Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 4 +0.030 0 29.5 (Extension end adjuster) 10 Bottom view of MXQ12L-40 13228.5 J I 5.5 10 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 Max. 13 (Retraction end adjuster) 4H9 ( ) depth 4 +0.030 0 9 39 29 4H9 ( ) depth 4 +0.030 0 5 HA GA A B NN x M5 x 0.8 thread depth 10 9 8.5 9 4.2 4.2 A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 e (1 pc.) @4 10-11-10 10 Series MIW/MIS Escapements Construction: Single Finger Type (MIS) 8 12, 20 i e u q !3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !

Stainless Steel One-touch Fittings Series KG

Nylon Urethane KGW04-M5 KGW04-01 8 32 38.5 18 30 37.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 8 3.0 3.0 1 8 10 6 17 12.8 20 10 1 4 KGW06-02 46 46.5 10.9 10.9 17 14 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 18.5 20.5 14.2 15.2 14 12 23 3 8 KGW08-03 17 51.5 52.5 74

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

T

(mm) 6 8 10 12 2.5 I.D.

51

A A1 E1 L1 MM R1 U1 NX NDH10 U1 L1 A A1 L1 U1 A1 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 8 10 18 22 28 32 M10 x 1.25 10.5 12.8 14 A M14 x 1.5 22 14 12 14 (mm) M18 x 1.5 28 18 16 20 Applicable bore size (mm) Included

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/Female Thread) ZPT 20/25/30 F-B 5/8/01 (Without Buffer/Female Thread) Width across flats P N M5 x 0.8 NL Width across flats 8 5 Y Width across flats 12 F Width across flats 10 Width across flats 3 F Width across flats 2 D 3 D C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F N NL P Model Model ZPT10F-B5 ZPT20F-B5 10 12 10 12.5 27 32 M5 x 0.8 5 9 1.5 ZPT13F-B5 ZPT20F-B8

ISO Standard Hydraulic Cylinder

D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54

ZX

(PE port) 70 11.5 17.5 17 38 35.4 28 25 5.8 5.4 8 26 Circuit diagram 2-3 1 47 5 3 1 M5 (or M6) (A port) Air supply release port 1 M5 (or M6) (PV port) Air supply pressure port (Mounting hole) 79.1 Normally open 60.1 23 7 1 20 21.6 10 8 Manual override (Push and turn the locking type override) 2-3.6 Bracket C Standard accessory (Mounting hole) Supply valve M5 (or M6) (D port) Vacuum release

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6( 5.8) 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8( 7.8) 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10( 9.8) 40 12 M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5

HEC_W-E

1 -8-3 TABLE 8-2 AVAILABLE MODE IN LEVEL 2 -8-4 TABLE 8-3 AVAILABLE MODE IN LEVEL 3 -8-5 TABLE 9-1 ALARM INFORMATION -9-1 TABLE 9-2 RESET OF ALARM -9-3 TABLE 9-3 ALARM CODE LIST -9-3 TABLE 9-4 TROUBLESHOOTING -9-5 TABLE 10-1 SIGNAL AND STYLE OF CONNECTORS -10-1 TABLE 10-2 POWER SUPPLY CABLE -10-2 vii Contents Abbreviations Abbreviation (The order of ABC) Meaning AC Alternating Current AT

Environment

Nil Without cable 2 2 5 5 A 10 !

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

silencer) ZH05B 6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

JA/JAH/JB/JS

For the screw-in depth of the female threads, refer to the dimensions (page 10-19-8). As a rule, after the rod bottoms out, back off 1 to 2 turns.

JA/JAH/JB/JS

For the screw-in depth of the female threads, refer to the dimensions (page 10-19-8). As a rule, after the rod bottoms out, back off 1 to 2 turns.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MX Lubrication Non-lube JIS Symbol +1.8 0 +2.8 0 1000 or less 1001 to 3000 +1.8 0 +2.8 0 MTS 2700 or less ; 2701 to 5000 Stroke length tolerance Rc 1/4 Front/Side port M5 x 0.8 Rc 3/8 Rc 1/8 MY Piping port size Bottom port (Centralized piping type only) 4 11 10 5 6 8 CY MG Stroke Adjusting Unit Specifications CX 16 20 25 32 40 50 63 Bore size (mm) A L L A A L A L A L A L L A Unit symbol

HRX-OM-R005

-A-20-(BJM) . 9-7 9.5.2 HRS060-W-20-(BJM) . 9-7 9.6 Pump capacity. 9-8 9.6.1 HRS060--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-R005 Contents 9.9 Sample DoC. . 9-10 9.10 Daily Check Sheet . 9-11 Chapter 10 Product Warranty . 10-1 HRS Series HRX-OM-R005 Contents HRS Series HRX-OM-R005 Chapter 1 Safety Instructions Chapter