Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Controller and its peripheral devices / Specific product precautions 23 10.1 Design and selection 23 10.2 Handling 24 10.3 Installation 25 10.4 Wiring 25 10.5 Power supply 25 10.6 Grounding 26 10.7 Maintenace 26 2 No.JXC-OMW1019-A LECP6 Series / Controller 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

V100

Grommet (G), (H) (Pitch) P=10.5 11.5 5 5 10 11.6 V100 3 1 3 1 27 [30.9] 21.5 25 + + + + + SY SYJ (Mounting hole) 2-3.5 VK L2 3 (1, 3 port) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 32.5 [34.7] VZ L1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Lead wire length)

F

~ 60OC / 40 ~ 140F Ambient and Fluid Temperature 8 ~ 10Turns No Of Needle Rotations AS1000 Not Applicable Panel Cut Out Dimensions AS2000 16.5 AS3000 16.5 AS4000 25 D I M E N S I O N S S E R I E S (N)AS1000-M5 D I M E N S I O N S S E R I E S (N)AS2000, 3000 Port Size G H I K A B C D E F Model 1/8 50 54.5 16 4.5 40 30 5 17 10 15.5 (N)AS2000-01 3/4 51.5 56 20 4.5 40 30 5 23 11.5 17 (N)AS2000

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2.5 3.0 4.0 3.5 0 5 10 15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L 2 20.5 3 31 4 41.5 5 52 6 62.5 7 73 8 83.5 9 94 10 104.5 2.1-12 Series SY100 31 Type Manifold: Top Ported/SS3Y1-31Station Grommet (G), (H) 11.5 P=10.5 (Pitch) n-M3 X 0.5 (A port) 27.5 5 Manual override SY 3 5 G: 300 H: 600 SYJ 28 (In case of DC) R R 9 (Lead wire length) 15.6 34.5 (In case of AC) 21.5 10 25 VK P P + + + + + VZ 4-M5 X 0.8 (P/R port) VT L2 3 2-3.5 (Mounting holes)

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

Check Valve Series AK 1

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

Series 11-MXJ Air Slide Table

Reed Auto Switch: D-A93 (mm) Stroke B A Stroke C Auto switch operating range Stroke Model 5 10 15 20 5 10 15 20 5 10 15 20 11-MXJ4 11-MXJ6 11-MXJ8 14 14 0.5 0.5 9 4 4 3 14 14 18 0.5 0.5 0.5 9 4 10 5 25 14 14 25 0.5 0.5 0.5 0.5 9 4 Solid State Auto Switch (Lead Wire, In-line Entry): D-M9 (mm) Stroke B A Stroke C Stroke Auto switch operating range Model 5 10 15 20 5 10 15 20 5 10 15 20

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA1 MSUA1-S, SE Scale: 70% C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (positioning pin hole) 35h9 0 0.062 22.5 +0.025 0 +0.043 0 3-3H9 depth 3 ( A , B , C ) 17 H9 27 2.5 2 2-4.5 through 3-R1.5 12.5 37 8 6.5 10.3 6.5 36h9 0 0.062 31 4.2 2 31.5 2 27 16 9 5 Angle adjustment bolt 4.5 2-4.5 through 3-R1.5

The RQ series new air cushion construction allows this series to retain the merits of a compact cylinder. The unique air cushion construction eliminates the cushion ring used in conventional type air cushions, which reduces the overall length of the cylinder. The RQ series meets the demands for reduced shock, noise reduction and improved repeatability at the stroke end. Unique air cushion

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, LC, ACTUATOR, Auth/Grp: A/60, 546, RZQ 3-POSITION CYLINDER

VNC

LQ Valve specifications Pilot Solenoid Valve Specifications VNC1 SF4--23 VNC2 to 9 Fluid VNCA Model Pilot solenoid valve Coolant 5 to 60C LVN VO301-00T-X302 Grommet Grommet terminal Conduit terminal DIN terminal Fluid temperature 5 to 99C (Air operated type only) VNCB TI/ TIL Conduit terminal Electrical entry 5 to 50C (Air operated type: 60C) Ambient temperature Proof pressure 1.5 MPa 0

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

5 !6 !7 !

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

32 Double acting/Single rod Min. operating pressure (MPa) 0.06 0.06 0.05 0.05 0.05 Standard Strokes Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30 10, 16 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 Specific Product Precautions Be sure to read before handling.

CYV

5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Process Valve

type B (tool required) Note) Note 1) Electrical entry: D or DZ only Note 2) Semi-standard Note 3) For other rated voltages, please consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor

Digital pressure switch for energy-saving control ejector

+/-3 oC) Indication LED Light when ON OUT1: Green OUT2: Red Enclosure IP40 Ambient temperature range 5 to 50 oC Environ ment Withstand voltage 1000 VAC for 1 minute between live parts and case insulation resistance Insulation resistance 50 M or more at 500 VDC Between lead block and case Temperature characteristic 2%F.S. (25 oC reference) cable 5 cores 3.5, 2 m Lead wire Sectional area of