High Power Cylinder:

D-B5 D-B6 D-A3l D-A44 D-G39 D-K39 D-B59W D-C7 D-C8 D-H7l D-H7lW D-H7lF D-H7BAL D-B5/B6 D-B59W D-G5NTL D-A3l D-G39 D-K39 D-A44 D-C73C D-C80C Bore size (mm) A B A B A B A B A B A B A B HS HS HS HS HS 20 20.6 9 14.6 8.5 14.1 14 10.5 16.1 12.5 18.1 11.9 17.5 19.6 15 24.5 27.3 62 69.7 27 25 20.6 9 14.6 8.5 14.1 14 19.6 10.5 16.1 12.5 18.1 11.9 17.5 15 27 29.8 64.5 72.2 29.5 32 22.6 8.9 16.6 8.4

Fieldbus system PROFINET compatible SI Unit

Red PWR or PWR(V) Refer to Fault 11 LED is ON. L/A port1 or L/A port2 Refer to Fault 12 LED is ON or OFF. SF or BF LED is Refer to Fault 13 red ON or red flashing. The valve does not work correctly. Refer to Fault 14 The digital input or output Refer to Fault 15 device does not work correctly. The analogue input or Refer to Fault 16 output device does not work correctly.

EXxx-OMQ0016

Green L/A IN or L/A OUT Refer to Fault 11. LED is not flashing. At least one SF and/or BF LED is ON red or flashing red. Refer to Fault 12. The valve does not Refer to Fault 13. work correctly. The digital input or output device does not work Refer to Fault 14. correctly. The analogue input or output device does not work correctly. Refer to Fault 15.

LA-OMP0023

20 0 5 10 15 20 Pushing Position [mm] Pushing Position [mm] LAT3-30 LAT3-30 6 6 Thrust Setting Value3.9 5 5 Thrust Setting Value3.9 Pushing thrust [N] Pushing thrust [N] 4 4 Thrust Setting Value2.6 Thrust Setting Value2.6 3 3 2 Thrust Setting Value1 2 Thrust Setting Value1 1 1 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Pushing Position [mm] Pushing Position [mm] Operating conditions: Operating

Air Cylinder CP Series Cylinder Positioner Assembly

0 5 9 (15) 4 . 1 3 (1051 2.42 (59) 5 . 1 2 1130) 224 (58) 6.69 (170) 2.24 (58i (52) 0 6 9 r7.5) e.60 (66) 1 m 1 3 8 {35) 3.98 o 0 1 ) 3.35 (85) 2.52 (64) 0.79 (20) 1 5 7 1.57 (40) 4 6 9 ( 1 1 9 ) a 0 2 (102) 3.07 (73) 0.94 (251 2.05 (52) 0.83 121) M12x1.Ts 0..11 ( 1 i ) 0 6 7 117) M22x1.5 1.46 (37) ( 1 1 6 ) 4.02 (102) 0.53 0 7 1 (18) 5 . 1 2 (130) 2.99 (76) 6.30 (r 60) 2 8 0 (71) 8 0 3

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

LEF-OM007xx

-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector D D 40 40 Motor Controller type Vacuum

PEEK

2 15 Series LVM20/200 Compact Direct Operated 2/3 Port Solenoid Valve for Chemicals Dimensions: Base Mounted LVM20R3 LVM20R4 LVM205R 37.4 13 2 x 3.4 Mounting hole 31 20 24 UL1007 AWG22 (Lead wire length) 300 2 x 5.7 58 5 3 2 1 6.8 2 depth 3 11 N.O.

Economy Valve

Varistor 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11). Neon bulb When 100 VAC or more Coil Note 1) The tightening torque should be within 0.5Nm +/15%. Note 2) Cable (7) external: 6 to 8 mm. Note 3) Crimped terminal like round-shape or Y shape cannot be used.

XSA Series

Construction and Outer dimensions 11 4. Special Option 14 5. Replacement Parts 15 6. Period and scope of warranty 16 7. Troubleshooting 17 1 XSA-OMS0001-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

VFRA3000

14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/8 3 position Pressure center 1.2 1/8 Note) ( ): Normal position 5-3-23 6 Series VFRA4000 Dimensions 03 04 2 position single: VFRA411103 04 2 position double

VEX-OMV0001

) (22) (12) (13) (14) (15) 10 VEX-OMV0001 P2 (22) (16) (12) (22) (17) () (18) (19) 3(R) (3) (6) (4) (20) 2(A) (22) (21) 11 VEX-OMV0001 No

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

CEx-OMQ0010

0.3MPa 30 21 M4x10 LOCK FREE 8-3 () 2 15 0.3MPa 30 [LOCK] 22 8-4 MPa () () mm 40 50 63 80 100 N 882 1370 2160 3430 5390 )15% 23 8-5 (kgf) (kgf) (mm/s) (mm/s) 24

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

Actuator Position Sensor

This product process data consists of switch output status and position measurement value Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Description 1 Position measurement value (PD) BDC4 BDC3 BDC2 BDC1 1: BDC = Binary Data Channel The process data of this product is Big-Endian type.

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

IIIIIII

Supplv Pressure 220 PSIG (15 Kgf/cm2) Operating Pressure 0-150 PSIG (0-9.9 Ksf/cm2) Operating Temperature 40-1 40"F (5-60.C) Media AirAir| AirlLiq.' AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.