Process Pump Series PA3000/5000/PAX1000 Series PB1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

25

Can recognize and control up to 16 ionizers through address setting. The mode can be selected from Manual Run mode which performs adjustment only when connected, and Automatic Run mode which always performs adjustment while connected. Frequency setting Offset voltage adjustment Maintenance detection alarm level can be adjusted (3 levels).

NCA1

1.57 11.69 6.82 Bore size (in) TN XT NT ND 150 (1.5") 5/8 1 15/16 1/4-20 9/32 200 (2") 7/8 1 15/16 5/16-18 7/16 250 (2.5") 1 1/4 1 15/16 3/8-16 19/32 325 (3.25") 1 1/2 2 7/16 1/2-13 5/8 400 (4") 2 1/16 2 7/16 1/2-13 5/8 6-15-31 31 Series NCA1 Dual OperationSingle Rod Specifications 1.5 2 2.5 3.25 4 3.25 4 Bore size (inch) Fluid Max. operating pressure Min. operating pressure Ambient & fluid

NCA1

2.76 1 3/8 2.34 8.94 2.72 1.57 11.69 6.82 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 27/64 3.32 1 3/8 2.34 8.94 2.72 1.57 11.69 6.82 Bore size (in) TN XT NT ND 150 (1.5") 5/8 1 15/16 1/4-20 9/32 200 (2") 7/8 1 15/16 5/16-18 7/16 250 (2.5") 1 1/4 1 15/16 3/8-16 19/32 325 (3.25") 1 1/2 2 7/16 1/2-13 5/8 400 (4") 2 1/16 2 7/16 1/2-13 5/8 6-15-31 31 Series NCA1 Dual OperationSingle

NCM

A CAT.IBD20-2 Air Cylinder Series NCM Stainless Steel Body Cylinders 7/16", 9/16", 3/4", 7/8", 1-1/16", 1-1/4", 1-1/2", 2" Bore Now available in Now available in 7/16" and 9/16" bore 7/16" and 9/16" bore Now available in 7/16" and 9/16" bore Double Rod/Double End Mounting Non-rotating Rod Option Auto Switch Capable Nonrotating rod Auto switch capable With bumper Actuation Actuation Actuation

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

30

3.2 (1.8") and 16 have been added.

High Purity Fluoropolymer

16 31 Series LQ1 2 Insertion Tool Fittings Changing tubing sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 15 + 55 120 + 55 120 + 55 140 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 120 90 Different sides 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.

High Vacuum Angle Valve

type * Size 16 is not applicable to H4, H5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15 25.3 32.4 16 25.2 34.4 10.4 15.2 4 5/16" 21 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20

Pin Clamp Cylinders

x 4 L) and spring washer (M3).

MHC2

5 10 Attachment mounting limiting range 16 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through 5 2.5 2-M2 x 0.4 depth 6 (Mounting thread) 4 2 2 When closed 10 When open 30 13.6 14 20 12 0.05 10 4 6 +0.022 0 7H8 depth 1.5 29 (41) M3 x 0.5 (Finger opening port) 4 -0.005 -0.025 0.8 1.3 M3 x 0.5 Finger closing port 5.5 14.3 In the case of MHCA2-6S, finger opening port is a breathing hole.

MHC2

MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

I/O Configurator (NFC version)

bytes) Increase and decrease by 16 points. 128 points/ 16 bytes Available b) Input size 0 to 128 points (0 to 16 bytes) Increase and decrease by 16 points. 128 points/ 16 bytes Available c) Output size Slave unit setting The valve output size is included in the output size of each station.

LEH_C

16 2 0 2 0 25 25 1.5 1 1 L L 3 3 3 3 5 5 5 5 K K 2 LECP6 ( NPN NPN (mm) PNP PNP 10 LECP1 1 LECP1 ( 1 NPN NPN 1P 1P PNP PNP 4 4 10 (CR) AN LECPA ( AP AN LECPA 6 6 16 16 NPN NPN (FKM) K K 20 10 20 10 AP PNP PNP S S (m) 25 14 25 14 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B 3 3 3 3 15 15 F F C C 5 5 5 20 20 5 ( () R R S S 15 - / P.42 7.3 (NPNPNP) J 2.2.3 16 - 1 2 3 4 + 5

CJP2-OM0002K

Part number of auto switchD-A9D-A9V Unitmm B A (When detecting retracted stroke end) H H 1 H 2 3 (When detecting extended stroke end) 5st 10st 15st 20st 25st 30st 35st 40st 4 6 1 6 11 16 21 26 13.0 10.0 20.0 10 1 6 11 16 21 26 31 36 41 16.0 9.5 19.0 16 1 6 11 16 21 26 31 36 41 18.0 12.0 24.0 Part number of auto switchD-M9D-M9VD-M9WD-M9WV Unitmm B A (When detecting retracted stroke end) H