VDW

PAX PB Lined Up by Compact Design 28 2 Port 3 Port 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 17-2-61 2 Series VDW Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6

CHKD/CHKG

x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the same with or without auto switches.

HRX-OM-W002

18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

11 27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

VQC

A 15 3 3 4 5 6 7 8 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL. A Individual EXH spacer VVQ1000-R-1-C6 VVQ2000-R-1-C8 EXH block plate VVQ2000-19A DIN rail mounting bracket [-D] VVQ1000-57A VVQ2000-57A Silencer (EXH port) AN200-KM8 (For VQC1000) AN200-KM10 (For VQC2000) 5 Station 7 21 22 23 SOL. B 9 10 11 (-S) (-T) (-S) (-T) 18 SOL. A 6 Station 8 SOL.

Rotary Actuator

[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8

Speed Controller with Uni One-touch Fitting AS Series

17 18 19 19 32 33 33 34 36 54 55 57 54 55 57 94 96 14.5 5 32" 1 8 14.2 36.1 31.1 30.5 25.5 14.3 3 16" 16.5 17 18.5 14.5 16.5 17 18.5 21 17 18.5 21 17 18.5 21 21 22 12 1 4" 5 16" 5 32" 3 16" 17.2 17 1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0

HRX-OM-X084

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMElectric conductivity control function

CJ2

Please delete the unnecessary parts. 15 17 7.5 21 14.5 4.5 66 122 18 20 7.5 21 14.5 5.5 67 123 1.3-17 Series CJ2W Foot (L) Bore size Stroke CJ2WL Bore size Stroke With air cushion: CJ2WL A Material: Iron Part No. Bore d C B H 6 10 16 6.4 8.1 9.2 5.5 7 8 2.4 3.2 4 M3 X 0.5 NTJ-006A M4 X 0.7 NTJ-010A M5 X 0.8 NTJ-015A Refer to p.1.3-12 for details of the mounting nut.

CS1

59 35 16 90 14 47 36 43 29 25 64 M30 X 1.5 Lube Non-lube Air-hydro 1/2 M14 X 1.5 36 to 1000 75 31 15 161 128 50 17 59 35 16 90 14 47 36 43 32 28 72 M30 X 1.5 3/4 M16 X 1.5 40 to 1200 80 36 18.5 17 182 144 56 53 20 40 90 59 43 14 39 36 32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Air Fittings Fitting Series For Special Environment

12 25 20.5 17 23.3 10 17 28.5 23 29.0 1 2 KRT10-04S 39.5 67.3 32.5 42.5 22 1 4 3 8 KRT12-02S KRT12-03S 38 39.5 17 24 45.2 17 30.5 1 2 KRT12-04S 25.7 42 69.5 12 22 Note: Fitting cover ordered separately.

Table of Contents

Optional filtration rate is required, indicate like 17-. Ex.) When requiring stainless steel and 40 m; 17-40 3 The bowl of series AL is used. 4 This symbol indicates the port size. Flow rate (/min (ANR)) 1 4 1 6 8 Rc 1 4 NPT 1 4 G 14-3-13 2 Series AF800/900 Construction Component Parts Material AF800 AF900 No.

reduces flow setting time

28 AS331FS1-02-06 (S) 6 8.2 16.5 29.9 17.5 40.1 13.3 1/4 17 (17.5) 12.9 13 49.7 48.3 44.2 42.8 21.5 16.2 ASV 49 AS331FS1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FS1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FS1-02-12 (S) 12 18.5 42.5 28.3 64.7 17 55 AS331FS1-03-06 (S) 6 11.2 12.9 16.6 20.2 36 21.4 57.8 13.3 AK 1/4 19 63.1 61.7 57.9 56.5 24.5 19.2 VCHC 41 AS331FS1-03-08 (

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-08 (S) 8 13.2 37.1 23.5 52.2 14.2 42 AS331FSG1-03-10 (S) 10 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS331FSG1-03-12 (S) 12 18.5 42.5 28.3 57 17 47 AS431FSG1-04-10 (S) 10 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 26.1 61.2 64.1 62.5 57 55.4 15.6 26 19 69 AS431FSG1-04-12 (S) 12 18.5 21 26.2 48.3 28.3 63.4 17 72 10.4 12.9 16.6 20.2 36 21.4 50.1 13.3 ASR ASQ 3/8 19 55.4 54 50.2 48.8 24.5 19.2 Inch

MNB

31.5 47 5 111.2 47.5 63 197 58 285 12 23 M18 x 1.5 3/8 15 8.5 30 7 M8 x 1.25 20.7 300 17 31.5 55.5 9 123.5 55 80 245 72 359 14 33 3/8 10.5 M22 x 1.5 23 42 10 M10 x 1.5 26 382 26 38 61.5 11.5 157 61 100 265 72 379 15 37.5 1/2 10.5 M26 x 1.5 23 42 10 M10 x 1.5 26 402 26 38 69.5 17 177 68 Double Clevis Pivot Bracket Material: Cast iron Surface treatment: Black coated Strength is the same as

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

18 17 18 21 22 21 22 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 22.4 25.2 6.2 12.3 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 12.3 15.5 15.5 20.6 20.6 27.6 11.3 Note 1) Reference dimensions 27.6 Note 1) Reference dimensions 550