SMC Corporation of America
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Air supply .22 5-4. Piping .22 5-5. Operating environment .23 5-6. Lubrication .23 6. Maintenance or inspection .23 6-1. Maintenance or inspection .23 6-2. Replacement part .24 6-3. Maintenance .24 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

(Allowable inclination difference in the vertical direction is 5) 3) For IDFC60, mount male elbow (width across flats: 22) to the drain outlet port (width across flats: 27). For IDFC70, IDFC80 and IDFC90, mount male connector (width across flats: 22) to the drain outlet port (width across flats: 22) and mount the drain tube. Note 1) Apply sealant tape or sealant to fit the nipple.

(Allowable inclination difference in the vertical direction is 5) 3) For IDFA60, mount male elbow (width across flats: 22) to the drain outlet port (width across flats: 27). For IDFA70, IDFA80 and IDFA90, mount male connector (width across flats: 22) to the drain outlet port (width across flats: 22) and mount the drain tube.

No.PS-OMV0008CN-E / / ISE70G--L2 ISE75G--L2 ISE76G--L2 ISE77G--L2 ISE78G--L2 2 9 10 12 15 15 17 19 21 22 3 23 25 27 27 28 F0 30 F1 OUT1 32 F2 OUT2 35 F3 37 F4 38 F6 40 F10 41 F11 47 F14 Zero-cut 48 F80 49 F81 50 F90 52 F96 54 F98 55 F99 57 58 IO-Link 63 IO-Link 63 63 64 IO-Link 67 76 76 77 86 88 -1No.PS-OMV0008CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO

) M5()2 1.6 mm (22) -32No.PS-OMR0001CN-J 3 / ISA3 ,ISA3 (ISA-15) 2 4 6 (0.75 Nm10) -33No.PS-OMR0001CN-J 3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 -34No.PS-OMR0001CN-J 3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 ZS-31-B() ZS-31-C() -35No.PS-OMR0001CN-J 3 ISA-19-() 4 1 3 2 ISA-19-2/3(5 ) ISA-19-4/5/6(8 ) M12 -36No.PS-OMR0001CN-J 3 () ISA3-N DC+ OUT1 N.C.

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet:

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1/4 Inch Tube Weld), Connections, Outlet: TW4 (1/4 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet:

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: X [5 μin. (0.13 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV8 (1/2 Inch Face Seal, Female), Connections, Outlet: FV8 (1/2 Inch Face

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: FV4 (1/4 Inch Face Seal

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: 0

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face