ASR

For the adjustment method, please refer to Selection and Adjustment on page 15-16-6 to 15-16-7. 4. For installation and removal, tighten the body B by applying an appropriate wrench to the two opposite sides of the hexagon. Using other parts may destroy the valve. For alignment after installation, rotate body A manually. 5.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

16 16 16 16 16 15 21 21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size

VM

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 61 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.

Compact Type Dual-Rod Cylinder Series CXSJ

) M4 x 0.7 (Hexagon nut) (16) (8+ Stroke) 2-M3 x 0.5 through 4 33 0.2 6 11 Compact Type Dual-Rod Cylinder Series CXSJ Dimensions: 6, 10 Axial Piping CXSJ6P 9 + Stroke 10 0.3 12.8 Stroke (49 + Stroke) 7 42 + Stroke 32 + Stroke 6.7 5 + Stroke 12 0.3 31.4 4-M1.6 x 0.35 x 6 L 16 2-M3 x 0.5 thread depth 3.5 (Piping port) OUT IN Steel balls 12 + Stroke 16 CXSJ10P 0.3 14.4 0.3 41.4 Stroke (64.5

Pin Clamp Cylinder Series CKQ/CLKQ

Indicator light Lead wire Oil resistant vinyl heavy-duty cord, 6, 0.5 mm2, 2 cores (Brown, Blue), 3 m Note 1) Regarding the common specifications of the solid state switches, refer to page 16. Note 2) Regarding the lead wire length, refer to page 16.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table Series

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Allowable moment (Nm) Load weight (kg) m3 40 20 30 20 10 10 0 0 16 25 40 16 25 40 Bore (mm) Bore (mm) MY2C MY1C MY2C MY1C 2 Magnetically Coupled Rodless Cylinder/Low Profile Series CY1F Compact Max. 29% reduction in height (mm) Height Series 10 15 25 CY1F 28 34 46 46 63 CY1H 39.5 CY1H CY1F Short body Max. 31% reduction in overall length Reduction in length is 22% over MY2H cylinder CY1F

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 NZ L 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 36 41.6 +0.5 +0.3 +0.058 0 -0.3 -0.5 +0.058 0 44 50.6 +0.5 +0.3 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 Knuckle Pin (Also used as double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon

OMR0032

Refer to section 16. Alarm Detection (P.91) for detailed content of the alarms. 81 - 14.6.

VCC

VCC VCC TQ L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 651 VCC Series Dimensions SUS316L

HRX-OM-W060

130 16 180 16 Maximum lifting height m 50 49 55 49 68 49 0.10 0.10 0.10 0.10 0.10 0.10 Settable pressure range 5 MPa to to to to to to 0.50 0.49 0.55 0.49 0.68 0.49 Circulating fluid system Minimum operating flow rate 6 L/min 20 2 25 2 40 2 Tank capacity L 42 7 42 7 60 7 By-pass (With valve) built-in Electric conductivity setting range S/ cm 0.5 to 45 0.5 to 45 0.5 to 45 Particle filter

EXxx-OMN0035CN

No.EX-OMN0035CN-A / Series EX600-DX## EX600-DY## EX600-DM## SMC 3 9 10 12 12 14 17 17 20 20 LED 25 28 28 31 34 34 36 36 LED 40 42 42 44 46 46 48 48 LED 52 54 54 56 -1No.EX-OMN0035CN-A 57 58 58 58 58 58 59 -2No.EX-OMN0035CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

CEx-OMQ0011

M6x1 11 54 6.5 M6x1 12 84 32 15 M8x1.25 14 64 8.5 M8x1.25 12 102 41.5 19 M10x1.5 R S T U V W X Y Z 22 63.5 23.5 22 41 16 9 30 34.5 26 77.5 32.5 27 56 19 10 37 42 37.5 95 50.5 35 68 23 23 45 51 I J K L M N O P Q 76.5 40 46 28 11 14.5 28 15 16 91 46.5 58 32 15 16 30.5 16 21.5 110 55 68 36 16.5 22 37.5 17.5 24.5 A B C D E F G H ML2B25 110 220 206 42 138 93.5 16 73 ML2B32 140 280 264 51 168

CJ2Q

Low Friction: Double Acting Single Rod Series CJ2Q 10, 16 How to Order Bore size 10 16 10mm 16mm Mounting Basic Axial foot Front flange Double clevis Standard stroke (mm) B L F D 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 CJ2Q L 16 60 Standard L 16 60 C73 CDJ2Q With auto switch Number of switches With auto switch (Built-in magnet) 2 1 n S n Auto switch

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26

PSxx-OMV0003CN

18 Line 19 OFF() () -70No.PS-OMV0003CN-G 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -71No.PS-OMV0003CN-G , (1015 ) -72No.PS-OMV0003CN-G ,, (), No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

MGC

18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161

Series MXP Precision Air Slide Table

Contents 10 MXP10-PS 12 2 pieces of No.19 MXP12-PS 16 MXP16-PS MXPJ6 Description Material Note Parts list No.