Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 12, Valves: Not Provided, Allowable Kinetic Energy(J): 0.013, Torque

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 12, Valves: Not Provided, Allowable Kinetic Energy(J): 0.013, Torque

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 12, Valves: Not Provided, Allowable Kinetic Energy(J): 0.013, Torque

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 10, Valves: Not Provided, Allowable Kinetic Energy(J): 0.0003, Operating

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Double Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.0012, Operating

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): Less than 0.005, Tube Nominal Diameter: 15, Valves: Not Provided, Allowable Kinetic Energy(J): 0.001, Operating Pressure

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.005 to Less than 0.01, Tube Nominal Diameter: 9, Valves: Not Provided, Allowable Kinetic

Oscillation Angle A: [90°] 90°, Torque (Range)(N⋅m): 3 to Less than 6, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Round Shape, Operation Method: Single Vane, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 12, Valves: Not Provided, Allowable Kinetic Energy

Rotary table/vane style, Size 1, 3, 7, 20, Single vane and double vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .54634 lb, Model ?3Vane typeRotating angle ?

Rotary table/vane style, Size 1, 3, 7, 20, Single vane and double vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .50424 lb, Model ?3Vane typeRotating angle ?

PSxx-OMG0001CN

+420 mA 5 PNP2 + A B D + 1 2 M SI 1 1 2 L kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90

Voltage Monitor for PFMV5

Repeatability Reproducibility of the display or analogue output value, when the measured quantity is repeatedly increased and decreased The time from when the flow is applied as a step input (when the flow rate changes from 0% to 100% instantaneously) until the analogue output (voltage or current) reaches 90% of the actual flow rate.

LV50-OMQ0002

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

LFE-OMZ0011

R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

IZS30_eng

) } IZS30-BM ~ ~ }} ~~ )h dl g0i dQ j Thread for mounting M5 (Should be prepared by user) Angle ajustment available (90) Surface electric potential sensor (IZS30-D1) Sensor bracket (IZS30-BS) 2X2-M5X0.8 dpt6 2-M5X0.8 dpt7 Detecting hope 6P Modular jack (For Sensor plug for cable) l g0h l)i dQ Shaft 8 for mounting (Should be prepared by user) Mounting hole 8 Attached thread M5x0.8 IZS30

IZD10_eng

Installation distance mm Min. installation interval mm Object that is not to be measured Sensor head Charged object 10 20 20 40 Installation distance 25 45 30 55 40 65 50 75 60 90 Min. installation interval 70 100 75 105 Electrostatic sensor is affected by electric field or electromagnetic field due to its operation principle.