“

20 30 40 50 0 10 20 30 40 50 Units used Units used Bleed air 0 IR No fixed throttle in the new design.

90

20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

ZL3-OM00601

3/E) port Rc1,G1,NPT1 3638 10 Doc.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

Rotary Actuator

Size Tightening Additional Size Tightening torque torque tightening torque 30 0.68Nm 30 5.1Nm 4.75.7Nm 50 50 21.6Nm 17.626.4Nm 1.41.8Nm 63 80 63 43.1Nm 35.250.8Nm 100 80 75.5Nm 61.692.4Nm 100 29 - Disassembly drawing Table (10) Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston (Seal groove) Slider (Sliding surface) GR-S-10 Tube gasket Piston

Electric Actuators

0.05 100 6 Without motor brake 100 9 30 10 Ball screw 0.03 80 High rigidity direct acting guide Sanyo Denki Co., Ltd. 200 1 200 2 Slide screw 0.05 100 With motor brake 100 4 30 5 Ball screw 0.03 80 Short Stroke Type Electric Actuator Series LX (AC Servomotor) Low particulate generation Positioning repeatability mm Motor Manufacturer Work load kg Maximum speed mm/s Brake Series

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

15 20 25 32 10, 20, 30, 40, 50 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm)

LFE-OMY0008

Add/dEC P1AH/n2AH P1dH/n1dH (31 ) P1L/n1L P1H/n1H/H1 (30 ) P_1/n_1/H_1 (30 ) 4. 4. 4. 4. SoG/SoR/REd/GRN(33 ) 5. 5. 5. 5. [F 1] OUT1 28 No.LFE*-OMY0008 1. 1. 1. 1. [F 1] [oUt1] 30 () 2. 2. 2. 2. (ON-OFF ) 29 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_1]) (33 ) b.

Clean Exhaust Filter

4 6 8 10 SFE1 3 SFE3 30 SFE4 65 SFE5 130 SFE7 200 Hollow fiber membrane The hollow fiber membrane has a porous construction with numerous fine holes on a straw type fiber membrane wall.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread Female thread 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Rod end thread tolerance JIS class 2 50 to 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 +1.0 0 Stroke length tolerance When stroke exceeds the standard range, refer to page 7-6-121.

45

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Air Cylinder NCA1 Series

8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7

NCA1

3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/

EXxx-OMK0006

10 to 0 (LSB) X bits 10 to 0 of COB-ID : The default values when the SI unit is supplied.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note)