AN

.: AN200-N02) AN600-10 270 1 1 1 AN700-12 440 1 4 AN800-14 590 1 2 AN900-20 960 2 Note) NPT thread is also available. Specify N after ANm00-.

Regulator for 2 MPa ARX 20

G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, DD, ZH NOZZLE SIZE 1.3, .11660 lb

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N02 (Screw-in NPT 1/4), EXH: N02 (Screw-in NPT 1/4)

This is a legacy product, and replaced byZH13DSA-N01-N02-N02, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, DC, ZH NOZZLE SIZE 1.3, .08250 lb

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

HRX-OM-Q026

HRSH100-W*-20-*T HRSH150-W-20-*T HRSH200-A-20HRSH200-W-20R8-5 M5 30 3 phase 40 4 cores x AWG8 200 to 230 (4 cores x 8 mm2) VAC *including (60Hz) HRSH250-A-20HRSH250-W-20HRSH300-A-20ground 50 HRSH100-A-40HRSH100-W-403-phase 20 R5.5-5 380 to 415 HRSH100-W*-40-*T HRSH150-A-40HRSH150-W-403 x 5.5 mm2 VAC For power (3 x AWG10) (50/60Hz), line M5 30 3-phase 30 HRSH200-A-40HRSH200-W-40R14-5 460

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

VS 8-2/VS 8-4

t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8-2-DFHG FIG FJG VSR8-2-FG-DVSR8-2-FG-SVSS8-2-DFHG FIG FJG VSS8-2-FG-DVSS8-2-FG-SDescription No.

modular-press-e

IN OUT Replacement Parts r w e t Part no. AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

Modular F.R.L. Pressure Control Equipment

IN OUT Replacement Parts r w e t Part no. AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

Title not found

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol With Subplate CvO.7 w Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

Series VQ Metal Seal/Rubber Seal Body Ported

assembly (8 terminals) T kit (4) (4) r AXT100-2-TA2 Terminal block assembly (8 terminals) T kit t VQ Note 1) A S kit is composed of a flat cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol CvO.7 w With Subplate Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

MB

0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

CY1

4 @9 @5 u y t r w @6 #0 !2 o e i !0 q !8 !5 @0 !9 @1 @2 @3 Port Parts list Parts list No. Description Cylinder tube No.

Table of Contents

AC Symbol Specifications DC (1.0 W) (1) Standard type Nil With light/ surge voltage suppressor M: M plug connector With lead wire 3 position closed center (1.5 W) (0.5 W) H (2) High pressure type 3 Note) Low wattage type Y (2) With light/ surge voltage suppressor MO: M plug connector Without connector For power consumption of AC type, refer to page 2-4-36.

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.