Subsonic flow at P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P (P2 + 0.1013) Sonic flow of P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm2] P: Amount of pressure drop P1 P2 [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Cylinder stroke (st/mm) Applicable area Unapplicable area Outlet pressure (MPa) Outlet pressure
w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.
64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7
Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !
W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95
Body option 0: Individual exhaust for the pilot valve VQ7 U: With silencer 2 position double EVS 2 K: With foot bracket and silencer (2 position single only) VFN 3(R) port PE port 3 position closed center 3: Common exhaust type for main and pilot valve Note) The bracket and silencer are not assembled. 3 4(A), 2(B) port size M5 M5 x 0.8 C4 C6 One-touch fitting for 4 One-touch fitting for 6
Metric size Inch size Stations Symbol IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1
6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.
Component Parts Note No. q Description Material Plated Cast iron Cover assembly Body assembly Platinum silver painted Valve composition, NBR, FKM Aluminum alloy Iron N.O.
Description Material 1 2 3 4 5 6 7 8 9 10 Body PPS Tube assembly Stainless steel Coil assembly i Armature assembly Stainless steel, NBR, FKM, EPDM r y u q o !0 Return spring Stainless steel Flame Iron O-ring NBR, FKM, EPDM Round head combination screw Iron Cassette POM, Stainless steel OUT IN Seal NBR, FKM, EPDM q Do not disassemble.
SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6
N320.5 Compact Cylinder High Magnetic Field Design COQ2BP Series o50,o63,o80 L . . e High Magnetic Field Auto Switches Compact Metallic "Coil" Rod Scraper Large Bearing Surface Product Features Pages 4-5 How to Order Page 6 Page 6 Standard Specifications . . . . . . . Page 6 Seal Kit Part Numbers . . .. . . .
0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.030 0 +0.030 0 MHZ2-10D 12.4H9 M2.5 x 0.45 12 19.5 28.2 5.5 M3 x 0.5 6 M3 x 0.5 5.5 2.6 2H9 3 1.5 M3 x 0.5 6 112211221122MHZ2-16D 17.4H9 10.8 19 M3 x 0.5 29.5 6.5 M4 x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1
2.5 Model number of product 2.6 Product Serial Number Code The production serial number code printed on the label indicates the year and month of production as per the following table: 9 8 7 6 D-sub 9 pin (socket type) Fixed screw: M2.6 9 8 7 6 D-sub 9 pin (socket type) Fixed screw: M2.6 Sep W QW RW SW . ZW AW BW . Mar Q QQ RQ SQ . ZQ AQ BQ . Feb P QP RP SP . ZP AP BP . May S QS RS SS .
Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !
Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !
Air Slide Table Double-ported Type How to Order 6, 8, 12, 16, 20, 25 MXQA Series RoHS 30 ZA MXQ 12 M9BW A q w e r t y u i t Functional options u Number of auto switches q Bore size Body option: w Double-ported type e Standard stroke [mm] A 6 10, 20, 30, 40, 50 Symbol Functional option Nil Without functional option 1 With buffer 2 With end lock 3 Axial piping 4 With buffer, end lock 5 With
0oi q w e r t y u i !1 !2 No.
thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24