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Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721 30 250 -79No.PF-OMM0004-D / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -80No.PF-OMM0004-D PF3W704/720/740/711 A AA B D E F G H J K L N P PF3W704 3/8 70 50 30 60 40.6 15.2 24 14

Note Panel mount adapter ZS-26-B Waterproof seal with screw Front protective cover Panel mount adapter ZS-26-C Waterproof seal with screw Protective cover only ZS-26-01 Please order panel mount adapters etc. separately Power supply/output lead wire ZS-40-W Lead wire length: 2 m Sensor connector (e-con) ZS-28-C-5 1 pcs Copy lead wire ZS-40-Y Connect up to 10 copy destination units -9No.LFE

Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25 0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

6.15 The Schmitt Trigger .6-10 6.16 The Hour Meter .6-11 7.

Specifications C 30 - Doc. no. ZQ-OM00801-D 31 - Doc. no. ZQ-OM00801-D Circuit Diagram Specifications of a Single Unit Ejector System L a L a L a t t t c h c h c h i i i L a L a L a n g n g n g 32 t t t t t t c c c y y y h h h Doc. no. ZQ-OM00801-D Pump system 33 - Doc. no. ZQ-OM00801-D Manifold Specifications Ejector System ZZQ1-BSB ZZQ1-BSC Pump system ZZQ1-OB ZZQ1-OC 34 - Doc. no.

Latching Operation Indicator light A-C ON (Set) Vacuum generation Orange B-C ON (Reset) Vacuum stop Green N.C. Operation Indicator light A-C ON (Set) Vacuum generation Orange OFF Vacuum stop If the supply valve is latching type, continuous energization is not necessary because it maintains the switching position with momentary energization for at least 10 msec.

Specifications Fluid Air Operating pressure range MPa 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time ms (at 0.5 MPa) Note 1) 10 to 50 (No freezing.

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 37 (mm) r2 = 2.7) A part z1 m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Calculation of weight m1 = a x b x c x Specific gravity Moment of inertia around Z1 axis IZ1 = {m1(a2 + b2)/12} X 10-6 Iz1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) IA = 0.8 x 10-6 + 0.006 x 372 x 10

Graph 1 30 20 10 The movement time is the time that is necessary for the load to travel the total movement distance from the start without any intermediate stops. 2.

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Non-rotating rod type C76 Pin cylinder Series C(D)JP 20-CJP Double acting C85 20-CJP Single acting C95 Large bore size cylinder Series C(D)S1 CP95 20-CS1N Standard type NCM Cylinder with lock Series C(D)NA NCA 20-CNA Standard type DCylinder with end lock Series C(D)B 20-CBM2 Standard type -X 20-CBA1 Standard type 20Plate cylinder Series M(D)U 20-MU Standard type Data 20-MUW Double rod type

10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25 10 10 10 5 5 5 4 4 4 E-MY2HT16

VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port] 2 x 4.3 (For mounting) 2 x 4.3 (For mounting) 25.5 10 SYA 10 4A 4A 5 SYJA 1 1 26.4 26.4 20 20 10 1/8 (Pilot port: Upward) 1/8 (Pilot port

Applicable model Accessory AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Bracket assembly Note 1) AR50P-270AS Note 5) AR50P-270AS Note 5) Note 6) Note 6) AR10P-260S AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 Round 1MPa Note

26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20

C D E F G J K 15 2(A) 4 1(P) 4 VHK R-04F-04F 14.4 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHK R-06F-06F 16 6 6 16.8 VHK R-08F-08F 17 8 8 19.2 VHK R-10F-10F 29 10 10 23.3 VHK R-12F-12F 32 25.7 12 12 Flame Resistant Type: 1(P)/2(A): Male Thread Reference dimensions after