ) 7 . 0 ( 4 5 . 1 ) 1 . 1 ( 3 4 . 2 ) 5 . 2 ( 1 5 . 5 ) 5 . 4 ( 2 9 . 9 t e k c a r B P 4 2 B P 5 2 B e g u a G 5 2 O R A N . d t S ) g i s p 0 6 1 ~ 0 ( n o i t p O K50A-MP1.0-N02M K50A-MP2.0-N02M 5 3 O R A N . d t S ) g i s p 0 3 ~ 0 ( How To Order N R NAR 4 25 02

VER2000/4000

AXT503-23A G36-10-01 AXT510-32A G36-10-01 Flow control interface Pressure gauge Model Selection Applicable cylinder bore size: 25 to 125 For model selection, refer to Selecting Electro-pneumatic Proportional Valve on page 706. 704 Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 02 03 1 4 3 8 ARJ VER2000 02 Series VER2000 AR425

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

for details) How to Order SY 53 20 01 5 1 LL 3 Bracket UL/CSA compliant 5 7 9 Series Nil: Without bracket F1: With foot bracket 53-SY5000 Thread type 53-SY7000 Nil F N T Rc Thread piping A, B port size 2-position single only 53-SY9000 G NPT Symbol Port size Applicable series Type of actuation NPTF 01 02 02 03 53-SY5000 1/8 2-position single (A) 4 2 (B) 1/4 53-SY7000 1 1/4 53-SY9000 1 (P)

AV2000/3000/4000/5000

Soft Start-up Valve AV2000/3000/4000/5000 How to Order AV 00 1 G 20 02 Flow direction Nil R Left to right Right to left Soft start-up valve Manual override Nil: Non-locking push type (Flush) B: Locking type (Tool required) C: Locking type (Lever) Body size 20 30 40 50 1/4 3/8 1/2 3/4,1 Thread type Rc G NPT Nil F N Light/Surge voltage suppressor None Nil S Z With surge voltage suppressor (

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb