Suction cups with flange

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

VQ4000

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

7

(for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

Pin Clamp Cylinders

Note) The tightening torque for the hexagon socket head cap screw (M2.5 x 11 L) is 0.2 to 0.3 Nm. The tightening torque for the hexagon socket head cap screw (M3 x 4 L) is 0.5 to 0.7 Nm. qRemove the set screw attached to the auto switch.

CQM

12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Display item), Set value (Threshold value) Sub screen Set value (Threshold value) Hysteresis value Visualization of settings Peak value Bottom value Delay time Piping Applicable fluid Series Output type Enclosure Copy function 1/4 (R, NPT, G) (URJ1/TSJ2) M5 female thread 1/8 (R, NPT) ZSE20(F)/ ISE20 1 output IP40 p. 9 ZSE20A(F)/ ISE20A 2 outputs Analog output (Voltage/Current) IP40 p. 11

EXxx-OMU0020CN

(M12 ) (EX245-DX1EX245-DY1) IP65 0.2Nm EX9-AWTS M12 10 . 10-4 (EX9-AWTS) 66 No.EX-OMU0020CN 11. 11.1. . 11-1 . 11-1 Length the EX245 series module n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6 (8 ) mm 67 No.EX-OMU0020CN 12. 12.1.

Dedicated Controller

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 <1> When this signal is OFF, an alarm is being generated for the actuator/controller.

KK/KK13

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

LD LH LS LT LX LZ MM N NA NB NC 20 to 800 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

S Couplers Series KK/KK13

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable

Compact Cylinder with Air Cushion Series RQ

Hs A Auto switch mounting height mm Proper auto switch mounting positions mm D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9V D-F9WV D-F9BAL D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 25 22 25 9.5 3 13.5 7 12.5 6 24.5 27 24 20 32 11 5.5 15 9.5 14 8.5 27 29 26.5 25 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 32 50 17 7 21 11 20 10 36.5 38.5 36 40 17 12.5 21 16.5 20 15.5

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Otherwise, chattering will occur. *9 When using a product with an analog output *10 When selecting 0 to 10 V, refer to the analog output graph for the allowable load current. *11 Standard condition (STD): 20 [C], 101.3 [kPa] (Absolute pressure), 65 [% RH] (The flow rate given in the specifications is the value under standard conditions.)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) 08, 09 06, 07 Number of needle rotations Number of needle rotations 15-9-44 3 Speed

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 DLead wire length (m) 3 54 54 54 DC (+) Brown 205 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most sensitive position 12.5 OUT () Blue D-Y7WV Mounting