AMP

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

VND

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D

Vacuum Saving Valve

No.0.8 L1 L3 L2 L3 (L4) No.0.8 H 2 H 2 H 2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-AG1ZP2V-A5ZP2V-A8Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H 1 Vacuum generator side L2 L3 3 H 1 M2 H 1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H 2 H 2 L1 L1 L1 H 2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator

Information

fluid system Facility water system Electrical system Temperature range setting Note 2) (C) Cooling capacity Note 4) (50/60 Hz) (W) Temperature stability Note 6) (C) Pump capacity Note 7) (50/60 Hz) (MPa) Rated flow Note 8) (50/60 Hz) (L/min) Tank capacity (L) Port size 5 to 40 1100/1300 1500/1700 0.1 0.13/0.18 (at 7 L/min) 7/7 Approx. 5 Rc1/2 Stainless steel, Copper (Heat exchanger brazing

BP1000

No code 0 V3 L 1 H 2 4 No gauge port No pressure gauge Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.

Toggle Type Air Gripper

A B (mm) Model A 21h9 28h9 35h9 35h9 B 2 2 2 2 Weight (g) 805 1,097 1,943 2,825 MHT2-32DZ-X5070 MHT2-40DZ-X5070 MHT2-50DZ-X5070 MHT2-63DZ-X5070 0 0.052 0 0.052 0 0.062 0 0.062 653 A

Series HAW Water Cooled Aftercooler 1

473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2 1 1 2 1 1 1 1 2 2 3 1 1 1 4 14-15-8

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Note 6) Note 6) Note 6) Note 6) Note 6) Note 1) When using a non-relieving type with a backflow function, if the inlet pressure is increased slowly, the inlet pressure may continue to the outlet side.

l

2 !3 !4 !5 !6 !7 !8 !

Air-hydro Unit

Combinations Converter nominal size Control valve Valve unit size Combined valve 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0 1 2 3 0 1 2 3 0 1 2 0 1 2 S 63 Speed controller Combined valve (Stop valve, Skip valve) The stop valve for intermediate stopping and the skip valve for last-forwarding are compound integrated

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

Related Products: Heavy Duty Auto Drain Series ADH4000

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 Series ADH4000 Construction Component Parts q o i u !1 No.

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

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I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

47.4 28.5 27.5 26.7 50.6 55.6 38.5 24 (23.8) 1/2 1/2 Note 1) ( ) are the dimensions of NPT thread.

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

VNH 15A 2 1 1 A Air operated VNH 15A 2 1 1 A 1 D External pilot solenoid CE-compliant Port CE-compliant Nil Q 1 3 3 port 2 port Thread type Option 2 port is 7.0 MPa only.