Multistage Ejector (N)ZL Series

30 20 20 13.3kPa 13.3kPa 10 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD For Water, Air, Vacuum VD W 2 1 1 G 2 01 VXZ VXE Made to Order (Refer to page 244.) Series VXP 1 2 3 10 N.C.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting base side B D Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2-M2 x 0.4 depth 3 10.7 8.5 L 6-M5 x 0.8 depth 7 20 20 2

LEF-OM007xx

LEFS40 Speed 1000mm/sec 0 [/min] 50 [/min] 10,000,000 80 [/min] 100 [/min] ISO CLASS4 ISO CLASS5 ISO CLASS6 1,000,000 Particle concentration [particles/m3] 100,000 10,000 1,000 100 10 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Clean class Amount of recommended vacuum aspiration (/min(ANR)) Type Speed mm/s) ISO 14644-1 Fed.Std.209E 6 1000 5 5 100 10 4 10 30 6 1000 5 5 100 10 4 10 30

NCQ8

1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

0 19 0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1 0 1 0 1 22 0 1 0 1 1 0 22 0 1 0 1 1 0 23 0 1 0 1 1 1 23 0 1 0 1 1 1 24 0 1 1 0 0 0 24 0 1 1 0 0 0 25 0 1 1 0 0 1 25 0 1 1 0 0 1 26 0 1 1 0 1 0 26 0 1 1 0 1 0 27 0 1 1 0 1 1 27 0 1 1 0 1 1 28 0 1 1 1 0 0 28 0 1 1 1 0 0 29 0 1 1 1 0 1 29 0 1 1 1 0 1 30 0 1 1 1 1 0 30 0 1 1 1 1 0 31 0 1 1 1 1 1 31 0 1 1 1 1 1

Fieldbus System

Mounting hole Connector for Handheld Terminal End plate n 8 7 6 5 4 3 2 D side U side Station 1 3/4: 3/4" Female thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" Female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (External

30

(mm) 3.2 4 6 8 10 12 16 H (Width across flat) 12 12 17 19 21 24 30 T (M) 2 x Applicable tube Mounting hole M Weight (g) L Model KQB2E23-00 KQB2E04-00 KQB2E06-00 KQB2E08-00 KQB2E10-00 KQB2E12-00 KQB2E16-00 3.4 5.6 13.1 26.1 41.5 58.3 113 14.8 14.7 29.2 34.9 47.1 58.7 107.2 11 11 15 16 19 21 28 M10 x 1 M10 x 1 M14 x 1 M15 x 1 M18 x 1 M20 x 1 M27 x 1 32.2 32.4 35.4 38.8 40 42.4 46.8 12 12.6

VEX1

Port size E F G H I L M P Q A Model B C D J K N O R S T U Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 x 1 x depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 x 1 x depth 6 136.5 17 82 1 4 1 4 1, 1 1 Bracket mounting dimensions

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

3 Port Air Operated Valve Series SYJA300 1

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 A B (A port) Rc 1/8,1/4 Base mounted: VPA344V12 65.6 39 12 30 (PA port) Rc 1/8 2(A) NO 26.5 PA 35 43 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch

Air Suction Filter With One-touch Fittings ZFB Series

30 75 100 " " " " " 7 7 12 16 19 3 16 1 4 1 4 3 8 1 2 Inch size (2) Light and compact molded resin parts Cartridge type allows element replacement Note 1) Flow rate when initial pressure drop is 3 kPa or less.

CEx-OMQ0011

204 130.5 23 106 LD LL MM NN PP SS YY ZZ 5.6 9.5 M5x0.8 9 Rc1/8 30 37.5 Rc1/16 6.8 16 M6x1 12 Rc1/8 35 45 Rc1/16 8.6 15 M8x1.25 14 Rc1/4 40 54 Rc1/8 V 26 7-2 27 7-3 R03-P8F 28 8-1 8-2 AC DC LCD 29 9-1 9-1-1 0.1 ()0.1[MPa] 1 (2) 1 () 2 () 2 () 3 4 (LM ) ()() (1 2 30 14.5mT 14.5mT 15000 18cm 20m 20m 31 9-1-2 M4 DIN [050] [25%85%] 1055Hz0.75mmXYZ 2 9-2 9-2-1 AC100V15AC85VAC115V

SMC Wireless System PROFINET compatible

2/5/10/30/60 s 1 Input/output specifications Number of connected EX600 I/O units Max.

SMC Wireless System EtherNet/IP ® compatible

2/5/10/30/60 s 1 Input/output specifications Number of connected EX600 I/O units Max.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Y 7 1 1 0 5 MO C6 VQ Series VQ1000 Cylinder port Connector kit 1 set Manifold base part no. 4 sets Valve part no. (Stations 1 to 4) 4 sets Valve part no.

LEC-OM034xx

CN1: Controller IF communication connector (CONT)30 8. 1 Connection.30 8. 2 Wiring diagram.32 9. CN2: TB/PC connector.33 9. 1 How to use.33 10. LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.

KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g M L2 D2 L1 2-Applicable tubing M L1 M KPT04-01 KPT04-02 KPT06-01 KPT06-02 KPT08-01 KPT08-02 KPT10-02 KPT10-03 KPT12-03 KPT12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6

Series KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Weight g Connection threads R L2 M D2 L1 2-Applicable tubing M L1 M 6 7 8 9 12 13 20 21 24 27 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 12 14 12 KPT04-01 KPT04-02 KPT06-01 KPT06-02