Vacuum Pad: Ball Joint Type

Dimensions H B Ball joint type: 10 to 32 (mm) D Model B d H Y ZPNA-M10 M10 x 1 3 14 E ZPNA-M14 M14 x 1 5 19 ZPNA-M8 M8 x 1 3 12 C A B Ball joint type: 40, 50 ZP3 D ZP3E ZP2 E Y ZP2V C A ZP B ZPT ZPR ZPT ZPR (mm) Model B A C D E Y XT661 ZP10F 10 12 6.5 1.5 ZP13F 13 15 3 8.2 7 2 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 25 28 4 10.2 3 ZP32F 32 35 9 ZP40F 40 43 10 13 5 26 ZP50F 50 53 8 14 6 725 ZPT/

CRBB-OM00004

Hysteresis range: d The range is between the position where the auto switch turns ON as the magnet inside the auto switch unit moves rotationally and the position where the auto switch turns OFF as the magnet moves rotationally in the opposite direction. Fig. 3-1 -9 d 1015 170 20 2030 100 15 40 86 10 -/()()/ -/// d 1015 110 10 2030 90 40 52 8 6 No.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

MONOSASHI-KUN WITH BRAKE CONTROLLER

MODEL 4-1 Monosahi-kun with Brake CE2 B 40 100 J No. of Auto switch Mounting None 2 B Standard s 1 L Plate n n F Rod Flange G Head Frange Auto switchs Type C Single Clevis D Double Clevis (Refer to Catalog) T Center Trunnion Cylinder Accessories J Nylon Tarpaulin Tube Bore Gaiter K Neoprene 40 40mm None Both Sides 50 50mm N None 63 63mm Cushion R Cushion at Rod side 80 80mm H Cushion at Head

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Air Cylinder: Standard Type Double Acting, Single Rod CG1 Series 20, 25, 32, 40, 50, 63, 80, 100 RoHS How to Order 100 CG1 20 N B Z N B 20 Z Bore size 100 CDG1 M9BW With auto switch With auto switch (Built-in magnet) Pivot bracket Made to Order Mounting Nil None For details, refer to page 293. 20 20 mm 25 25 mm 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm N Pivot bracket is shipped

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

VP300/500/700

) (D, Y) VS N.C.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

AC Servo Motor Driver (CC-Link Type)

The home position is defined to be where the first Z-phase signal is issued or the position that is the home position shift distance away from where the first Z-phase signal is issued. Dogless Z-phase reference -107- 7.1.2 Stopper type home position return.

CG1-OM0227

D-H7BALD-H7NF D-G59WD-G5PWD-K59W D-G59FD-G5NT D-C73CD-C80C D-B54D-B64D-B59W 3. 4. () () (M4 1~1.2Nm (M3 0.6~1Nm 11 <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V 5. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,

Rotary Cylinder Series MRQ

D-F7NTL Electrical entry (Fetching direction) Grommet (In-line) With timer Feature Operating Range/Hysteresis/Proper Mounting Positions of Auto Switch D-F7, F7V, J79, J79C, F7W, F7 WV, J79W, F7BAL, F7BAVL Linear motion parts Size D-A7/A8 D-F79F Linear motion parts 32 40 32 40 32 40 12 11 Operating range (mm) 8 7 6 Linear motion parts Hysteresis (mm) 2 1 1 8.5(9) 11(11.5) 9 11.5 9 11.5 Proper

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

Plate Cylinder: Double Acting, Single Rod 25, 32, 40, 50, 63 Series MU How to Order B 25 D 30 M Z MU B 25 D 30 Z M S M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. Mounting B L F G C D Basic Foot Rod flange Head flange Single clevis Double clevis Auto switch Nil Refer to the below table for applicable auto switch models.

PF2A/PF2W

OUT2 41.8 40.3 NC 8 Load 4 Sensor 40 4.3 OUT1 Black Main circuit Main circuit 7 3 Load Brown ZSE ISE 6 2 Blue + SMC FLOW SWITCH 5 1 PSE 12 to 24 VDC Series PF2A5 35.8 40 A Z I SE3 UNIT PF2A30-A RESET SET OUT2 PS NC 8 Load 4 Sensor Z I SE1 2 OUT1 Panel fitting dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC

HRX-OM-R026

. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090-A-20/40. 9-7 9.2.2 HRSH090-W-20/40. 9-8 9.3 Flow diagram . 9-9 9.3.1 HRSH090-A-20/40. 9-9 9.3.2 HRSH090-W-20/40. 9-9 9.4 Cooling capacity . 9-10 HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

(mm) Auto switch model Bore size (mm) Bore size (mm) Auto switch model MGJ 40, 63, 100 40 63 100 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL MGP BMG2-012 6 6.5 6 MGQ D-Z7/Z80 10 10 10 D-M9(V)/M9W(V)/M9A(V)L D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MGG 6 6 6 MGC BMG2-012 Since this is a guideline including hysteresis, not meant to be guaranteed.

ALF400 to 900, ALT-5/-9

l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC