SMC Corporation of America
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(Operating pressure: 0.5 MPa, unloaded, Piping: Bore 19 mm x 1 m) RHC MK(2) Although the converter and the valve unit are integrated, they can also be operated by connecting individual piping. RS Q G RS H A Air-hydro Unit Series CC Air-hydro Converter Series CCT Valve Unit Series CCVS/CCVL RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S Application Example CV 1.

For IS3100, 3110 Gasket piping side 70 5 7 12.2 18 15 5 Operating Environment 19 (Hex.) 2 x 5.5 Mounting hole 48 G 1/2 Electric wiring hole Warning 19 16 5 1. Do not use in an environment, where water or oil is splashed. Because it is the open type construction. If water or oil were to make an ingress, the electrical circuit would be corroded and result in a malfunction or damage. 2.

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: .65 CFM / 19 LPM , .65 CFM / 19 LPM, Max Pressure: 30 PSIG / 2 bar , 30 PSIG / 2 bar, Max Vacuum: 22 in HgV / -746 mbar , 22 in HgV / -746 mbar, Voltage: (60 Hz) 230 / (50 Hz) 220 , (60 Hz) 230 / (50 Hz) 220, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 5.1 lbs. / 2.3 Kg Series

8 above 6 to 15: not available Nickel plated Note 1) Seal kits are sets consisting of numbers 15 through 19. Order using the kit number corresponding to each bore size. Note 2) Adhesives are applied to the secured portion of the head cover and the cylinder tube.

HOW TO ORDER" (P8). 19 8REPLACEMENT PROCEDURE WARNING Before replacement, ensure that the regulator is not pressurized. Rotate the pressure adjusting handle to zero. Replace refering to 9DISASSEMBLY DRAWING P24 to P28. After replacement, ensure that specified function is satisfied and external leakage is not found before starting operation.

Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-28 10-1. Bowl Assembly Replacement 23-25 10-2. Element Replacement 26-28 11. Disassembly Drawing 29 12. Dimensions 30 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

6 turns PF3W720S 112 54 63.6 (Max. 68.6) 74.2 34 62.5 18 13.6 2.7 depth 10 19 6 turns PF3W740S 142 71 75.25 (Max. 81) 94.5 44 79 28 16.8 2.7 depth 10 28 7 turns Symbol Bracket dimensions Model S T PF3W704S 56.5 22 PF3W720S 60.5 22 PF3W740S 78 30 -87No.PF-OMM0005-N PF3W704/720/740 (With temperature sensor and flow adjustment valve) Basic type and flow adjustment valve and temperature sensor

AC Specification AC Specification Apparent power (VA) Energized 19 16 43 35 62 52 Apparent power (VA) Energized 22 18 46 38 64 54 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush Frequency (Hz) 50 45 65 60 65 60 Inrush Frequency (Hz) 55 50 65 60 65 60 10 8 20 17 32 27 11 8 20 18 32 27 50 60 50 60 50 60 50 60 50 60 50 60 VXK21 VXK21 VXK22 VXK22 VXK23 VXK23 Note) Value

depth 8 +0.030 0 4 x M10 x 1.5 thread depth 20 6H9 depth 8 +0.030 0 (Mounting thread) Dimensions of auto switch mounting groove (Enlarged view) 40H9 depth 2.5 +0.062 0 Rc (G , NPT ) 1 8 1 8 1 8 Rc (G , NPT ) 1 8 1 8 1 8 Auto switch mounting groove (4 locations) (Finger closing port) (Finger opening port) 2 x M10 x 1.5 (Rack screw) Width across flats 17 (2 locations) Width across flats 19

D-A76H/A80H 2.11-9 Rail Connector 2.11-10 D-A73C/A80C D-A53/A54/A56 D-A64/A67 Grommet 2.11-11 Reed switch 2.11-12 D-90/97 D-A90/A93/A96 D-A90V/A93V/A96V 2.11-13 Grommet 2.11-14 D-90A/93A Direct mounting 2.11-15 D-R731/R732 2.11-15 D-R801/R802 MHZ2 2.11-16 D-R731C/R732C Connector 2.11-16 D-R801C/R802C MHZJ2 2.11-17 Grommet Rail D-A79W 2 color indication MHQ Grommet Tie rod 2.11-18 D-A59W 2.11-19

(optional) 2-Rc 1/4 ATM port, OUT port 4-M x 0.8 thread depth 6mm through Mounting hole OUT 2 G 15 19 R3.5 n36 25 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 SMC Pneumatics, Inc.

ZSE40(F)/ISE40W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 * For splash proof use (IP65), insert an air tube into the atmospheric release port. (Refer to Specific Product Precautions 4 on the back cover for details.)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19

19 Series IR1000/2000/3000 Flow Characteristics Pressure Characteristics Vacuum pump exhaust speed: 500 l/min VAC side pressure: 101 kPa at initial setting Vacuum pump exhaust speed: 500 l/min IRV1000 IRV1000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) Set pressure (kPa) 30 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 10 20 30 40 50 60 70 57.0 100 95 90 85 80 75 70 65 60

Set pressure scale is the value when pressure increases. 70 For IS3100, 3110 Gasket piping side 5 Operating Environment 5 7 19 (Hex.) 12.2 2-5.5 Mounting hole 18 15 Warning G 1/2 Electric wiring hole 19 16 5 48 22 1. Do not use in an environment, where water or oil is splashed. Because it is the open type construction.

pulse output Accumulated pulse output Output 2 Switch output Switch output Shipment 16-11-37 2 Digital Flow Switch For Deionized Water and Chemicals Series PF2D How to Order PF2D5 13 20 1 Remote type Sensor unit Output specifications Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19

depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 S 51 54 57 57 Q 27 30 32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19

88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19