VP300/500/700

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

Compact Cylinder/Guide Rod Type Series CQM

Hs A B A W CQS CQ2 RQ CQM Auto Switch Mounting Height (mm) MU Proper Auto Switch Mounting Positions (mm) D-M9 D-M9V D-M9W D-M9WV Auto switch model Auto switch model D-A9V D-M9V D-M9WV D-M9AVL D-A9 D-A9V D-M9AL D-M9AVL Bore size Bore size Hs 17 19 22.5 24.5 27 30.5 36.5 40 50 60 Hs 19 21 24 26 29 32.5 42 42 52 62 B 0.5 0 3.5 5.5 5 7.5 10.5 13.5 18 23 W 1.5 2 1.5 3.5 3 5.5 8.5 11.5 16 21 A

Large Size Vacuum Module: Series ZR

(ANR)) Type S 22 38 54 62 84 ZA Type L 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 185 150 ZX Maximum vacuum pressure L: -53 kPa S: -84 kPa ZR Built-in silencer, Manifold exhaust Individual exhaust port Exhaust release (Ejector exhaust) ZM Valve unit ZR1-V Supply valve (Pilot type)/Release valve (Pilot type) Component equipment ZMA N.C./N.O.

Escapements Series MIW/MIS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Selection Mounting Warning Mounting 1.

Low Profile Air Gripper Series MHF2

42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 4 x M6 x 1 thread depth 15 (Mounting thread) 6 159 6 62 174 2 x M6 x 1 thread depth 6 (Mounting thread) 33 144 E 13 25 25 30 41 MHZ E 4 x 5.2 through (Mounting hole) 0 0.1 32 MHF 46 1.2 46 1.2 M5 x 0.8 M5 x 0.8 4 x 10 Finger opening port Finger closing port Close: 0 +0.1 0 MHL E-E Open: 801 MHR 8 x M4 x 0.7 thread depth 4 MHK 128 (Attachment

Air Catch Sensor

DIN rail center 70 (94.4) 100 70 (94.4) 100 90 10 SUP 40 (4.5) 30 Adjusting knob Electrical entry Applicable O.D. 6.5 to 8.5 12 Electrical entry Applicable O.D. 6.5 to 8.5 Bracket Gauge 35 42 8-4.5 Gauge 34 42 4-4.5 42 9-M3 OUT1 OUT2 OUT3 Bracket OUT5 OUT4 EXH port EXH port Station 1 n 69.3(MAX74.4) 69.3(MAX.74.4) 60 OUT 60 19.5 2.1 OUT OUT OUT OUT OUT OUT GND OUT6 19.5 2.1 VCC Detection

VCS

25.5 30 66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

VCW

(mm) Dimensions Electrical entry A B C D E G H J Z Model Grommet Conduit DIN terminal Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 63.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 74 24 55 45.5 53 48 60 51 68 101 86.5 VV2CW4 57 25.5 28.5 30 5.5 42 20.8 41.5 81.5 26 62.5 47.5 60.5 50 62 58.5 70 103 94 17-2-59

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

o

Manifolds,"Side Ported Type 41 Type S41 Type 42 1o-32No'n{Msf ,!!L 10-32 No.n, (i,ts) Common EXH. Manifolds,,/Side Ported Type S32 .4 1 r ! t I I I I I I Common EXH. Manifolds,,/Side Ported Common EXH. Manifold,/ Top Ported The EXH.

o

Manifolds,"Side Ported Type 41 Type S41 Type 42 1o-32No'n{Msf ,!!L 10-32 No.n, (i,ts) Common EXH. Manifolds,,/Side Ported Type S32 .4 1 r ! t I I I I I I Common EXH. Manifolds,,/Side Ported Common EXH. Manifold,/ Top Ported The EXH.

VCW

Dimensions (mm) Electrical entry B C D E G H J Z A Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 58 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 68 24 55 45.5 53 48 60 51 68 101 86.5 VV2CW4 57 25.5 28.5 30 5.5 42 20.8 41.5 76 26 62.5 47.5 60.5 50 62 58.5 70 103 94 4.5-9 Series VCW Dimensions (N.O

1.1

IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Mass (kg) 275 259 355 299 320 35 355 299 320 42 IDF-TR-8 E C G B D A 4 x F (mm) A 540 B 400 C 260 D 300 E 11 F 30 G 94 Transformer part no.

Air Cylinder Series CM2

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Refer to the Clean Series catalog separately for the precautions in clean environments. RHC RZQ Operating Precautions Maintenance Caution Warning D1. Do not rotate the cover.

Step Motor Controller (Servo / 24 VDC)

Return to origin . 41 8.1 Return to origin . 41 8.2 Positioning operation . 41 8.3 Pushing operation. 42 (1) Pushing operation is successfully performed. . 42 (2) Pushing operation is failed (pushing the air) . 42 (3) Movement of the work piece after the completion of the pushing process .. 42 8.4 Controller input signal response time . 43 8.5 Methods of interrupting operation . 43 9.

/

T 67.5 U 30 30 33 T 62.5 U 48.5 T 63.5 U 65.5 V 53.5 T 62.5 V 69.5 a 42 51 56 b 66 78 86 d 57 74 81 e 34 51 58 f 39 63 80 90 14 17 20 28 35 42 3/8, 1/2 3/4 1 30 30 35 27 27 32 34 43 47 103.5 19.5 44.5 24 29 33 3.5 4.5 4.5 29 37 43 VXED2140 VXED2150 VXED2260 115 19.5 51.5 74 69 48.5 70 65.5 53.5 69 100.5 69.5 45.5 133 22.5 60 88 83 51.5 84 68.5 56.5 83 103.5 72.5 49.5 31 Pilot Operated 2 Port

CATALOG VC10

Holes #8-32 UNC THD x .23 (5.8) DEEP . .30 (7.6) 2 PLACES AS SHOWN. .20 (5.1) .30 (7.6) ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION * 3-Way Normally Closed Piped Exhaust 42 SOLENOID VALVES . . . Table A LW 2.5 Watts MAXIMUM OPERATING PRESSURE DIFFERENTIAL MODEL TYPE FLOW CONFIGURATION VALVE SUFFIX NO.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH PIPING ADAPTERIS10E-20-D to IS10E-60-D Port size A B C D E F 1/81/43/8 24 77.8 60.3 42 24 1/43/81/2 27 85.8 64.3 53 30 1/43/81/23/4 30 93.8 68.3 71 36 3/4 36 1 46 3/4 39 46 1 1/41 1/2 42 63 9.5 106.8 74.8 90 Model IS10E-20-D IS10E-30-D IS10E-40-D 8.5 31 96.8 69.8 71 IS10E-50-D IS10E-60-D -21- Revision history 50,60 size added,Corrected. May. 2021.

Digital Flow Switches

Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC () 1 Brown DC (+) Panel mounting adapter Panel (ZS-26-B) Waterproof seal (accessory) 2 m 42 Digital Flow Switch for Deionized Water and Chemicals Series PF2D A single controller can monitor the flow rate of 4 different sensors.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60