Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN (DC

Check Valve Series AK

Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Minimum Operating Pressure Symbol Rubber bumper Unit: MPa 12 16 20 25 Minimum operating pressure Bore size (mm) 0.03 0.02 Standard Stroke Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit no.

Thermo-dryer

/ft3 (3.0 g/m3). 10.

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

Digital Pressure Switch ( compatible)

), ripple max. 10% voltage Power supply spec.

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

Information

14 15 18 20 5 5 8 19 21 27 30 19 21 27 30 34.5 37 42 47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure

High Vacuum L Type Valve

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

Air cylinder

CG1*A Series / Air cushion on page 10. A 25 Switch does not turn on (Switch sometimes does not turn on) 1. Power supply Check the power supply. Connect the product properly. failure or connection failure 2. Displacement of Try to slide the auto switch over the product to check auto switch position its ON position, and move it to a correct position. 3.

SJ3A6

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

CQ2 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Built-in Magnet Cylinder Model Double acting Action D 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 RQ If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQSL25-30D 25 For Manufacture of Intermediate Strokes, refer to page 552.

PSxx-OMM0006CN

DC1224 V10 DC1224 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -57No.PS-OMM0006CN-E No. 14 15 , 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -58No.PS-OMM0006CN-E , 80 mA 7F.S.(3.5F.S.) 1 1F.S. 1 -59No.PS-OMM0006CN-E (M8(3 )62 ) ZSE40A() ZSE40AF() ISE40A() 0-101.3 kPa -100.0100.0kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0kPa

Sine Rodless Cylinder/Linear Guide Type Series REAH Single axis type:

For 10 grease pack part no.: GR-F-005 (5 g) for external sliding part GR-S-010 (10 g) for tube interior For 15 grease pack part no.: GR-S-010 (10 g) O-ring NBR O-ring NBR Cushion seal NBR 168 Sine Rodless Cylinder/Linear Guide Type Series REAH Single axis type: 20, 25 Construction Single axis type: 20, 25 Actuators Modular F.R.L.

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

speed (mm/s) 0.025 0.5 0.06 1 0.06 1 0.035 (0.025) 1 (0.5) 32, 40 32, 40 10, 16 10, 16 0.01 0.5 0.05 0.5 Figures in ( ) are for 11-CQ2X 20, 25, 32 50, 63, 80, 100 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore sizes (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min.

Multistage Ejector (N)ZL Series

10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction

06-reah-e

For 10 grease pack part no.: GR-F-005 (5 g) for external sliding part GR-S-010 (10 g) for tube interior For 15 grease pack part no.: GR-S-010 (10 g) O-ring NBR O-ring NBR Cushion seal NBR 168 Sine Rodless Cylinder/Linear Guide Type Series REAH Single axis type: 20, 25 Construction Single axis type: 20, 25 Actuators Modular F.R.L.