Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85) 77 (85) 79 (87) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 20 20 20 13 14 14 20 20 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 300 301 to 1500 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

x 0.8 Finger opening port M5 x 0.8 Finger closing port 13 6-M4 x 0.7 thread depth 8 M5 x 0.8 Finger closing port M5 x 0.8 Finger opening port (A, B, C common view) 25 25 3-4 depth 8 +0.02 0 (A, B, C common view) 42 14h9 0 0.043 1.5 9 28.5 18 55.5 (60) 10 21 2 10 0 0.05 3 4 0 0.03 4 0 0.03 Open: 28 Closed: 16 2-M4 x 0.7 thread depth 8 (Thread for mounting attachment) 18.5 18.5 7 7 5.5 5.5

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 Finger opening port M5 X 0.8 Finger closing port 13 6-M4 X 0.7 thread depth 8 (A, B, C common view) M5 X 0.8 Finger closing port M5 X 0.8 Finger opening port 25o 25o 3-4 depth 8 +0.02 0 (A, B, C common view) 42 14h9 0 -0.043 1.5 9 28.5 18 55.5 (60) 10 21 2 10 0 -0.05 3 4 0 -0.03 4 0 -0.03 Open: 28 Closed: 16 2-M4 X 0.7 thread depth 8 (Thread for mounting attachment) 18.5 18.5 SMH03

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Compact

(Stroke + 222.5) 2.5 (82.5) Stroke + 6 74 60 60 With floating bracket 2 x M5 x 0.8 (One on each side) Thread depth from bottom of counterbore 7.5 2 x 10 depth 2 102 37.5 16 6 65 29.5 3.5 20 20 Motor cable length 300 7.5 40 30 62 Note 1) [ ] for when the direction of return to origin has changed. (When the LECP6, LECP1 or LECPMJ is used.) Note 2) Origin for when the LECP2 is used.

Table of Contents

Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H0.1 0.4 D 50 40 185 145 57 79 M48 x 1.5 76 M8 x 1.25 40 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 C 31.5 20 90 70 30 40 M20 x 1.5 31 M5 x 0.8 20

Plug-in/Plug Lead: Single Unit

4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole 35 53 Bottom ported drawing 3-Rc 1/2 1(P), 4(A), 2(B) port M5 ground screw SMC 26.5 16 4(A), 2(B) port 31.5 37 41 50 98 G1/2 Electrical entry PE X P R1 R2 18.4 18 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5600 1 2 position double: VQ5200

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

Compact Cylinder

With Magnet for Auto Switch With Magnet for Auto Switch Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more Male connector (with hexagon socket head) Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more AS121F-M3-04

AIR COMBINATION

ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9. HOW TO REPLACE 17 10. DISASSEMBLY DRAWING . 1819 11. DIMENSIONS . 2024 AIR COMBINATION Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Electric Actuators

A E D B C 4 Manual override screw 16 29 L2 L1 14.5 Stroke Motor cable mounting direction U (Bottom entry) ( ) +0.025 0 3H9 depth 3 2 x M5 x 0.8 thread depth 9 19 J F G 4 5 ( ) +0.025 0 3H9 depth 3 Note 1) Distance within which the table can move when it returns to origin.

LEC-OM02904

ON E6,E7 2 ON 1 1 2 16 3. (1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

AC Servo Motor Driver (Network card type ）

1 16.

Rotary Gripper Series MRHQ

22.5 M5 x 0.8 Finger opening port 3 MHZ 29 15 16 10 22 8 31 MHF 18 51.5 MHL 6 40 78 Angle adjustment bolt MHR 2 x 5.5 through MHK 2 x 9.5 depth of counter bore 3 11 MHS 2 MHC 10 0 -0.062 47h9 long groove depth 4 +0.03 0 3 x 4H9 M5 x 0.8 M5 x 0.8 Port A Port B MHT (one each on three sides) MHY 4 x M5 x 0.8 depth 8 MHW -X MRHQ N J I E A D P A A M N MA 8 C M S R R E O P T 22 8 P A R I R Y 12

AC Servo Motor Driver (CC-Link Type ）

Refer to section 16.1.2. 16 2 16.