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Applicable bore size (mm) Snap ring l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 C type 3.2 C type 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 C type 5 C type 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7

AC VXR21 DC 50 45 20 60 40 15 AC VXR22 DC 50 60 25 60 50 20 AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature oil (2) High temperature water (2) (D) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum Minimum 10 5 (1) Note 1) 50 cSt or less Note

C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

(mm) Unit Tightening torque MY1B/M/C MY1H Tube I.D. (mm) 10 0.4 20 H 1.2 16 0.7 0.7 25 L 1.2 20 1.8 1.8 H 3.3 25 3.5 1.8 32 L 3.3 32 5.8 3.5 H 10.0 40 13.8 5.8 40 L 3.3 50 13.8 H 10.0 63 27.5 Table-3 List of Tightening Torque Stroke adjustment of the shock absorber (Lock plate type) Adjust the stroke by rotating the shock absorber after loosening the two lock plate retaining screws.

CN5: Parallel I/O Connector . 25 7.1 Parallel I/O connector specifications . 25 7.2 Parallel I/O specifications . 25 7.3 Parallel I/O circuit (NPN, PNP) . 25 (1) Parallel I/O input circuit . 25 (2) Parallel I/O output circuit . 26 7.4 Parallel I/O signals (Step Data input type) . 27 7.5 Parallel I/O signal cable (Step Data input type) . 31 7.6 Parallel I/O connector wiring (example) . 32

Port thread Port thread Rc Rc G G NPT C2SL-6(Z)-A NPT C2SL-36(Z)-A C2SL-6-A C2SL-36-A Semi-standard Semi-standard C Semi-standard 3C Part no. Part no. Port thread Port thread Rc Rc G G NPT C2SL-C(Z)-A NPT C2SL-3C(Z)-A C2SL-C-A C2SL-3C-A B B External appearance drawing and part no. Semi-standard 6C Semi-standard 36C Part no. Part no.

How to Order Port Number e r KT10 R C 4P 4 1 0 0 Installation option Delivery pressure Code Installation Panel installation Delivery pressure Code 5 to 500 psig (0.034 to 3.4 MPa) 5 to 800 psig (0.034 to 5.5 MPa) 10 to 1500 psig (0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) 1) No code

[] 2 [F 0] 2 F0 F1 F99 2 -24No.PF-OMP0001CN-F [F 0][rEF] [rEF] [Anr] 26 1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P

F 6.5 Note 1) 4 M3 0.5 depth 2 Rail mounting screw (mm) 7.5 24 Stroke Table dimensions Rail dimensions Home position Model A B C D 10 Note 4) E 60 F 50 G 4 H 10.5 LAT3m-10 49 4 LAT3m-20 20 69 6 25 90 80 14 20.5 Note 2) depth 2 +0.03 0 3 depth 2 +0.05 0 3 3.5 LAT3m-30 30 89 6 25 120 110 24 30.5 Rail dowel pin hole 320.1 16 Note 2) 2 Card Motor Controller Series LATC4 RoHS How to Order LATC4

50 25 50 Purge air flow rate L/min(ANR) 6 12 3 6 Inlet air pressure MPa Inlet air temperature oC Inlet air saturation temperature oC Ambient temperature oC Dew point indicator purge air flow rate *Note 1 *Note 1 -20 -15 *Note 2 Standard performance conditions 0.7 25 25 25 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} *Note 3 1/8 1/4 Port size Mass kg (With bracket) 0.25 (0.31) Model

(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top

4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMT0001CN-E 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F

Component parts Cable length 1.5 m 3 m 5 m 8 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Applicable base VV5Z3-45F For details, refer to page 3-3-8.