SMC Corporation of America
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Fittings & Tubing Air Cylinders Rotary Actuators Double acting 0.15 to 0.6 0.1 to 0.6 10 to 60C Operating pressure (MPa) Ambient and fluid temperature Repeatability Lubrication Effective gripping force (N) at 0.5 MPa Note) One side 10 0.1 Not required 14 45 74 131 228 396 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 4 Grease Cleanliness class (ISO class) Note) Gripping

63 84 30 8 44 22 14 60 77 60 11 M10 x 20 L 75, 100 10 to 50 91.5 CQ-C080 80 101.5 38 10 56 28 18 77 98 70 13.5 M12 x 30L 75, 100 101.5 10 to 50 110 120 CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.

(Refer to page 9 for contact protection box.) 22 2 6 Slotted set screw M2.5 x 4 l D-A90V without indicator light Indicator light 2.7 4.5 9.1 5.1 4 Most sensitive position 10 13 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Roller plunger VZM450-01-06 VZM450-01-06S Panel mounting hole 12 polyacetal or hard steel roller Hexagon nut thick 8, across flats 22 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 1.5 mm P.T. 18 N F.O.F. 2-3.5 mounting hole 2.0 mm O.T. 3.5 mm T.T. Toggle lever VZM450-01-08 T.T.

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

Reach Vacuump. 11 Vacuum Break Flow Rate Characteristics p. 11 Constructionp. 12 How to Order Replacement Partsp. 13 Dimensionsp. 15 Multistage Ejector ZL3/ZL6 Series How to Orderp. 19 Ejector Specificationsp. 20 Supply Valve/Release Valve Specifications p. 20 Pressure Gauge Specificationsp. 20 Vacuum Pressure Switch Specificationsp. 21 Weightp. 21 Internal Circuits and Wiring Examplesp. 22

Form w 1 Material e r Vacuum inlet 2 Connection 5 thread 04 22 11 1.2 06 08 2 10 13 16 23 12 N S U F GN GS HS ZP3 Y UM B5 B5 A Dimensions Per Vacuum Inlet: One-touch Fitting B Model Vacuum inlet A B C Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Flange . 9 Side Tapped . 10 Detachable Rear Clevis Mounting . 10 Head Trunnion . . 11 Rod Trunnion . 11 Center Trunnion . 12 Single Trunnion . 12 Double Rear Clevis .. 13 Side Lug Mounting ... 13 Dimensions . 14-40 Double Acting/Double Rod . 14-16 Non-Rotating Rod . 17-19 Stainless Steel Rod (XC6) Low Speed (XB9) . 20 High Temp (XB6)/Low Temp (XB7) . 21 Special Trunnion Location (X46US) . 22

HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

Bore size (mm) 40 50 63 16 20 25 32 Type Side support A MY-S40A MY-S63A MY-S16A MY-S20A MY-S25A MY-S32A Side support B MY-S40B MY-S63B MY-S16B MY-S20B MY-S25B MY-S32B For detailed dimensions, refer to page 8-12-22. 8-12-16 17 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Construction MY1W o !6 !3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !

Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

Series CG1 precision air cylinder has 8 bore sizes and can meet any application need. The tube is impact extruded aluminum to produce an extraordinarily smooth finish, allow low break-away pressure and smooth stroke action. Eight mounting options are available. Auto switch capable. CG1, double acting, single rod cylinder with made-to-order options, Bores sizes *: 20, 25, 32, 40, 50 63 *,

Series CG1 precision air cylinder has 8 bore sizes and can meet any application need. The tube is impact extruded aluminum to produce an extraordinarily smooth finish, allow low break-away pressure and smooth stroke action. Eight mounting options are available. Auto switch capable. CG1, double acting, single rod cylinder with made-to-order options, Bores sizes *: 20, 25, 32, 40, 50 63 *,

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, SE, 100MM CG DBL-ACT AUTO-SW, 1.76369 lb

Master Unit MODEL / Series / Product Number EX600-SEN3-X80 EX600-ED# EX600-LAB1 EX600-LBB1 Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 Wiring 15 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22