M-E05-1-LQ1

x 8 3-10 LQ1-3N10 LQ1-3B10 LQ1T31-TT2 3 Tubing extensions 10 x 8 3-10 LQ1-3N10 LQ1-3B10 3-10 LQ1-3N10 LQ1-3B10 LQ1T32-TT1 3 3-08 LQ1-3N08 LQ1-3B08 Tubing extensions 8 x 6 3-08 LQ1-3N08 LQ1-3B08 LQ1T32-TT2 3 Tubing extensions 8 x 6 3-08 LQ1-3N08 LQ1-3B08 3-08 LQ1-3N08 LQ1-3B08 LQ1T32-TT3 3 3-08 LQ1-3N08 LQ1-3B08 Tubing extensions 8 x 6 LQ1T41-TT1 4 4-12 LQ1-4N12 LQ1-4B12 Tubing extensions

CNA

N K F M M BN W V lC lB With rod boot e 8 f l ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 X 1.25 6 14 to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Hygienic Design Cylinder Series HY

(mm) Bore size A1 82 85 MM M6 x 1.0 M8 x 1.25 20 25 B1 10 13 C1 10 12 H1 3.6 5 K 5 5 KA 6 8 L1 22 24 X 12 14 (mm) Bore size A 70 71 H M4 x 0.7 M5 x 0.8 20 25 B 60 61 C 8 10 D 8 10 E 33 40 F 6 6 I 42 50 K 5 5 KA 6 8 L 10 10 M 22 26 N 4.4 5.4 OA M5 x 0.8 M6 x 1.0 Q 14 14 R 10 10 SA 6.5 6.5 SB 10.5 11 Stroke range 50 or less 50 or less Note 1) The [ ] value denotes dimensions with the auto

CRBU

CRA1 CRQ MRQ MSQ MSUB L1 (mm) (mm) (mm) Size 10 15 20 30 X Size 10 15 20 30 L1 Y Size 10 15 20 30 L1 L2max X 5 (8 Y) to (Y to 1) 6 (9 Y) to (Y to 1.5) 7 (10 Y) to (Y to 1.5) 8 (13 Y) to (Y to 2) 19 (14 X) to (X 1) 10 (18 X) to (X 1.5) 10 (20 X) to (X 1.5) 12 (22 X) to (X 2) 3 to 8 3 to 9 3 to 10 5 to 13 3 to 14 3 to 18 3 to 20 5 to 22 3 to 14 5.5 to 18 7 to 20 7 to 22 9

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(PE: Pilot EXH port) Applicable tubing O.D: 4, 5/32" [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting (X: External pilot port) Applicable tubing O.D: 4, 5/32" U side D side L3 (L4) C6: 18.1 N7: 20.6 Manual override switch C6: 9.6 N7: 12.1 (9.1) Valve lock switch (1.8) 8 19.3 (16.3) 10 (7) 5.5 20.8 56.2 35 17.2 PE X DIN rail B A B A B A B A B A B A 9.9 Manual

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F MX L L L L = 100 mm 8 L = 100 mm 8 MTS MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 8 L = 100 mm 0.03 0.04 MY 0.06 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 0.05 MXP8-10 MXP8-10 MXP8-20 MXP8-20 MXP8-10 MXP8-20 0.03 CY 0.02 0.04 0.02 0.03 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

CXWM/CXWL

For details, refer to page 8-30-52. It is impossible to mount solid state switches to the housing mounting 10. 8-26-50

5 Port Air Operated Valve Series SYA3000/5000/7000 1

) 1.8 (Ventilation hole) 2 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) SYA7120-02 1/4 (A, B port) 5-2-15 14 Series SYA3000/5000/7000 Series SYA7000: Body Ported 2 position double SYA7220C8, N9 C10, N11 1/8 (Pilot port) One-touch fitting (A, B port) 2 4.2 (For manifold mounting) Applicable tubing O.D.: 8, 5/16" 10, 3/8" Courtesy of Steven Engineering, Inc.-230 Ryan

0.55

N.C. 3.2 4 6 8 10 12 16 1P, 2A, 3R 1/8, 1/4 VP(A)300 X M5 1P, 2A, 3R 1/4, 3/8 VP(A)500 X 1/8 N.O. 1P, 2A, 3R 3/8, 1/2 VP(A)700 1. Remove the body from the sub-plate and reset the H mark on the body corresponding to the N.O. mark on the sub-plate as shown in the figure above. 2.

4/5 Port Air Operated Valve Series SYJA3000

Ported/SS5YJ3-41Stations -M5, [ ]: AC 91.7 [96.1] Approx. 300 (Lead wire length) C4 N3 For (Built-in One-touch fitting) Grommet (G) For M5 (Pitch) P = 10.5 16 1/8 (P port) 10 Manual override 1/8 (P port) 36.4 10 10 61.7 [63.9] 60.9 [63.1] 21.4 78.8 [83.2] R R B B B B B 7.8 39.5 38.7 36.5 11.5 18 4.3 21.5 (4.4) P A A A A A 3 1/8 (R port) (Station n) (Station 1) 2-4.5 (For mounting) L1 L2

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

CQS

Double clevis Without auto switch With auto switch Bore (mm) Stroke range (mm) A 40.5 41.5 51 57.5 B 17 17 19.5 22.5 CL 34.5 35.5 42 47.5 A 45.5 46.5 61 67.5 B 22 22 29.5 32.5 CL 39.5 40.5 52 57.5 12 16 20 25 5, 10 Bore (mm) RR L1 L CZ CX CW CU CT CD 12 16 20 25 6 6 9 10 14 15.5 18.5 22.5 3.5 3.5 4.5 5 10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 *Refer to p.2.3-18 for detail

Fieldbus System

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 Size (mm) 10 X L1 Size 3 to 8 5-( 8-Y) to (Y-1) 15 10 3 to 9 6-( 9-Y) to (Y-1.5) 9-(14-X) to (X-3) 5 to 14 Y = L1 = 20 15 3 to 10 7-(10-Y) to (Y-1.5) 10-(18-X) to (X-4) 8 to 18 L2 = 30 20 5 to 13 8-(13-Y) to (Y-2) 10-(20-X) to (X-4.5) 10 to 20 X = 40 30 7 to 15 9-(15-Y) to (Y-2) 12-(22-X) to (X-5) 10 to 22 Symbol: A11 The long

SMC Pneumatic Clean Series

+ Stroke ZZ + Stroke (mm) 2 1 10 10 10 10 GB M4 x 0.7 depth 7 J M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 1/8 1/8 1/8 1/8 P 27 19.5 19.5 15.5 AL Bore size Standard stroke range Up to 200 Up to 300 Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5

Membrane Air Dryer

40 24 223 209 1/4, 3/8 56 80 56 195 241 195 10 18 10 89 70 95 70 35 50 35 20 28 20 209 255 209 195 241 195 1/4 3/8 1/4 7.5 14 12 7 6 127 7 6 12 10 7 89 35 Made to Order Series IDG<A/IDG Reduced purge IDG<A Series Dimensions IDG60LAM2 IDG75LAM2 IDG100LAM2, 100SAM2 Single Unit Type Model Selection Made to Order Specific Product Precautions Unit Type SMC (F) 91 11 60 50 M V Purge air for 2.3