CE2

across flat BL M14 x 1 Notice label Locking condition indication plate S + Stroke ZZ + Stroke Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C BL C CC D D E EE E F FF GA GB GC GD GL H1 J K M AA AL BB Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 71.5 22 60 42 20 44 22 16 21 11 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 27 25 to

Air-hydro Unit

10% Pressure compensating ability Load ratio: 60% compared to theoretical output Pressure compensating range N.C.

EXxx-OMN0029CN

ON/OFF LED PLC ST(0) () ON/OFF ST / (60 ) -37No.EX-OMN0029CN-D EX600No. H.T. () LED PLC 0 1 5 AXA / () / / H.T. () LED PLC 6 AYA () / / (60 ) -38No.EX-OMN0029CN-D EX600No. H.T. () LED PLC 0 1 7 AMB / () / / / / H.T. (SI ) ON/OFF LED PLC ON/OFF 8 ST(M) () ST(M) SI 9 ST(M) OFF PWR () DC24 V10 10 PWR(V) () DC24 V+10/-5 (60 ) -39No.EX-OMN0029CN-D No.

In-line Air Filter

10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 20 40 60 80 100 0 0 0

DOC1001322

, SiC 10, Carbon 10, PP 10 3-phase 380 to 415VAC(50/60Hz) Allowable voltage range 10%(No continuous voltage fluctuation) Power supply 3-phase 460 to 480VAC(60Hz) Allowable voltage range +4%,-10%(Max. voltage less than 500V and no continuous voltage fluctuation) Rated current A 40 Electrical system Applicable earth leakage breaker Sensitivity current mA 30 Rated operating current 5 A 22 Rated

Regulator AR30 to 60

Regulator AR30 to 60 Related Equipment How to Order AR 30 BE F 1N 03 Optional specifications Regulator Contents 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Symbol 1 N R Z Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 60 Note 1) Body size 30 40 50 60 1 3 8 1 2 3 4 Display units for product name plate and pressure gauge: PSI, F.

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

VXA21/22

1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

AC Servo Motor Driver (SSCNET Type)

5 2.86 20 10 5 Parameter *1,*2 Para.

Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

0.01

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

to 60 (14 to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC (50/60Hz) Rated voltage 10% of rated voltage

3 Position Cylinder Series RZQ

Full stroke 5 10 10 15 15 15 20 20 15 2 pcs.

Magnetic Separator FHM Series

50 40 30 20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Double acting 17-5-45 4 Series LVD Standard Specifications LVD40 LVD50 LVD20 LVD30 Model LVD10 Metric 10, 12 12, 19 4, 6 6, 8, 10 3, 4 Tubing O.D.

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

IDX-OM-W037

Operation/ Shutdown Fig 3.8 Timing chart of signals Reset a counter of Abnormal stop 10 min Abnormal stop 4 (1) The abnormal stop will be automatically reset until 4 times within 60 minutes, but the 5th time will not be automatically reset in this case, reset Automatic return 60 min Abnormal stop 3 Abnormal stop 2 Abnormal stop 1 Manual Abnormal stop 5 (2) When the alarm is generated by the

Fieldbus system Digital unit

mA or less Enclosure IP40 (With manifold assembled) Operating temperature range -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) 1 Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%RH (No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and FE Insulation resistance 500 VDC, 10 M or more between external terminals

PF-OMM0004_C

L/min 10 L ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L -14No.PF-OMM0004-D ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2