XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

LV50-OMQ0004

Width across flats of attachment 3/8 24 mm 1/2 28 mm 3/4 35 mm 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

CJP2-OM0002K

Part number of auto switchD-A9D-A9V Unitmm B A (When detecting retracted stroke end) H H 1 H 2 3 (When detecting extended stroke end) 5st 10st 15st 20st 25st 30st 35st 40st 4 6 1 6 11 16 21 26 13.0 10.0 20.0 10 1 6 11 16 21 26 31 36 41 16.0 9.5 19.0 16 1 6 11 16 21 26 31 36 41 18.0 12.0 24.0 Part number of auto switchD-M9D-M9VD-M9WD-M9WV Unitmm B A (When detecting retracted stroke end) H

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

XMA/XYA Series

Exterior dimensions C D XMA Series Angle Valve Fd Fn Fc C Fc L1 KF Flange K Flange CF Flange ( K ) ( K F ) ( C F ) L2 H B G A A Unit:mm Model n Fd Fc H P.C.D L1 L2 XMA-16 40 103 38 1 30 34 17 40 P.C.D 27 6x4.4 XMA-25 50 113 48 1 40 26 39 XMA-40 65 158 66 2 55 70 41 63 P.C.D. 58.7 6x6.6 XMA-50 70 170 79 2 75 52 68 XMA-63 88 196 100 3 87 95 114 70 69 P.C.D. 92.1 8x8.4 XMA-80 90 235 117 3 114

CU

Contact protection box OUT(+) Brown [Red] Lead wire length: 0.5m 7 7 6 7 8 8 Resistor Reed switch Lead wire length: 3m 35 35 30 35 41 41 Zener diode CD-P11 OUT() Blue [Black] Contact Protection Box CD-P12 Blue [Black] D-A96(V) Contact protection box internal circuits Type D-A9 switches do not have built-in contact protection circuits.

ARJ310

CAT.ES40-41 A Miniature Regulator Series ARJ310 Improved flow characteristics 0.7 Conditions: Upstream pressure 0.7MPa 0.6 Downstream pressure MPa 0.5 ARJ310-01 0.4 0.3 0.2 ARJ210-M5 0.1 0.0 0 100 200 300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8

MRQ

F: Angle adjustable range 5 E: Angle adjustable range 5 E: Angle adjustable range 5 Angle adjusting screw 0 0 8 0 1 e l g e n Allowable lateral load to the piston rod end gl a n ng a ti g us in j d st a Using friction fittings makes it easier to mount the load to the piston rod end. u m dj u m a ni Mi m F: Angle adjustable range 5 u m xi Ma 0 Mi 17 nim e um gl an ad g ju in st 0 M 19

VP3145/3165/3185

VP3185DZA1-X81 MAX.10 160.3 6 140 87.4 26.5 EXH.1 56 76 81 EXH.2 105 (Non-locking) Manual override Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-13 Mounting hole EXH 243.1 250.7 PA PE 159 166 150 140 105 90 IN EXH OUT 62 52 25 (EXH port) Rc 2 118 41 41 2-Rc 1 1/4, 1 1/2, 2 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned

Pressure Relief 3 Port Valve With Locking Holes

Cross section of EXH port Silencer assembly Mounting condition Insert to EXH port Element (x1) Tightening Noise Silencer assembly p/n Uni-thread Torque Reduction size [dB] Note1) [N-m] Element O-ring (x1) Uni-thread VHS20PW-190AS Uni1/8 3 to 4 17 VHS30PW-190AS Uni1/4 4 to 5 21 VHS40PW-190AS Uni3/8 8 to 9 25 Element Cover (x1) VHS40PW-190-06AS Uni1/2 14 to 15 22 VHS50PW-190AS Uni1/2 14 to

/41/4VEX1-17(With gasket, screw)

/41/4VEX1-17(With gasket, screw)

/41/4VEX1-17(With gasket, screw)

/41/4VEX1-17(With gasket, screw)

/41/4VEX1-17(With gasket, screw)

/41/4VEX1-17(With gasket, screw)

/41/4VEX1-17(With gasket, screw)