Table of Contents

(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust

Air Slide Table

A C B A C B A stroke operation 1) Initial state (0 stroke position) W W A stroke B stroke A stroke 2) Operation When the air pressure is supplied from the A port, the rod operates the A stroke. A Precautions C B A stroke Caution 1. Do not supply air until the cylinder is fixed with the attached bolt. 2.

LJ1H

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN HF-3040A-UN 6-K 3-L 3-L G 1 F 2 E 1 D 2 M J 2 C 1 C 1 H 2 B 2 A 5 Dimensions [mm] Model A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25, M5 M4 length 8 HF3040A-UN 260 210 85 155 140 125

Step Motor Controller

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector B terminal no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Battery-less

9@0 q @2 @3 y@7 A A u i @1 !5 @1 !0 !4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

7

5 C 6 D ( ): Denotes the Normally Open (N.O.) dimensions. 144 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water Dimensions/VXD2 /2 Body Material: C37, Stainless Steel 5 C 6 D Conduit terminal (U2) (V2) E 34 C VX2 32 25 T VXK VXD VXD G1/2 M A VXZ OUT IN VXS B VXB L K F I 2 x P Port size VXE (D) J VXP E U 280 C Conduit VXR 23 T VXH G1/2 VXF A B VX3 IN OUT M VXA 2 x P Port size

HRX-OM-X010

Item Descriptions Setting Range Factory Default HRZ002-WS/W1S-F -10.0 to 90.0 deg C HRZ004/008/010-WS/W1SF 1 TEMP SP Allows the setting of circulating fluid discharge temperature. 25.0 deg C -20.0 to 90.0 deg C HRZ***-W2S-F : 10.0 to 60.0 deg C HRZ008-L/L1-F : -20.0 to 40.0 deg C 2 OFFSET Allows the setting of OFFSET value* -20.0 to 20.0 deg C 0.0 deg C HRZ***-WS/W1S/W2S-F 10.0 to HRZ***-

Electric Actuator

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L)[m] 1 3 5 8 A B C 1 2 A6 B6 1.5 3 5 8 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) Actuator side (14) (18) (Terminal no.

JXCx-OMT0023

Table 11.2 Wire size selection example 2 (HIV wire) Driver Wires [mm2] (Note) 1) L1 L2 2) 24V 0V 3) U V W 4) P C 5) B1 B2 LECSA-S1 2(AWG14) 2(AWG14) 2(AWG14) 2(AWG14) 1.25(AWG16) LECSAS3 LECSA2-S4 Note. Wires are selected based on the highest rated current among combining servo motors. 11 16 11.

CQ2

2 !3 !

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 1 2 Note) 2 position single 100 VAC (50/60 Hz) G: Grommet C kit single only.

JXCx-OMT0001CN

0.4 0.6[Nm]) 0.4 0.6[Nm] -31No.JXC-OMT0001CN-C A B M5X14 (2) () M3 -32No.JXC-OMT0001CN-C (1)D (100) (2)2mm 2 D (3) 40 50mm ()100mm 100 -33No.JXC-OMT0001CN-C 5.

Air Cylinder

MM GA NDh8 D MM NN GA Piping port 2 x M5 x 0.8 NN C D B 0 0.3 Z + 2 x Stroke S + Stroke H NA F A NA F H + Stroke A B 0 0.3 Stroke With air cushion: CJ2WB 10 16 AZ Mounting nut WA WA Rod end nut 45 GA Piping port 2 x M5 x 0.8 GA C B 0 0.3 NA NA B 0 0.3 Z + 2 x Stroke S + Stroke For details of the mounting nut, refer to page 63.

JXCx-OMT0002

9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

ZP

With adapter 2 to 8 w q ZPT 02 U N A5 e Vacuum inlet (Male thread) Width across flats E C A5 M5 x 0.8 A6 M6 x 1 D Model A 15.5 A B2 C D E Vacuum inlet direction q Pad dia.

1

(C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.

ZP

C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If an adapter