High Purity Chemical Valve

E F G H1 H2 J K L M N Model LVH20m LVH30m LVH40m 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 483 Series LVH Dimensions/Threaded Type N Body material: PPS Body material: Stainless steel N G A G A D L Non-locking type Locking type 60 K 4 x M Non-locking type Locking type (H1) (H2) C 60 A B

Rotary Actuator/Vane Style Series CRB2

Single flat D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

Compact 5-Port Solenoid Valve

D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.

Air cylinder

(Same side) 60+55(n4)/2 n=4, 8, 12, 16 70+55(n4)/2 n=4, 8, 12, 16 85+55(n4)/2 n=4, 8, 12, 16 105+55(n4)/2 n=4, 8, 12, 16 110+55(n4)/2 n=4, 8, 12, 16 115+55(n4)/2 n=4, 8, 12, 16 D-A59W 1 switch 60 70 85 105 110 115 D-F5 D-J5 95 2 switches (Different side, Same side) 90 100 110 115 95+55(n4)/2 n=4, 8, 12, 16 D-F5W D-J59W D-F5BA D-F59F Other qty.

Power Clamp Cylinder

2 Cover cap screw 45 G 40 CKZT-S040 Note 1) T P Switch cassette 60 F 75 E 90 D q Stay o Spring washer !0 Socket head cap screw 105 C CKZT-D040 Note 2) 120 B Kits for changing opening angle of arm CKZT-B040 Note 2) w Stopper bolt r Bumper !1 O ring 135 A 40 CKZT-K040 Note 2) CKZT-D040 CKZT-B040 t Top cover !3 Spacer !4 Short head cap screw !

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

3 Port Solenoid Valve Metal Seal Series VZ200 1

C Locking type (Manual) VK 1 100 VAC, 50/60 Hz Electrical entry 2 200 VAC, 50/60 Hz 3110 VAC, 50/60 Hz 4220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC VZ L: L plug connector, With lead wire LN: L plug connector, Without lead wire LO: L plug connector, Without connector D: DIN terminal G: Grommet, Lead wire length 300 mm Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

VNB

VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other 1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Electrical entry G C TNote) D DL Option Electrical entry/With indicator light/ surge voltage suppressor Grommet Conduit Conduit terminal DIN terminal DIN terminal with

MHF2

(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) In-line D-F9P D-F9N Perpendicular D-F9BV D-F9NV Perpendicular D-F9B Perpendicular D-F9PV Auto switch symbol In-line In-line Electrical entry 3-wire 2-wire Wiring method PNP NPN Output method IC circuit, Relay, PLC 24VDC relay, PLC Applicable load 5, 12, 24VDC (4.5 to 28VDC) Power supply 10mA or

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Thermo-chiller/Rack Mount Type

0.9/1.1 (1.1/1.1) 1.0/1.3 (1.2/1.3) 0.9/1.0 (1.1/1.0) 1.1/1.1 (1.2/1.1) Communication function Contact input/output, Serial RS-485/RS-232C Noise level (50/60 Hz)9 [dB] 59/60 59/60 59/60 59/60 Accessories19 Power supply connector, Particle filter element and maintenance handle20, Operation manual Weight10 [kg] 41 40 Rated power consumption18 1 No condensation should be present.

Brake mechanism added

Auto Switch Mounting Height (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G5BA D-G59F Auto switch model D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F D-F5NT D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BA D-Y7W D-A9 D-M9 D-M9W D-M9A D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-Y69 D-Y7PV D-Y7WV Bore size (mm) Ht Hs 40 50 63 80 100 Hw Hs Ht Hs Ht Hs Ht Hs

Compact

0.00 0 20 40 60 0.00 0 20 40 60 Load [N] Load [N] Load [N] ST = Stroke 14 MXZ Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Mounting D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW D-M9mA (1) Bottom mounting 5 10*2 15*1 15*1 (2) When mounting an auto switch into the groove from the top*3 15 15 30 30 (3) Tube top mounting 5 10*2 5 10*2 *1 For 5 and 10

Round Type Hydraulic Cylinder

3, 4, 5) 20 + 35 D-M9V 5 20 35 CHS (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9V 5 15 25 CH2 (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 10 20 35 CHA (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 15 + 45 (n 2) 2 D-H7/H7W D-H7NF/H7BA 60 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 60 Related Products (n = 2, 4, 6) Note 3) 15 + 45

Compact Cylinder with Lock Series CLQ

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL Auto switch model D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-A73C D-A80C D-P4DWL Bore size (mm) Hs Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 D31.5 32.5 38.5 35 38 34 -X 35 36 42 38.5 41.5 37.5 44 41 42 48 44.5 47.5 43.5 50 Individual -X 47.5 48.5 54.5 51 54 50 56.5 57.5 58.5 64.5 61 64 60

F/ISE

15 7.2 7.5 41.5 22 Bracket D ZS-24-D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5 36 70 or more 47.4 Piping port URJ 1/4 Front protection cover The thickness of the panel is to 3.2mm. 12 Series ZSE F/ISE 50 60 50 60 Description (Common to ZSE50F/ISE50 and ZSE60F/ISE60) 31/2 digit LED kPa Displays current pressure Displays current mode

0.55

Order Symbol Specification Grommet (G), (H) L-type plug connector (L) M-type plug connector (M) DIN terminal (D) DIN (EN175301-803) terminal (Y) Conduit terminal (T) Pilot exhaust port with piping thread (M3) specification X500 Electrical entry G, H, L, M D, Y, T TRIAC output specification X600 DC AC (50/60 Hz) 24, 12 Coil rated voltage (V) Allowable voltage fluctuation 24, 100, 110, 200,

Process Valve

Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Note) Electrical entry: D or DZ only 4 Note 1) 4 Note 1) 5 6 Note 1)

Short Stroke Electric Actuator Series LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.