10

x 1.25 7 21 16 5 63 32 18 35 75 56.5 20 13 45 14 16.5 28.5 11 58 50 64 M8 x 1.25 7 21 16 5 80 37 22 40 95 72 25 16 45 20 19 37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5 -Wl Bore size [mm] MM MO N NB P RF S V W WL ZZ S ZZ 32 M10 x 1.25 15 27 35 1/8 11 92 4 6.5 24 143 40 M14 x 1.5 19 27 40 1/4 11 97 4 9 24 152 50 M18 x 1.5 19

CG5-S

(G) T0403 Color symbol -20 T1075 Color symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Color symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Color symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Color symbol -20 White (W) Blue (BU) Blue

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Modular F.R.L. Unit

117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84 13 6.4 117.5 11 20 11 50 70 98 319 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of Optional specification Note 2) the piping.

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

ZP3

w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Refrigerated Thermo-chiller

-L 3 5 HRZ002-H 4 HRZ004-L HRZ001-H 2 3 HRZ002-L 2 1 HRZ001-L 1 0 0 20 30 40 50 60 70 80 90 20 10 0 10 20 30 40 Circulating fluid temperature (C) Circulating fluid temperature (C) HRZ002-W/008-W 4 HRZ008-W Heating capacity (kW) 3 HRZ002-W 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 81 Series HRZ Pump Capacity (Thermo-chiller Outlet) HRZ001-L/002-L/004-L HRZ008

VDW

VCL Standard Option t 1 Body Brass (C37) Stainless steel VCS 2 Tube assembly Stainless steel 3 Coil assembly VCW y 4 Armature assembly FKM, EPDM Stainless steel, PPS, NBR 5 O-ring (Body) FKM, EPDM NBR 6 Return spring Stainless steel q 7 Cover SPCE 8 Clip Stainless steel 245 Series VDW10/20/30 Dimensions VDW11-l G W VDW21-l G W 22 20 Lead wire l Approx. 300 Lead wire l Approx. 300 20

C95

0.2 0.6 EW L MR XD+Stroke Bore (mm) EW-0.2 -0.6 E1 EB R W MF FB CD L UB CB MR TR AO AT XA SA AH AB TF UF E2 ZF XD H9 h14 H14 48 55 67 80 100 120 38 46 52 62 63 75 16 20 25 25 30 35 10 10 12 12 16 16 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5

7.5

Symbol Stations 02 20 20 2 stations 20 stations Specify the valve stations not exceeding the maximum stations. SUP/EXH block fitting spec.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

MGG

11 12 115 200 50 M10 For long strokes Bore size (mm) Stroke range (mm) Bore size (mm) O Q R S T U V W X XA Z PG PL Y R Y 20 250 to 400 M6 x 1 depth 9 94 12 26 16 114 65 52 30 3 194 20 30.5 74 152 14 160 25 350 to 500 105 12 31 20 138 84 62 37 3 228 M8 x 1.25 depth 13 25 35.5 82 162 14 170 32 350 to 600 106 12 38 20 138 84 62 37 3 228 M8 x 1.25 depth 13 32 35.5 82 165 14 173 40 350 to 800

Hygienic Design Cylinder Series HY

W 50mm W 860 Series HYQ Hygienic Design Cylinder Basic Type Construction: 20, 25 Basic type !1 u y o !4 e !2 !0 r !5 !3 t q i w Rod end male thread !6 !8 !7 Built-in magnet !9 @0 @1 CJ5 CG5 (Auto switch D-F6) Component Parts HY No. Description Material Qty. Note No. Description Material Qty.

T

Burst Pressure Characteristics Curve and Operating Pressure How to Order 5 TPS0604 B 20 4 Burst pressure (MPa) Tubing model Burst pressure 3 Color Length per roll Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20 m roll 100 m reel Symbol 20 100 Max. operating pressure 2 1 20 0 0 20 40 60 80 Operating temperature (C) 15-6-23 1 Miniature Tubing and Miniature Fittings Series

Fieldbus System

mA, 4 to 20 mA Input signal range 16 bit resolution 10 to 10 V, 5 to 5 V 20 to 20 mA EX600-AXA Max. rated input signal 15 V 22 mA Note 2) Input impedance 100 kW 50 W Linearity (25C) 0.05% F.S.

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Air Cylinder

30o MM W W AL T T A A A MM L H H H 25 Series CA2 Simple Specials These changes are dealt with Simple Specials System.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

Vacuum Module Series ZX

VDC are applicable to 0.45 W.