Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42 30 6.5 7 19 102 4.0 32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Vacuum Ejector Series ZM

Supply valve (N.O.), and release valve Air operated valve (supply valve), Port size connection M3 x 0.5 Air operated valve (supply valve), Port size connection M5 x 0.8 Air operated valve (supply/release valve), Port size connection M3 x 0.5 Air operated valve (supply/release valve), Port size connection M5 x 0.8 Without valve Nil B Non-locking push type Locking slotted type Light/Surge voltage

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

CU

x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90, 100 4 Series CU Auto Switch Proper Mounting Positions

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Smooth Cylinder

(mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 8 13 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to

E-MY2B_E_A

Front view Mounting holes on the top Mounting holes Theread size Name Type Mounting hole Main body M5 Side Support A Mounting hole M5 Side Support B Mounting Tap M6 x1 Side support A Side support B MY-S25A MY-S25B Mounting holes Mounting taps Installation of work Use 4 threaded holes on the top of slider for installation of work.

PSxx-OMT0001CN

m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

LJ1H

Not required. a=3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 45 for deflection data. 2 Series LJ1H10 Dimensions/LJ1H10PB 10 6 Work piece mounting reference plane 80 5H10 depth 8 8 x M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 60 50 (43) Stroke + 125 (table movement range) 232 Z section 3.3 30 90 83 A section

Series AK1000

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

VFA3000

Series VFA5000 Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing port) 2 x 18 (Pilot port) Max. 2 Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 1770

Title not found

Drarn guide 1/4 AF30 to 60 Flow direclion: Right to tefl AF10 to 60 Drain cock wiih barb fitting: 06 x 04 nylon tube AF30 to 60 Nole 1)Without a valve Display unils for product name piEle and cauion plate lor bowl :PSl,'F AF10 to 60 lypes M5 and NPT Port size syn P9d ro stze 20 30 40 50 GO l\r5 a '|8 a 1t4 a a a 3t8 a a a 3/4 a a '1 a a Float lype auto drain (N.O.)

HRX-OM-W060

Error [FLT] 5.4 Description of Screen HRL Series 5-46 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Table 5.4-18 Alarms that allow continuous pump operation (2/2) No. Alarm name Alarms that allow continuous Alarm pump operation Operation CH1 CH2 AL23 CH2 High Press. [OFF] / [WRN] [FLT] AL24 CH2 Low Press. [OFF] / [WRN] [FLT] AL25 CH2 Low Press.

High Vacuum L Type Valve

102 400 300 510 1070 Port size M5 Rc 1/8 Weight kg 0.27 0.45 1.0 1.4 2.4 3.9 Note 1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange.

Series 10-MGF Guide table ø40, ø63, ø100

18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 X 0.45 X 25 l M3 X 0.5 X 30 l M5 X 0.8 X 40 l Pulling force 4.9N 10N 24.5N Stroke (mm) 2 3 3 e Release lock when mounting or adjusting the cylinder. If mounting is done with lock engaged, lock mechanism may be damaged. * Remove bolt under normal operations.